Utah-94-721002-System-Manual.pdf - 第237页

System Manual lñÑçêÇ= fåëíêìãÉ åíë=m ä~ëã~ = qÉÅÜåçäçÖó== lfmq=póëíÉãë VK= båîáêçåãÉåí= VKN= j~åÇ~íçêó=péÉÅáÑáÅ~íáçåë =Ñç ê=íÜÉ=ëóëíÉã=Éåîá êçåãÉåí= Rated for use in a Pollution Degree 1 Installation Cate gory environmen…

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WARNING

ANY CRYOGENIC PUMP, WHICH PUMPS HAZARDOUS GASES MUST HAVE, A VENT

PIPE FITTED TO ITS RELIEF VALVE TO PREVENT THE RELEASE OF GAS INTO THE CLEAN

ROOM.

THE PUMPS COLLECT THE PROCESS GASES AND THE GASEOUS RESIDUES DURING

OPERATION. THESE GASES ARE RELEASED THROUGH THE RELIEF VALVE DURING

PUMP REGENERATION OR IF ELECTRICAL POWER IS LOST.

If a cryogenic pump is used to pump toxic, corrosive, or flammable gases, a written

action plan is required. This must be prepared in consultation with OIPT and other

competent bodies. Specialised equipment such as scrubbers and furnaces may be

needed to dispose of hazardous gases.

If the pumped gases contain more than 20% oxygen, a vent pipe must be fitted to

the system’s cryo pump outlet connector. The vent pipe must be routed to a safe

place outside of the clean room and conform to local safety standards.

If a cryogenic pump is used to pump gases containing more than 20% oxygen, the

associated roughing pump(s) must be lubricated with a PFPE fluid, e.g. Fomblin or

Krytox.

Services Specifications

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System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== lfmq=póëíÉãë

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Rated for use in a Pollution Degree 1 Installation Category environment (laboratory

or clean industrial environment).

• Operating temperature: 5°C to 25°C.

• Storage temperature: 0°C to 50°C.

• Maximum humidity: 90% See NOTE 1.

• Minimum humidity: 10% See NOTE 2.

• Electrostatic build-up: Low static environment. See NOTE 2.

• Ambient light level: 300 lux minimum.

NOTE 1: High humidity will have a progressively significant effect on system

performance. At humidity greater than 50%, the rate of chamber pump-down

after venting the chamber will be affected significantly, and at humidity greater

than 65%, the rate of chamber pump-down may not meet system specifications.

NOTE 2: Low humidity will introduce a risk of electrostatic build-up, with subsequent

discharge to the system producing a malfunction or damage. The systems are

tested to EN60801-2, severity level 3. We recommend the use of an

environment, which protects against electrostatic build-up, and extra

precautions will be necessary at low humidity.

Services Specifications

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Issue No. Details of change Date

16 Change record table added 20 April 05

Services Specifications

Issue 16: April 05 Page 20 of 22 Printed: 6-Jan-06, 8:44