Utah-94-721002-System-Manual.pdf - 第243页
Equipment Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä= f`m=NUM NK= eÉ~äíÜ=~åÇ=p~ÑÉíó= For Health and Safety aspects of operating and mainta ining th e ICP 180 source, refer to Section 1 - Health and Safety of…
mä~ëã~ä~Ä=f`m=NUM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== Equipment Manual=
Contents
1. Health and Safety.............................................................................................................................3
2. Services .............................................................................................................................................4
2.1 Qualitative requirements..........................................................................................................................4
2.2 Quantitative requirements .......................................................................................................................4
2.2.1 Cooling water.....................................................................................................................................4
2.2.2 Process gas..........................................................................................................................................4
2.2.3 RF power.............................................................................................................................................4
2.2.4 Electrical supply..................................................................................................................................4
2.2.5 Extraction ...........................................................................................................................................4
3. Description........................................................................................................................................5
3.1 Function......................................................................................................................................................5
3.2 Mechanical assembly.................................................................................................................................7
3.3 Source specification...................................................................................................................................8
3.4 Graphs of typical operating characteristics .............................................................................................9
4. Installation......................................................................................................................................11
5. Operating Instructions...................................................................................................................12
5.1 Introduction.............................................................................................................................................12
5.1.1 Manual adjustment of the Automatch Unit..................................................................................12
5.1.2 Obtaining a Plasma..........................................................................................................................13
6. Maintenance...................................................................................................................................15
6.1 Maintenance schedule ............................................................................................................................15
6.2 Safety maintenance.................................................................................................................................15
6.2.1 Inspection and renewal...................................................................................................................16
6.3 Routine maintenance..............................................................................................................................17
6.3.1 As required.......................................................................................................................................17
6.3.2 Weekly..............................................................................................................................................18
6.3.3 3-Monthly.........................................................................................................................................18
6.4 Changing the ICP180 dielectric tube......................................................................................................19
7. Troubleshooting.............................................................................................................................21
7.1 Customer Support Facilities ....................................................................................................................21
7.2 High reflected power initial checks........................................................................................................22
7.3 High reflected power (system under vacuum) ......................................................................................23
7.3.1 Automatch gives reflected power > 5% ........................................................................................23
7.3.2 Automatch gives reflected power of 2% to 5%............................................................................24
OIPT locations worldwide ..................................................................................................................26
Fig 1: ICP 180 source - cross section of principal components.............................................................................5
Fig 2: ICP 180 Exploded view.................................................................................................................................7
Fig 3: Ion current density at the wafer versus ICP power....................................................................................9
Fig 4: Operating window.....................................................................................................................................10
Fig 5: Typical AMU control panel........................................................................................................................12
Fig 6: Automatch components ............................................................................................................................25
ICP 180 Source
Issue 4: January 06 Page 2 of 26 Printed: 18-Jan-06, 8:44
Equipment Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä=f`m=NUM
NK=eÉ~äíÜ=~åÇ=p~ÑÉíó=
For Health and Safety aspects of operating and maintaining the ICP 180 source, refer to Section 1 - Health
and Safety of the mä~ëã~ä~ÄpóëíÉãNMM=manual.
ICP 180 Source
Printed: 18-Jan-06, 8:44 Page 3 of 26 Issue 3 : December 00
mä~ëã~ä~Ä=f`m=NUM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== Equipment Manual=
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OKN= nì~äáí~íáîÉ=êÉèìáêÉãÉåíë=
The qualitative services requirements for the mä~ëã~ä~Ä
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f`m=NUM source are given in Appendix S - ‘Services
Specifications for mä~ëã~ä~Ä=and=fçåÑ~Ä Systems’. This document gives generic information and
mandatory requirements for all services.
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OKOKN= `ççäáåÖ=ï~íÉê=
The source has two cooling circuits:
¼ inch pipework circuit requiring 1 litre/minute
3
/
8
inch pipework circuit requiring 2 litres/minute
The
3
/
8
inch circuit can be put in series with the RF generator cooling provided the minimum flows of
both are satisfied.
Cooling water is required at a minimum flow rate of 2 litres/minute to the source. The RF generator
requires 4 litres/minute (1200W) or 8 litres/minute (3000W).
OKOKO= mêçÅÉëë=Ö~ë=
Process gas supplies are required for the source and for the process chamber. Types of gases and their
flow rates depend on the process application. Normally all gas is injected at the top of the source. A few
processes (especially PECVD processes) require some of the gas to be injected downstream.
OKOKP= oc=éçïÉê=
An RF generator is required to supply power to the automatch unit. The RF generator should have an
output impedance of 50 ohms and a minimum power rating of 1200W.
The maximum allowable RF power input to the automatch unit is 3kW.
OKOKQ= bäÉÅíêáÅ~ä=ëìééäó=
The electrical supply required for the automatch unit are is 24VDC at 2A maximum.
OKOKR= bñíê~Åíáçå=
The extraction collar fitted on the top cover must be connected to an extraction system having a
minimum flow rate of 1 m
3
/minute at 60 Pa extraction pressure.
This requirement can be waived for alumina tubes provided those responsible for machine safety
permit it. They should perform a risk assessment which considers breaking of the ICP tube during
processing.
The requirement cannot be waived for an ICP 180 fitted with a quartz tube, because UV emission from
the plasma will generate ozone.
ICP 180 Source
Issue 4: January 06 Page 4 of 26 Printed: 18-Jan-06, 8:44