Utah-94-721002-System-Manual.pdf - 第241页

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Oxford Instruments Plasma Technolgy

North End, Yatton,

Bristol, BS49 4AP

Tel: +44(0)1934 837000

Fax: +44(0)1934 837001

Email:

plasma.technology@oxinst.co.uk

Web: www.oxford-

instruments.com/plmchp5.htm

USA

Oxford Instruments Inc.

130A Baker Avenue Extension

Concord, MA 01742

Tel: +1 978 369 9933

Toll Free +1 800-447-4717

Fax: +1 978 369 8287

Email:

info@ma.oxinst.com

Germany

Oxford Instruments GmbH

Otto-von-Guericke Ring 10,

D-65205 Wiesbaden

Tel: +49(0)6122 937161

Fax: +49(0)6122 937175

Email:

plasma@oxford.de

Japan

Oxford Instruments K.K.

2-11-6 Tomioka

Koto-ku, Tokyo 135-0047

Tel: +81-3-5245-3261

Fax: +81-3-5245-4466

Email:

oikkpt@oxinst.co.jp

Web: www.oxford-instruments.jp

People’s Republic of China (Beijing)

Oxford Instruments China

Room 714, Office Tower 3,

Henderson Center,

No. 18 Jianguomennei Ave,

Dongcheng District,

Beijing 100005

Tel: +86 106518 8160/1/2

Fax: +86 106518 8155

Email:

ptsales@oichina.cn

Web: www.oxford-instruments.com.cn

People’s Republic of China

(Shanghai)

Oxford Instruments China

Room 14-F, No.1 Plaza

800 Nanjing East Road

Shanghai 200001

Tel: +86 216360 8530

Fax: +86 216360 8535

Email:

ptsales@oichina.cn

Web: www.oxford-instruments.com.cn

Singapore

Oxford Instruments Pte. Ltd

371 Beach Road,

#02-07 Keypoint

Singapore 199597

Tel: +65 6337 6848

Fax: +65 6337 6286

Email:

oipt.sales@oxford-

instruments.com.sg

Taiwan

Oxford Instruments Overseas

Marketing Ltd.

1F, No 23 Jing-Shang 19

Street,

Hsinchu, Taiwan

Tel: +65 6337 6848

Fax: +65 6337 6286

Email:

oipt.sales@oxford-

instruments.com.sg

Services Specifications

Issue 16: April 05 Page 22 of 22 Printed: 6-Jan-06, 8:44

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ICP 180 Inductively Coupled Plasma Source

ICP 180 source fitted to a Plasmalab System 100

Issue 4: January 06 Page 1 of 26

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Contents

1. Health and Safety.............................................................................................................................3

2. Services .............................................................................................................................................4

2.1 Qualitative requirements..........................................................................................................................4

2.2 Quantitative requirements .......................................................................................................................4

2.2.1 Cooling water.....................................................................................................................................4

2.2.2 Process gas..........................................................................................................................................4

2.2.3 RF power.............................................................................................................................................4

2.2.4 Electrical supply..................................................................................................................................4

2.2.5 Extraction ...........................................................................................................................................4

3. Description........................................................................................................................................5

3.1 Function......................................................................................................................................................5

3.2 Mechanical assembly.................................................................................................................................7

3.3 Source specification...................................................................................................................................8

3.4 Graphs of typical operating characteristics .............................................................................................9

4. Installation......................................................................................................................................11

5. Operating Instructions...................................................................................................................12

5.1 Introduction.............................................................................................................................................12

5.1.1 Manual adjustment of the Automatch Unit..................................................................................12

5.1.2 Obtaining a Plasma..........................................................................................................................13

6. Maintenance...................................................................................................................................15

6.1 Maintenance schedule ............................................................................................................................15

6.2 Safety maintenance.................................................................................................................................15

6.2.1 Inspection and renewal...................................................................................................................16

6.3 Routine maintenance..............................................................................................................................17

6.3.1 As required.......................................................................................................................................17

6.3.2 Weekly..............................................................................................................................................18

6.3.3 3-Monthly.........................................................................................................................................18

6.4 Changing the ICP180 dielectric tube......................................................................................................19

7. Troubleshooting.............................................................................................................................21

7.1 Customer Support Facilities ....................................................................................................................21

7.2 High reflected power initial checks........................................................................................................22

7.3 High reflected power (system under vacuum) ......................................................................................23

7.3.1 Automatch gives reflected power > 5% ........................................................................................23

7.3.2 Automatch gives reflected power of 2% to 5%............................................................................24

OIPT locations worldwide ..................................................................................................................26

Fig 1: ICP 180 source - cross section of principal components.............................................................................5

Fig 2: ICP 180 Exploded view.................................................................................................................................7

Fig 3: Ion current density at the wafer versus ICP power....................................................................................9

Fig 4: Operating window.....................................................................................................................................10

Fig 5: Typical AMU control panel........................................................................................................................12

Fig 6: Automatch components ............................................................................................................................25

ICP 180 Source

Issue 4: January 06 Page 2 of 26 Printed: 18-Jan-06, 8:44