Utah-94-721002-System-Manual.pdf - 第230页
lfmq=póëíÉãë lñÑç êÇ=fåë íêìãÉåí ë=m ä~ë ã~=qÉÅÜåçäçÖó== System Manual QKN= j~åÇ~íçêó=péÉÅáÑáÅ~íáçåë=Ñçê=Å çãéêÉëëÉÇ=~áê=ëìééäáÉë= • Inlet pressure to filter/mist separator/regulator unit: 6 bar (90 psig) minimum. OUTLET…
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A dry and clean compressed air supply at a minimum pressure of 6 bar (90 psig) must be fed
to a customer-supplied air filter/mist separator/pressure regulator unit mounted adjacent to
the machine. A suitable unit is supplied by SMC (part No. AC 2030); other units to the same
specification can be used. Maximum safe pressure in the customer's feed to the regulator
is determined by the regulator used (9.9 bar (148.5 psig) for the SMC unit).
The supply to the system must be monitored by a pressure gauge having a range of 0 to 10
bar (0 to 150 psi). The pressure regulator must be fitted with a stop to prevent a pressure
greater than 6 bar from being supplied to the system. The pressure to be used will be set
during commissioning of the system.
The following air filter/mist separator/pressure regulator unit components are recommended:
Air filter: SMC AF2000-02D with filter element 1129116A.
Mist separator:
SMC AFD2000-02D with filter element 63092. This filter element
must be changed annually. Note that as this item is not
supplied by OIPT, its maintenance is not included in the system
manuals.
Regulator with gauge: SMC AR2001-02G.
Spacers: 2 off SMC Y20L.
FILTER
MIST
SEPARATOR
ADJUSTABLE
PRESSURE
REGULATOR
DRY AND CLEAN
AIR SUPPLY
MINIMUM PRESSURE
6 BAR (90 PSIG)
PRESSURE
GAUGE
0 TO 10 BAR
(0 TO 150 PSIG)
SMC COMPONENTS
OR EQUIVALENT
COMPRESSED
AIR SUPPLY TO
PLASMALAB OR
IONFAB SYSTEM
(SEE SPECIFICATION)
6 MM
PUSH-FIT
CONNECTOR
Fig 4.1: Recommended compressed air supply installation
Services Specifications
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• Inlet pressure to filter/mist
separator/regulator unit:
6 bar (90 psig) minimum.
OUTLET TO SYSTEM:
• Oil content:
Less than 10 ppm
• Maximum Moisture Content: -3ºC (25ºF)
• Filtration: Maximum particle size of 0.3 microns
• Regulator outlet pressure: Adjustable from 3 bar to 6 bar (45 psig to 90
psig). 6 bar must be the maximum provided.
• Maximum flow rate:
135 litres/minute (5 scfm).
• Pressure monitoring: 0 to 10 bar (0 to 150 psi) pressure gauge.
Services Specifications
Issue 16: April 05 Page 12 of 22 Printed: 6-Jan-06, 8:44
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== lfmq=póëíÉãë
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Nitrogen is required to vent and purge process chambers, load locks and pumps.
2 MICRON
FILTER
REGULATOR
1/4"
SWAGELOK
CONNECTOR
TO PLASMALAB
OR IONFAB
SYSTEM
TO PUMP
PURGE
CONNECTOR
0 TO 1 SLM
FLOW CONTROL
ROTAMETER
(IF REQUIRED)
Fig 5.1: Recommended nitrogen supply installation
Semiconductor grade fittings and pressure regulators, together with electropolished stainless
steel tube must be used to ensure that gas quality is not degraded. Purges to turbo pumps are
supplied by OIPT as part of the system. The customer will usually need to fit a purge to the
rotary pump. See below.
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• Pipework fittings and
pressure regulators:
Semiconductor grade
• Gas handling tubing: Electropolished stainless steel
• Purity: At least 99.99% or higher to satisfy process
requirements.
• Filtration: 2 micron filter mounted adjacent to the
system.
• Regulation: 0.5 to 5 bar (7.5 to 75 psig)
• Minimum pressure at input
to system:
3 bar (45 psig). Certain pumps, for example
Edwards Drystar pumps, may need up to 5 bar
(75psig) to ensure satisfactory purging. Check
with the vendor's instructions.
• Rotary pump purging
It is the customer’s responsibility to ensure that a rotary pump purge
connection is fitted and used correctly. This is needed to ensure the protection
of the pumping system from the customer’s process, and may also be required
by local safety regulations. Because customers’ requirements vary, components
are not supplied automatically by OIPT. Kits of parts are available if required.
Contact OIPT for further information.
It may be safe to omit this feature on certain systems, such as Ionfab machines
running inert gas processes. However, unless the customer has written
agreement on this point from OIPT, any damage caused by the omission cannot
be covered by the system warranty.
Services Specifications
Printed: 6-Jan-06, 8:44 Page 13 of 22 Issue 16: April 05