Utah-94-721002-System-Manual.pdf - 第236页
lfmq=póëíÉãë lñÑç êÇ=fåë íêìãÉåí ë=m ä~ë ã~=qÉÅÜåçäçÖó== System Manual UKP= j~åÇ~íçêó=êÉèìáêÉãÉåíë=Ñ çê=`êóçÖÉåáÅ=éìãé=Éñíê~Åíáçå= WARNING ANY CRYOGENIC PUMP , WHICH PUMPS HAZARDOUS GASES MUST HAVE, A VE NT PIPE FITTED T…
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== lfmq=póëíÉãë
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The following mandatory requirements describe the extraction systems
recommended by OIPT. While these recommendations may be regarded as “good
practice”, they are not a complete definition of the safety standards required when
handling toxic, corrosive or otherwise hazardous gases. It is the customer’s
responsibility to ensure that the installation meets all relevant local safety
regulations and OIPT accepts no responsibility in this respect.
For detailed information about the safety aspects of gas handling and pumping
systems, the customer should consult the relevant manufacturer/supplier of the
gases and pumps to be used.
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The installation must provide a rotary pump exhaust extraction system which
matches the rotary pump exhaust and which conforms to local safety standards.
In particular, all fittings and pipework connected to the rotary pump exhaust must
be made from industry standard stainless steel in accordance with local safety
regulations.
Specialised equipment such as scrubbers and furnaces may be needed to dispose of
hazardous gases. The routing of the pump exhaust line must be arranged so that
condensates cannot flow back into the pump.
Note that there is a risk of damage from cross-contamination if rotary pumps share
one exhaust system. This applies whether the pumps are on the same system or on
different systems. Damage caused by any cross-contamination is not covered by the
system warranty.
Care must be taken to route mutually incompatible exhaust gases through separate
exhaust ducts. In particular, oxygen enriched exhaust gases should not be mixed
with exhausts from mineral oil pumps, otherwise, an explosion may occur.
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The gas pod must be connected to the customer's gas extraction system via a 100
mm diameter pipe collar to provide cabinet extraction with a minimum flow rate of
1 m
3
/hour (6-line gas pod) or 3 m
3
/hour (12-line gas pod), i.e. an extraction vacuum
of approximately 500 Pa relative to local atmospheric pressure is required. It is the
customer’s responsibility to ensure that the gas extraction system, including any
necessary gas sensors, meets local safety regulations.
Services Specifications
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lfmq=póëíÉãë lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
UKP= j~åÇ~íçêó=êÉèìáêÉãÉåíë=Ñçê=`êóçÖÉåáÅ=éìãé=Éñíê~Åíáçå=
WARNING
ANY CRYOGENIC PUMP, WHICH PUMPS HAZARDOUS GASES MUST HAVE, A VENT
PIPE FITTED TO ITS RELIEF VALVE TO PREVENT THE RELEASE OF GAS INTO THE CLEAN
ROOM.
THE PUMPS COLLECT THE PROCESS GASES AND THE GASEOUS RESIDUES DURING
OPERATION. THESE GASES ARE RELEASED THROUGH THE RELIEF VALVE DURING
PUMP REGENERATION OR IF ELECTRICAL POWER IS LOST.
If a cryogenic pump is used to pump toxic, corrosive, or flammable gases, a written
action plan is required. This must be prepared in consultation with OIPT and other
competent bodies. Specialised equipment such as scrubbers and furnaces may be
needed to dispose of hazardous gases.
If the pumped gases contain more than 20% oxygen, a vent pipe must be fitted to
the system’s cryo pump outlet connector. The vent pipe must be routed to a safe
place outside of the clean room and conform to local safety standards.
If a cryogenic pump is used to pump gases containing more than 20% oxygen, the
associated roughing pump(s) must be lubricated with a PFPE fluid, e.g. Fomblin or
Krytox.
Services Specifications
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System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== lfmq=póëíÉãë
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Rated for use in a Pollution Degree 1 Installation Category environment (laboratory
or clean industrial environment).
• Operating temperature: 5°C to 25°C.
• Storage temperature: 0°C to 50°C.
• Maximum humidity: 90% See NOTE 1.
• Minimum humidity: 10% See NOTE 2.
• Electrostatic build-up: Low static environment. See NOTE 2.
• Ambient light level: 300 lux minimum.
NOTE 1: High humidity will have a progressively significant effect on system
performance. At humidity greater than 50%, the rate of chamber pump-down
after venting the chamber will be affected significantly, and at humidity greater
than 65%, the rate of chamber pump-down may not meet system specifications.
NOTE 2: Low humidity will introduce a risk of electrostatic build-up, with subsequent
discharge to the system producing a malfunction or damage. The systems are
tested to EN60801-2, severity level 3. We recommend the use of an
environment, which protects against electrostatic build-up, and extra
precautions will be necessary at low humidity.
Services Specifications
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