Utah-94-721002-System-Manual.pdf - 第24页
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Note that swarf and other pieces of material for disposal must be disposed of with
great care and must be kept well away from fire, from cigarettes and other
smoking materials.
1.3.7.4 PFPE lubricating fluids. Very great care must be taken to ensure that PFPE fluids (e.g.
Fomblin™, Krytox™ NCI™ etc) are not exposed to high temperatures. If overheated,
decomposition takes place, producing volatile fluorine containing components.
If there is any evidence that any PFPE lubricating fluids could have been subjected to
temperatures in excess of 300°C the following actions must be carried out:
(a) Consult a competent authority regarding the following items (b) to
(e).
(b) Wearing suitable protective clothing, remove the decomposed
material and dispose of it in accordance with local Health and
Safety regulations.
(c) Wearing suitable protective clothing, thoroughly clean the
contaminated area, disposing of any residue in accordance with
local Health and Safety regulations.
(d) Replace with fresh grease or fluid.
(e) Investigate the cause of the overheating and review operating
procedures and control systems to prevent a recurrence.
Note that all PFPE material, including spillages of fresh fluid must be disposed of
with great care and must be kept well away from fire, from cigarettes and other
smoking materials.
Health and Safety
Printed:29 May 2005, 06:31 Page 1-11 of 18 Issue 11: August 2004
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WARNING
SOME MATERIALS USED IN AND RESULTING FROM DEPOSITION AND ETCHING
PROCESS CAN BE DANGEROUSLY TOXIC; CONTACT CAN CAUSE SERIOUS INJURY
Before working on the process chamber or its associated components, consult a
competent authority to ascertain the nature of any coatings.
Wear appropriate protective clothing, e.g. hand and eye protection, as necessary.
1.3.8.1 Some compounds used in and resulting from deposition and etching processes can
be dangerously toxic. These compounds can be deposited as coatings on the inside
of the chamber, pipework etc. Therefore, suitable hand and eye protection must
be used.
1.3.8.2 Cleaning fluids and the gases given off from them may be toxic. Only use them in a
well ventilated area and avoid ingestion.
1.3.8.3 Always use suitable eye and skin protection when handling vacuum pumps and
mineral or synthetic oil. Apart from the hazards described in sub-section 1.3.7, used
oils and pumps may be contaminated with dangerous chemicals.
1.3.8.4 Study all relevant Material Safety Data Sheets (MSDS), or their equivalents, before
carrying out any maintenance work.
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1.3.9.1 Do not enter large vacuum chambers.
1.3.9.2 Process chambers and load locks under vacuum represent stored energy. If released
accidentally, this can cause injury. These spaces must be vented to atmospheric
pressure before the system is powered down in preparation for maintenance.
1.3.9.3 Handle vacuum capacitors carefully; if knocked or dropped they can implode
causing serious injury.
1.3.9.4 All view ports that are greater than 100mm diameter must be fitted with a clear
plastic implosion eye-guard on the outside. Replace this item only with the correct
part, and ensure that the ports are correctly reassembled.
If a plastic implosion eye-guard is not fitted, or if there is any doubt about the type
of eye-guard that is fitted, you must check with Oxford Instruments Plasma
Technology before proceeding.
1.3.9.5 Take care when opening vented vacuum vessels in case of excess pressure inside.
Health and Safety
Issue 11: August 2004 Page 1-12 of 18 Printed:29 May 2005, 06:31
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1.3.10.1 Retained air pressures can be at dangerous levels. Never put your hand or any
other obstruction in the path of a slit or gate valve blade unless it has been made
safe. Release the pressure as follows:
a) Power down the system by opening the main circuit breaker.
b) Disconnect the pneumatic supply pipes from the system.
c) Operate and padlock the lock-out valves (if fitted) on the gate valves. This
will release all air pressure from both sides of the valve actuators. If lock-
out valves are not fitted, disconnect the supply pipe at the point where it
connects to the valve.
WARNING
AUTOMATICALLY CONTROLLED COMPONENTS CAN MOVE WITHOUT WARNING
CAUSING SERIOUS INJURY
Maintenance on automatically controlled equipment must only be carried out by
fully trained personnel who are aware of the risks involved.
WARNING
PLASMALAB and IONFAB SYSTEMS DO NOT PROVIDE ANY EXCESS PRESSURE
REGULATION / PROTECTION FOR COMPRESSED AIR SUPPLIES.
It is the customer’s responsibility to ensure that suitable regulation / protection, in
accordance with all applicable standards, is installed and correctly maintained
external to the system.
1.3.10.2 Before undertaking any work on the system, you must ensure that all compressed
air is released. If lock-out valves are fitted, they must be operated and locked. See
the section on powering down the system for more details.
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WARNING
LIFTING HEAVY OBJECTS INCORRECTLY CAN CAUSE SEVERE INJURY
When handling heavy system components such as the system unit or vacuum pumps,
ensure that the appropriate lifting equipment, operated by fully trained personnel, is
used.
When heavy rack-mounted components are handled, ensure that the weight is safely
distributed between sufficient personnel.
1.3.11.1 Injury can be caused by attempting to lift heavy components. Always ensure that
suitable lifting equipment and assistance, if required, are available when removing
or refitting heavy components, e.g. chamber lids, chamber doors or electrodes.
1.3.11.2 Be aware of the weight of racked units, e.g. power supplies. Do not attempt to
remove heavy units from their racks unaided.
1.3.11.3 Take care when moving heavy components. Ensure that they remain stable to avoid
any risk of toppling. Use any support frames or stabilizers provided when moving,
installing or decommissioning equipment.
Health and Safety
Printed:29 May 2005, 06:31 Page 1-13 of 18 Issue 11: August 2004