Utah-94-721002-System-Manual.pdf - 第222页

lfmq=póëíÉãë lñÑç êÇ=fåë íêìãÉåí ë=m ä~ë ã~=qÉÅÜåçäçÖó== System Manual OK= `ççäáåÖ=L=t~êãáåÖ=ï~íÉê= There are two acceptable methods of applying coo ling / warming water to an OIPT system: Recirculation: Water is pumped …

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== lfmq=póëíÉãë

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This document gives the specifications of the services required for the mä~ëã~ä~Ä=and=fçåÑ~Ä

systems. For details of cooling flow rates and electrical supply ratings, see the relevant system

installation data sheets.

Customers must ensure that the services as specified are available at the time of delivery to

reduce system commissioning time and potential problems.

Unless other arrangements have been made in writing with Oxford Instruments

Plasma Technology (OIPT), it is a requirement that services meet the following

specifications. If they do not meet these specifications then the system warranty

and process guarantees may be made invalid.

If you suspect that you may fail to meet ANY of these specifications, please contact Oxford

Instruments Plasma Technology (OIPT) immediately so that we can discuss the problem with

you.

Oxford Instruments Plasma Technology (OIPT) conducts a programme of continual product

development, and reserves the right to change the design and/or specification of equipment

without notice. The details contained in this document were correct at the time of printing

but should be confirmed immediately prior to delivery.

WARNING

BEFORE INSTALLING THE SERVICES REQUIRED FOR OIPT SYSTEMS, ENSURE THAT ALL

RELEVANT ASPECTS OF HEALTH AND SAFETY ARE FULLY UNDERSTOOD.

HEALTH AND SAFETY GUIDANCE AND INSTRUCTIONS ARE GIVEN IN SECTION 1 OF

ALL OUR SYSTEM USER MANUALS. THIS DOCUMENT IS AVAILABLE IN ENGLISH,

FRENCH, GERMAN AND JAPANESE.

Services Specifications

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lfmq=póëíÉãë lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual

OK= `ççäáåÖ=L=t~êãáåÖ=ï~íÉê=

There are two acceptable methods of applying cooling / warming water to an OIPT system:

Recirculation: Water is pumped through the system by a dedicated *heater / chiller or heat

exchanger. After passing through the system, the temperature of the water

is adjusted before recirculating through the system.

*Many customers have a water recirculation facility shared by several

systems. This shared facility seldom provides water of suitable quality, and

so cannot usually be used for cooling any part of the OIPT system without

the use of a heat exchanger dedicated to the OIPT system.

Total Loss

Cooling:

Municipal (drinking quality) water is applied to the system from a mains

supply, passed through the system to cool it, then fed to a drain for

disposal.

Water failing to meet the recirculation or total loss cooling specifications must not be put

into the system without close consultation with OIPT.

In some circumstances, it may be appropriate to use a combination of recirculation cooling

and total loss cooling in one system.

It is recommended that the customer uses a dedicated heater/chiller either for the whole

system, or at least for the critical components. Note that chillers, which cool only, can give

problems with condensation on chamber components in some environments. This is a

particularly important consideration for production systems of the batch-load type. In severe

cases, they can produce sufficient condensation to damage components such as RF power

supplies, ferrofluidic seals and automatch units. Any damage so caused cannot be covered by

the system warranty.

Note that if a heater-chiller is used to provide warm water (above 30

C) for heated parts of

the system, then items such as the turbo pump will need an independent water supply.

Items such as turbomolecular pumps can be cooled with total loss cooling if they are of

stainless steel construction and if the water is suitable. If the water is not suitable, then a heat

exchanger may be necessary.

Total loss cooling cannot be used on any components that have aluminium in direct

contact with the coolant. See sub-section 2.1.

Services Specifications

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System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== lfmq=póëíÉãë

OKN= oÉÅáêÅìä~íáçå=ï~íÉê=

WARNING

CHILLERS HAVE COMPONENTS, WHICH BECOME COLD ENOUGH TO CAUSE SERIOUS

INJURY. READ THE MANUFACTURER’S MANUALS BEFORE INSTALLING, OPERATING

OR MAINTAINING CHILLERS, AND ENSURE THAT ADEQUATE PROTECTIVE CLOTHING

IS WORN.

Recirculation water is used in systems where the user does not wish to consume water at a

high rate, or where it is wished to supply water to the system at a constant temperature.

Some systems contain aluminium in direct contact with coolant. These are the fçåÑ~Ä=RMM=

mäìë, the fçåÑ~Ä=PMM=mäìë, and mä~ëã~ä~Ä systems fitted with tables or turbomolecular pumps

with plain aluminium cooling channels. Certain aluminium chambers are also included.

However, the fçåÑ~Ä=PMM=mäìë does not contain aluminium in contact with water, unless it is

in the turbomolecular pump.

In these aluminium-containing systems, it is MANDATORY that the approved coolant is used

at all times. If the approved coolant and installation are not used, the system warranty will

not cover any damage caused by the coolant either directly or indirectly to the system or to

anything else.

It is the customer's responsibility to comply with the above requirement. If the customer has

any doubt as to whether their system falls into this category, they must contact OIPT for

further advice.

In systems that do not contain aluminium components, severe corrosion can still sometimes

occur: water will collect corrosive chemicals, and will be lacking in the oxygen that protects

stainless steel. We strongly recommend that the approved coolant is used. If an alternative

product or water is used, then it is entirely the customer’s responsibility to check for any signs

of corrosion or contaminated water. If the customer’s coolant has not been approved in

writing by OIPT, then the system warranty will not cover any damaged caused by the coolant

either directly or indirectly to the system or to anything else

The approved installation and coolant are shown in sub-section 2.1.1 and in Fig 2.1. Note that

the total water flow meter and the isolation valves are recommended for cooling monitoring

and ease of maintenance.

Customers should note, for example, that certain types of inhibitor will damage the pumps of heater/chiller units, and that the use

of municipal (drinking water) or deionized water can introduce harmful chemicals into the system. If plain water is used, distilled

water is by far the safest option.

Services Specifications

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