Utah-94-721002-System-Manual.pdf - 第226页

lfmq=póëíÉãë lñÑç êÇ=fåë íêìãÉåí ë=m ä~ë ã~=qÉÅÜåçäçÖó== System Manual OKOKN= j~åÇ~íçêó=péÉÅáÑáÅ~íáçåë=Ñ çê=íçí~ä=äçëë=ÅççäáåÖ=ëóëíÉãë= CAUTION If clear (i.e. transparent) tubin g is exposed to sunli ght, algal growth ca…

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System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== lfmq=póëíÉãë
Pressure: Adjustable 0.7 to 4.2 bar (10 to 60 psi). Chiller / heat exchanger
to be fitted with a bypass having a capacity of 100% of rated
flow.
Temperature range: See system installation data sheets.
Minimum flows: See system installation data sheets.
Cooling capacity: See system installation data sheets.
Coolant: Hexid A40 (OIPT Part No. G/WATER/SUN/007 for 15 litres)
2
. This
product is propylene glycol based, and is pre-diluted ready for
use. See sub-section 2.1 for the warranty impact of not using
this product.
Filtration: 10 micron metal mesh water filter. Maximum pressure drop
0.15 bar (2.2 psi) at rated flow. For example, filter element
Balston SMC-100-12-10.
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Municipal (drinking) water may be used in total loss cooling of the system in situations
where clean water is freely available, but only if the water meets the specification in sub-
section 2.2.1. In case of any doubt, obtain the water specification from the water utility
company, and consult with OIPT. It is not practical to use total loss cooling where the water
temperature is critical.
PLASMALAB
OR
IONFAB
SYSTEM
ISOLATION
VALVES
FILTER
0.9 MICRON FULL FLOW
TOTAL WATER FLOW
METER OF APPROPRIATE
RANGE
DRAIN
Fig 2.2: Recommended basic total loss installation
2
To order replacement fluid, check the capacity of the model of heater/chiller to be fitted to the system. Also allow at least 5 litres
for the system and connecting lines, or more if necessary.
Services Specifications
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lfmq=póëíÉãë lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
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CAUTION
If clear (i.e. transparent) tubing is exposed to sunlight, algal growth can develop,
which can restrict coolant flow.
It is MANDATORY that clear tubing is not used in any part of the cooling system.
OIPT recommends the use of either black or dark green tubing.
CAUTION
It is the customer's responsibility not to exceed a pressure of 5 bar, or other limit
that has been set for the system. Exceeding this safe pressure may cause
irreparable damage to system components.
If total loss cooling with municipal water (drinking quality water) is used in the system or in
the pumps, the water quality must meet the following specifications. Note that increased
maintenance will be required if this water is used directly in the system as well as in the
pumps.
The water must be kept warm enough to prevent condensation on chamber surfaces and
outside system components. This applies to those parts of the system inside the clean room
and those parts in a service area. Condensation can damage components such as RF power
supplies, ferrofluidic seals and automatch units. Any damage so caused cannot be covered by
the system warranty.
• Pressure: 4 to 5 bar. Backpressure from the drain must be less than 1
bar.
• Temperature: 10ºC to 25ºC
• pH: 7 to 8
• Oxygen: Greater than 4mg/litre
• CO
2
and NH
3
: Less than 10mg/litre
• Chloride: Less than 100mg/litre
• Calcium
Carbonate:
Less than 75mg/litre
• Filtration: To 0.9 micron full flow, for example filter element Balston
200-50-50 or 200-95-50.
Services Specifications
Issue 16: April 05 Page 8 of 22 Printed: 6-Jan-06, 8:44
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== lfmq=póëíÉãë
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Classification: For European Community customers who need this information: The systems
are classified as Class A, Group 2 as defined in EN 55011 Clause 4.
Phase 1
conductor
Phase 2
conductor
Phase 3
conductor
Neutral
conductor
SAFETY
ISOLATION
BOX
3-Phase
supply
to
system
PLASMALAB
OR
IONFAB
SYSTEM
INDEPENDENT
EARTH (GROUND)
3-phase supply
or transformer
secondary
winding
Hand
Operated
NEUTRAL CONDUCTOR
BONDED TO EARTH
(GROUND)
Combined Circuit Breaker
to protect transformer
to system phase conductors
Fig 3.1: Recommended electrical installation
NOTES:
a) The combined Circuit Breaker MUST break all phases if any one phase
exceeds the set current limit.
b) The trip rating of the Circuit Breaker depends on the system type and the
supply voltage to the system.
c) The current-carrying capacity of the cables between the Circuit Breakers
and the system must be greater than the trip rating of the Circuit Breaker.
For example, if a 32A Circuit Breaker is fitted then a cable having
conductors of a minimum rating of 40A (32A x 125%) is required. The
conductors will have a minimum Cross Sectional Area (CSA) of 6.0 mm
2
.
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To meet international standards for RF interference, our systems are fitted with filtration on
the mains supply inputs. As a result, there is significant leakage to earth (ground) from the
mains supply.
WARNING
IT IS ESSENTIAL THAT AN EARTH CONNECTION IS MADE BEFORE CONNECTING THE
SUPPLY.
International standard IEC950, section 5.2, requires that a label is attached at the point where
the system is connected to the factory electricity supply: either to the safety isolation box, or
to the transformer, or to the electrical supply outlet socket. This label must contain the
following text:
Services Specifications
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