Utah-94-721002-System-Manual.pdf - 第227页

System Manual lñÑçêÇ= fåëíêìãÉ åíë=m ä~ëã~ = qÉÅÜåçäçÖó== lfmq=póëíÉãë PK= bäÉÅíêáÅ~ä=ëìééäó= Classification: For European Community customers who need this information: The syste ms are classified as Class A, Group 2 as…

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CAUTION

If clear (i.e. transparent) tubing is exposed to sunlight, algal growth can develop,

which can restrict coolant flow.

It is MANDATORY that clear tubing is not used in any part of the cooling system.

OIPT recommends the use of either black or dark green tubing.

CAUTION

It is the customer's responsibility not to exceed a pressure of 5 bar, or other limit

that has been set for the system. Exceeding this safe pressure may cause

irreparable damage to system components.

If total loss cooling with municipal water (drinking quality water) is used in the system or in

the pumps, the water quality must meet the following specifications. Note that increased

maintenance will be required if this water is used directly in the system as well as in the

pumps.

The water must be kept warm enough to prevent condensation on chamber surfaces and

outside system components. This applies to those parts of the system inside the clean room

and those parts in a service area. Condensation can damage components such as RF power

supplies, ferrofluidic seals and automatch units. Any damage so caused cannot be covered by

the system warranty.

• Pressure: 4 to 5 bar. Backpressure from the drain must be less than 1

bar.

• Temperature: 10ºC to 25ºC

• pH: 7 to 8

• Oxygen: Greater than 4mg/litre

• CO

and NH

: Less than 10mg/litre

• Chloride: Less than 100mg/litre

• Calcium

Carbonate:

Less than 75mg/litre

• Filtration: To 0.9 micron full flow, for example filter element Balston

200-50-50 or 200-95-50.

Services Specifications

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System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== lfmq=póëíÉãë

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Classification: For European Community customers who need this information: The systems

are classified as Class A, Group 2 as defined in EN 55011 Clause 4.

Phase 1

conductor

Phase 2

conductor

Phase 3

conductor

Neutral

conductor

SAFETY

ISOLATION

BOX

3-Phase

supply

system

PLASMALAB

IONFAB

SYSTEM

INDEPENDENT

EARTH (GROUND)

3-phase supply

or transformer

secondary

winding

Hand

Operated

NEUTRAL CONDUCTOR

BONDED TO EARTH

(GROUND)

Combined Circuit Breaker

to protect transformer

to system phase conductors

Fig 3.1: Recommended electrical installation

NOTES:

a) The combined Circuit Breaker MUST break all phases if any one phase

exceeds the set current limit.

b) The trip rating of the Circuit Breaker depends on the system type and the

supply voltage to the system.

c) The current-carrying capacity of the cables between the Circuit Breakers

and the system must be greater than the trip rating of the Circuit Breaker.

For example, if a 32A Circuit Breaker is fitted then a cable having

conductors of a minimum rating of 40A (32A x 125%) is required. The

conductors will have a minimum Cross Sectional Area (CSA) of 6.0 mm

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To meet international standards for RF interference, our systems are fitted with filtration on

the mains supply inputs. As a result, there is significant leakage to earth (ground) from the

mains supply.

WARNING

IT IS ESSENTIAL THAT AN EARTH CONNECTION IS MADE BEFORE CONNECTING THE

SUPPLY.

International standard IEC950, section 5.2, requires that a label is attached at the point where

the system is connected to the factory electricity supply: either to the safety isolation box, or

to the transformer, or to the electrical supply outlet socket. This label must contain the

following text:

Services Specifications

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“WARNING.

High leakage current.

Earth connection essential before connecting supply."

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WARNING

THE NEUTRAL CONDUCTOR MUST BE BONDED TO THE EARTH (GROUND)

CONDUCTOR. IF THIS IS NOT DONE ALREADY IN THE FACTORY SUPPLY, THEN IT

MUST BE DONE AT THE SAFETY ISOLATION BOX AS SHOWN IN Fig 3.1. IF AN

ISOLATING TRANSFORMER IS FITTED, THEN THE NEUTRAL CONDUCTOR OF THE

TRANSFORMER SECONDARY MUST BE BONDED TO THE EARTH (GROUND)

CONDUCTOR.

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Customers sometimes wish to fit a Residual Current Circuit Breaker (RCCB), also known as an

Earth Leakage Circuit Breaker (ELCB, or ELB) to the electrical supply to the system. This is not

recommended for this type of equipment, and a 30mA breaker is likely to trip often, due to

the leakage caused by the filters on the power lines. This leakage is in accordance with

International standard IEC950 section 5.2.

a) If you must fit an ELB, we strongly recommend a minimum current of 100mA.

b) Even a 100mA circuit breaker may trip, and we accept no responsibility if this turns

out to be the case.

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• Connection: In accordance with local regulations via a safety isolation

box, lockable in the OFF position, mounted adjacent to the

machine.

• Configuration: 3-phase, star ("Y") with a grounded neutral supply

connected to the centre point. An independent earth

(ground) is required.

• Maximum

Current:

The Maximum Current required by the system is given in the

relevant system installation data sheets.

• Voltage &

Frequency:

380V -10% to 415V +6% or 208V +/-10% phase-to-phase.

Frequency to be 50Hz or 60Hz. Note that voltage and

frequency cannot be changed from the values specified at

the time of ordering.

• Safety

Earthing:

The system safety earthing must be in accordance with local

Electrical Regulations. See Fig 3.1.

Services Specifications

Issue 16: April 05 Page 10 of 22 Printed: 6-Jan-06, 8:44