Utah-94-721002-System-Manual.pdf - 第221页

System Manual lñÑçêÇ= fåëíêìãÉ åíë=m ä~ëã~ = qÉÅÜåçäçÖó== lfmq=póëíÉãë NK= fåíêçÇìÅíáçå= This document gives the specificatio ns of the services required for the mä~ëã~ä~ Ä= and =fçåÑ~Ä systems. For details of cooling fl…

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CONTENTS

Introduction.................................................................................................................3

2. Cooling / Warming water............................................................................................4

2.1 Recirculation water ............................................................................................................5

2.1.1 Mandatory Specifications for recirculated water systems .......................................6

2.2 Total Loss Cooling...............................................................................................................7

2.2.1 Mandatory Specifications for total loss cooling systems .........................................8

3. Electrical supply ..........................................................................................................9

3.1 System earthing and bonding...........................................................................................9

3.1.1 Earth connection.........................................................................................................9

3.1.2 Neutral supply bonding............................................................................................10

3.1.3 Residual Current Circuit Breakers............................................................................10

3.2 Mandatory Specifications for electrical installations.....................................................10

4. Compressed air..........................................................................................................11

4.1 Mandatory Specifications for compressed air supplies..................................................12

5. Nitrogen.....................................................................................................................13

5.1 Mandatory specifications for Nitrogen supplies............................................................13

6. Process gases.............................................................................................................14

6.1 Mandatory specifications for process gas supplies ........................................................14

6.1.1 Systems using Helium wafer cooling.......................................................................14

6.1.2 Installation of low vapour pressure gases (e.g. SiCl

, BCl

, C

)............................15

7. Liquid Nitrogen .........................................................................................................16

7.1 Mandatory Requirements for Liquid Nitrogen systems.................................................16

8. Extraction...................................................................................................................17

8.1 Mandatory requirements for Rotary Pump extraction..................................................17

8.2 Mandatory requirements for Gas Pod extraction..........................................................17

8.3 Mandatory requirements for Cryogenic pump extraction............................................18

9. Environment..............................................................................................................19

9.1 Mandatory Specifications for the system environment.................................................19

10. Change Record...........................................................................................................20

11. OIPT locations worldwide.........................................................................................22

Fig 2.1: Recommended basic recirculation installation..............................................................6

Fig 2.2: Recommended basic total loss installation....................................................................7

Fig 3.1: Recommended electrical installation.............................................................................9

Fig 4.1: Recommended compressed air supply installation.....................................................11

Fig 5.1: Recommended nitrogen supply installation................................................................13

Fig 6.1: Recommended process gas supply installation ...........................................................14

Services Specifications

Issue 16: April 05 Page 2 of 22 Printed: 6-Jan-06, 8:44

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== lfmq=póëíÉãë

NK= fåíêçÇìÅíáçå=

This document gives the specifications of the services required for the mä~ëã~ä~Ä=and=fçåÑ~Ä

systems. For details of cooling flow rates and electrical supply ratings, see the relevant system

installation data sheets.

Customers must ensure that the services as specified are available at the time of delivery to

reduce system commissioning time and potential problems.

Unless other arrangements have been made in writing with Oxford Instruments

Plasma Technology (OIPT), it is a requirement that services meet the following

specifications. If they do not meet these specifications then the system warranty

and process guarantees may be made invalid.

If you suspect that you may fail to meet ANY of these specifications, please contact Oxford

Instruments Plasma Technology (OIPT) immediately so that we can discuss the problem with

you.

Oxford Instruments Plasma Technology (OIPT) conducts a programme of continual product

development, and reserves the right to change the design and/or specification of equipment

without notice. The details contained in this document were correct at the time of printing

but should be confirmed immediately prior to delivery.

WARNING

BEFORE INSTALLING THE SERVICES REQUIRED FOR OIPT SYSTEMS, ENSURE THAT ALL

RELEVANT ASPECTS OF HEALTH AND SAFETY ARE FULLY UNDERSTOOD.

HEALTH AND SAFETY GUIDANCE AND INSTRUCTIONS ARE GIVEN IN SECTION 1 OF

ALL OUR SYSTEM USER MANUALS. THIS DOCUMENT IS AVAILABLE IN ENGLISH,

FRENCH, GERMAN AND JAPANESE.

Services Specifications

Printed: 6-Jan-06, 8:44 Page 3 of 22 Issue 16: April 05

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There are two acceptable methods of applying cooling / warming water to an OIPT system:

Recirculation: Water is pumped through the system by a dedicated *heater / chiller or heat

exchanger. After passing through the system, the temperature of the water

is adjusted before recirculating through the system.

*Many customers have a water recirculation facility shared by several

systems. This shared facility seldom provides water of suitable quality, and

so cannot usually be used for cooling any part of the OIPT system without

the use of a heat exchanger dedicated to the OIPT system.

Total Loss

Cooling:

Municipal (drinking quality) water is applied to the system from a mains

supply, passed through the system to cool it, then fed to a drain for

disposal.

Water failing to meet the recirculation or total loss cooling specifications must not be put

into the system without close consultation with OIPT.

In some circumstances, it may be appropriate to use a combination of recirculation cooling

and total loss cooling in one system.

It is recommended that the customer uses a dedicated heater/chiller either for the whole

system, or at least for the critical components. Note that chillers, which cool only, can give

problems with condensation on chamber components in some environments. This is a

particularly important consideration for production systems of the batch-load type. In severe

cases, they can produce sufficient condensation to damage components such as RF power

supplies, ferrofluidic seals and automatch units. Any damage so caused cannot be covered by

the system warranty.

Note that if a heater-chiller is used to provide warm water (above 30

C) for heated parts of

the system, then items such as the turbo pump will need an independent water supply.

Items such as turbomolecular pumps can be cooled with total loss cooling if they are of

stainless steel construction and if the water is suitable. If the water is not suitable, then a heat

exchanger may be necessary.

Total loss cooling cannot be used on any components that have aluminium in direct

contact with the coolant. See sub-section 2.1.

Services Specifications

Issue 16: April 05 Page 4 of 22 Printed: 6-Jan-06, 8:44