Utah-94-721002-System-Manual.pdf - 第220页

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Appendix S Qualitative Specifications for all of Oxford

Instruments Plasma Technology’s Plasma and Ion

Beam Systems

Issue 16: April 05 Page 1 of 22

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CONTENTS

Introduction.................................................................................................................3

2. Cooling / Warming water............................................................................................4

2.1 Recirculation water ............................................................................................................5

2.1.1 Mandatory Specifications for recirculated water systems .......................................6

2.2 Total Loss Cooling...............................................................................................................7

2.2.1 Mandatory Specifications for total loss cooling systems .........................................8

3. Electrical supply ..........................................................................................................9

3.1 System earthing and bonding...........................................................................................9

3.1.1 Earth connection.........................................................................................................9

3.1.2 Neutral supply bonding............................................................................................10

3.1.3 Residual Current Circuit Breakers............................................................................10

3.2 Mandatory Specifications for electrical installations.....................................................10

4. Compressed air..........................................................................................................11

4.1 Mandatory Specifications for compressed air supplies..................................................12

5. Nitrogen.....................................................................................................................13

5.1 Mandatory specifications for Nitrogen supplies............................................................13

6. Process gases.............................................................................................................14

6.1 Mandatory specifications for process gas supplies ........................................................14

6.1.1 Systems using Helium wafer cooling.......................................................................14

6.1.2 Installation of low vapour pressure gases (e.g. SiCl

, BCl

, C

)............................15

7. Liquid Nitrogen .........................................................................................................16

7.1 Mandatory Requirements for Liquid Nitrogen systems.................................................16

8. Extraction...................................................................................................................17

8.1 Mandatory requirements for Rotary Pump extraction..................................................17

8.2 Mandatory requirements for Gas Pod extraction..........................................................17

8.3 Mandatory requirements for Cryogenic pump extraction............................................18

9. Environment..............................................................................................................19

9.1 Mandatory Specifications for the system environment.................................................19

10. Change Record...........................................................................................................20

11. OIPT locations worldwide.........................................................................................22

Fig 2.1: Recommended basic recirculation installation..............................................................6

Fig 2.2: Recommended basic total loss installation....................................................................7

Fig 3.1: Recommended electrical installation.............................................................................9

Fig 4.1: Recommended compressed air supply installation.....................................................11

Fig 5.1: Recommended nitrogen supply installation................................................................13

Fig 6.1: Recommended process gas supply installation ...........................................................14

Services Specifications

Issue 16: April 05 Page 2 of 22 Printed: 6-Jan-06, 8:44

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This document gives the specifications of the services required for the mä~ëã~ä~Ä=and=fçåÑ~Ä

systems. For details of cooling flow rates and electrical supply ratings, see the relevant system

installation data sheets.

Customers must ensure that the services as specified are available at the time of delivery to

reduce system commissioning time and potential problems.

Unless other arrangements have been made in writing with Oxford Instruments

Plasma Technology (OIPT), it is a requirement that services meet the following

specifications. If they do not meet these specifications then the system warranty

and process guarantees may be made invalid.

If you suspect that you may fail to meet ANY of these specifications, please contact Oxford

Instruments Plasma Technology (OIPT) immediately so that we can discuss the problem with

you.

Oxford Instruments Plasma Technology (OIPT) conducts a programme of continual product

development, and reserves the right to change the design and/or specification of equipment

without notice. The details contained in this document were correct at the time of printing

but should be confirmed immediately prior to delivery.

WARNING

BEFORE INSTALLING THE SERVICES REQUIRED FOR OIPT SYSTEMS, ENSURE THAT ALL

RELEVANT ASPECTS OF HEALTH AND SAFETY ARE FULLY UNDERSTOOD.

HEALTH AND SAFETY GUIDANCE AND INSTRUCTIONS ARE GIVEN IN SECTION 1 OF

ALL OUR SYSTEM USER MANUALS. THIS DOCUMENT IS AVAILABLE IN ENGLISH,

FRENCH, GERMAN AND JAPANESE.

Services Specifications

Printed: 6-Jan-06, 8:44 Page 3 of 22 Issue 16: April 05