Utah-94-721002-System-Manual.pdf - 第23页
Health and Safety lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= mä~ëã~ä~Ä and fçåÑ~Ä Note that swarf and other pieces of material for disposal must be disposed of with great care and must be kept well away from fire, from cigare…
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1.3.7.1 Materials used in the construction of the system are in a safe state when installed.
However, fluorine-containing materials may be used as O-rings (e.g. Viton™
materials), as electrical insulation or as electrical isolation block (e.g. Teflon ™ or
other tfe or ptfe material) or as lubricating grease or fluid (e.g. Fomblin™,
Krytox™ or the NCI™ range from Leybold) If any of these materials are over-
heated, hazardous materials are created that can result in the loss of a limb or
death.
1.3.7.2 Very great care must be taken to ensure that Perfluoro-elastomer (Viton™) O-rings
are not exposed to high temperatures. If overheated, decomposition takes place,
producing a highly acidic residue containing hydrofluoric acid (HF).
If there is any evidence that a Viton™ O-ring could have been subjected to
temperatures in excess of 300°C the following actions must be carried out:
(a) Consult a competent authority regarding the following items (b) to
(e).
(b) Wearing suitable protective clothing, remove the O-ring and
dispose of it in accordance with local Health and Safety
regulations.
(c) Wearing suitable protective clothing, thoroughly clean the
contaminated area, disposing of any residue in accordance with
local Health and Safety regulations.
(d) Fit a new O-ring.
(e) Investigate the cause of the overheating and review operating
procedures and control systems to prevent a recurrence.
1.3.7.3 Teflon™ and other tfe materials. Very great care must be taken to ensure that
Teflon™ and other tfe or ptfe materials are not exposed to high temperatures. If
overheated, decomposition takes place, producing volatile fluorine containing
components.
If there is any evidence that any Teflon™ or other tfe or ptfe material could have
been subjected to temperatures in excess of 300°C the following actions must be
carried out:
(a) Consult a competent authority regarding the following items (b) to
(e).
(b) Wearing suitable protective clothing, remove the decomposed
material and dispose of it in accordance with local Health and
Safety regulations.
(c) Wearing suitable protective clothing, thoroughly clean the
contaminated area, disposing of any residue in accordance with
local Health and Safety regulations.
(d) Fit a new component.
(e) Investigate the cause of the overheating and review operating
procedures and control systems to prevent a recurrence.
Health and Safety
Issue 11: August 2004 Page 1-10 of 18 Printed:29 May 2005, 06:31
Health and Safety lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= mä~ëã~ä~Ä and fçåÑ~Ä
Note that swarf and other pieces of material for disposal must be disposed of with
great care and must be kept well away from fire, from cigarettes and other
smoking materials.
1.3.7.4 PFPE lubricating fluids. Very great care must be taken to ensure that PFPE fluids (e.g.
Fomblin™, Krytox™ NCI™ etc) are not exposed to high temperatures. If overheated,
decomposition takes place, producing volatile fluorine containing components.
If there is any evidence that any PFPE lubricating fluids could have been subjected to
temperatures in excess of 300°C the following actions must be carried out:
(a) Consult a competent authority regarding the following items (b) to
(e).
(b) Wearing suitable protective clothing, remove the decomposed
material and dispose of it in accordance with local Health and
Safety regulations.
(c) Wearing suitable protective clothing, thoroughly clean the
contaminated area, disposing of any residue in accordance with
local Health and Safety regulations.
(d) Replace with fresh grease or fluid.
(e) Investigate the cause of the overheating and review operating
procedures and control systems to prevent a recurrence.
Note that all PFPE material, including spillages of fresh fluid must be disposed of
with great care and must be kept well away from fire, from cigarettes and other
smoking materials.
Health and Safety
Printed:29 May 2005, 06:31 Page 1-11 of 18 Issue 11: August 2004
mä~ëã~ä~Ä and fçåÑ~Ä lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Health and Safety
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WARNING
SOME MATERIALS USED IN AND RESULTING FROM DEPOSITION AND ETCHING
PROCESS CAN BE DANGEROUSLY TOXIC; CONTACT CAN CAUSE SERIOUS INJURY
Before working on the process chamber or its associated components, consult a
competent authority to ascertain the nature of any coatings.
Wear appropriate protective clothing, e.g. hand and eye protection, as necessary.
1.3.8.1 Some compounds used in and resulting from deposition and etching processes can
be dangerously toxic. These compounds can be deposited as coatings on the inside
of the chamber, pipework etc. Therefore, suitable hand and eye protection must
be used.
1.3.8.2 Cleaning fluids and the gases given off from them may be toxic. Only use them in a
well ventilated area and avoid ingestion.
1.3.8.3 Always use suitable eye and skin protection when handling vacuum pumps and
mineral or synthetic oil. Apart from the hazards described in sub-section 1.3.7, used
oils and pumps may be contaminated with dangerous chemicals.
1.3.8.4 Study all relevant Material Safety Data Sheets (MSDS), or their equivalents, before
carrying out any maintenance work.
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1.3.9.1 Do not enter large vacuum chambers.
1.3.9.2 Process chambers and load locks under vacuum represent stored energy. If released
accidentally, this can cause injury. These spaces must be vented to atmospheric
pressure before the system is powered down in preparation for maintenance.
1.3.9.3 Handle vacuum capacitors carefully; if knocked or dropped they can implode
causing serious injury.
1.3.9.4 All view ports that are greater than 100mm diameter must be fitted with a clear
plastic implosion eye-guard on the outside. Replace this item only with the correct
part, and ensure that the ports are correctly reassembled.
If a plastic implosion eye-guard is not fitted, or if there is any doubt about the type
of eye-guard that is fitted, you must check with Oxford Instruments Plasma
Technology before proceeding.
1.3.9.5 Take care when opening vented vacuum vessels in case of excess pressure inside.
Health and Safety
Issue 11: August 2004 Page 1-12 of 18 Printed:29 May 2005, 06:31