Utah-94-721002-System-Manual.pdf - 第224页

lfmq=póëíÉãë lñÑç êÇ=fåë íêìãÉåí ë=m ä~ë ã~=qÉÅÜåçäçÖó== System Manual DEDI CA T ED HEA T EXCHANGER OR CHILLER PLASM ALAB OR IONFAB SYS TEM ISOLA TION V AL VES 10-M ICR ON METAL MES H FI L TER MAXIMUM PRESSUR E DRO P A T…

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== lfmq=póëíÉãë

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WARNING

CHILLERS HAVE COMPONENTS, WHICH BECOME COLD ENOUGH TO CAUSE SERIOUS

INJURY. READ THE MANUFACTURER’S MANUALS BEFORE INSTALLING, OPERATING

OR MAINTAINING CHILLERS, AND ENSURE THAT ADEQUATE PROTECTIVE CLOTHING

IS WORN.

Recirculation water is used in systems where the user does not wish to consume water at a

high rate, or where it is wished to supply water to the system at a constant temperature.

Some systems contain aluminium in direct contact with coolant. These are the fçåÑ~Ä=RMM=

mäìë, the fçåÑ~Ä=PMM=mäìë, and mä~ëã~ä~Ä systems fitted with tables or turbomolecular pumps

with plain aluminium cooling channels. Certain aluminium chambers are also included.

However, the fçåÑ~Ä=PMM=mäìë does not contain aluminium in contact with water, unless it is

in the turbomolecular pump.

In these aluminium-containing systems, it is MANDATORY that the approved coolant is used

at all times. If the approved coolant and installation are not used, the system warranty will

not cover any damage caused by the coolant either directly or indirectly to the system or to

anything else.

It is the customer's responsibility to comply with the above requirement. If the customer has

any doubt as to whether their system falls into this category, they must contact OIPT for

further advice.

In systems that do not contain aluminium components, severe corrosion can still sometimes

occur: water will collect corrosive chemicals, and will be lacking in the oxygen that protects

stainless steel. We strongly recommend that the approved coolant is used. If an alternative

product or water is used, then it is entirely the customer’s responsibility to check for any signs

of corrosion or contaminated water. If the customer’s coolant has not been approved in

writing by OIPT, then the system warranty will not cover any damaged caused by the coolant

either directly or indirectly to the system or to anything else

The approved installation and coolant are shown in sub-section 2.1.1 and in Fig 2.1. Note that

the total water flow meter and the isolation valves are recommended for cooling monitoring

and ease of maintenance.

Customers should note, for example, that certain types of inhibitor will damage the pumps of heater/chiller units, and that the use

of municipal (drinking water) or deionized water can introduce harmful chemicals into the system. If plain water is used, distilled

water is by far the safest option.

Services Specifications

Printed: 6-Jan-06, 8:44 Page 5 of 22 Issue 16: April 05

lfmq=póëíÉãë lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual

DEDICATED

HEAT EXCHANGER

CHILLER

PLASMALAB

IONFAB

SYSTEM

ISOLATION

VALVES

10-MICRON METAL MESH FILTER

MAXIMUM PRESSURE DROP AT

RATED FLOW RATE 0.15 BAR (2.2 PSI)

TOTAL WATER FLOW

METER OF APPROPRIATE

RANGE

(FITTED WITH AN

EXTERNAL BYPASS

HAVING A CAPACITY OF

100% FLOW)

Fig 2.1: Recommended basic recirculation installation

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CAUTION

If clear (i.e. transparent) tubing is exposed to sunlight, algal growth can develop,

which can restrict coolant flow.

It is MANDATORY that clear tubing is not used in any part of the cooling system.

OIPT recommends the use of either black or dark green tubing.

CAUTION

It is the customer's responsibility not to exceed a pressure of 4.2 bar, or other

limit that has been set for the system. Exceeding this safe pressure may cause

irreparable damage to system components.

The water must be kept warm enough to prevent condensation on chamber surfaces and

outside system components. This applies to those parts of the system inside the clean room

and those parts in a service area. Condensation can damage components such as RF power

supplies, ferrofluidic seals and automatch units. Any damage so caused cannot be covered by

the system warranty.

Services Specifications

Issue 16: April 05 Page 6 of 22 Printed: 6-Jan-06, 8:44

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== lfmq=póëíÉãë

Pressure: Adjustable 0.7 to 4.2 bar (10 to 60 psi). Chiller / heat exchanger

to be fitted with a bypass having a capacity of 100% of rated

flow.

Temperature range: See system installation data sheets.

Minimum flows: See system installation data sheets.

Cooling capacity: See system installation data sheets.

Coolant: Hexid A40 (OIPT Part No. G/WATER/SUN/007 for 15 litres)

. This

product is propylene glycol based, and is pre-diluted ready for

use. See sub-section 2.1 for the warranty impact of not using

this product.

Filtration: 10 micron metal mesh water filter. Maximum pressure drop

0.15 bar (2.2 psi) at rated flow. For example, filter element

Balston SMC-100-12-10.

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Municipal (drinking) water may be used in total loss cooling of the system in situations

where clean water is freely available, but only if the water meets the specification in sub-

section 2.2.1. In case of any doubt, obtain the water specification from the water utility

company, and consult with OIPT. It is not practical to use total loss cooling where the water

temperature is critical.

PLASMALAB

IONFAB

SYSTEM

ISOLATION

VALVES

FILTER

0.9 MICRON FULL FLOW

TOTAL WATER FLOW

METER OF APPROPRIATE

RANGE

DRAIN

Fig 2.2: Recommended basic total loss installation

To order replacement fluid, check the capacity of the model of heater/chiller to be fitted to the system. Also allow at least 5 litres

for the system and connecting lines, or more if necessary.

Services Specifications

Printed: 6-Jan-06, 8:44 Page 7 of 22 Issue 16: April 05