Utah-94-721002-System-Manual.pdf - 第256页
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WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
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The maintenance required to ensure continued safety and reliability is listed in the following
Maintenance Schedule.
The periodicity is indicated by an asterisk (
*) in the appropriate column.
Task
As
Required
Weekly
Three-
Monthly
Notes
Measure RF emissions
*
See Appendix A of the System 100
manual for details. RF should also be
measured after any maintenance
involving the removal of covers and
monitored continuously if the
system is operated with RF power
applied and any covers removed.
Inspect Quartz
components
*
See sub-section 6.2.1. Periodicity may
need to be reduced depending on
process conditions.
Inspect Alumina
components
*
See sub-section 6.2.1. Periodicity may
need to be reduced depending on
process conditions.
ICP dielectric tube
cleaning
*
See sub-section 6.3.1. Periodicity depends
on process condition.
Vacuum check
*
See sub-section 6.3.2.
Water cooling circuit
*
See sub-section 6.3.3.
RF enclosure exhaust
flow
*
See sub-section 6.3.3.
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Downstream microwave, ECR and induction coupled plasma sources contain quartz or alumina tubes or
windows under vacuum, which may be subject to attack by the plasma process. If these components fail
whilst under vacuum, an implosion can occur. This should not present a safety hazard, provided the
equipment is used with all covers and screens in place, but may cause damage to system components.
Failure by implosion becomes more likely as the components age, therefore they should be regarded as
consumable items. A programme of regular inspection and renewal of these components is necessary to
minimise the risk of implosion.
ICP 180 Source
Printed: 18-Jan-06, 8:44 Page 15 of 26 Issue 4: January 06
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WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
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WARNING
DISCARDED COMPONENTS MAY BE CONTAMINATED WITH RESIDUES FROM THE
PLASMA PROCESS AND MAY BE ACIDIC OR TOXIC. DISPOSE WITH REGARD TO
LOCAL PRACTICES.
IMPORTANT: The following inspection intervals should be reduced if the source is operated
for prolonged periods at high powers, especially for quartz components
operating in fluorine-containing plasmas.
Quartz components
The internal surfaces of these components should be inspected at intervals of three months or less.
Components showing significant signs of wear should be discarded and replaced by a new component.
See ‘Tube wall thickness’ below.
Alumina components
The internal surfaces of these components should be inspected at intervals of six months or less.
Components showing significant signs of wear should be discarded and replaced by a new component.
See ‘Tube wall thickness’ below.
Tube wall thickness
The nominal minimum wall thickness of a new tube is 6 mm. During an inspection, if the wall thickness is
reduced to 4 mm or less at any point then the tube must be replaced by a new component. To change the
tube, refer to sub-section 6.4. page 19.
ICP 180 Source
Issue 4: January 06 Page 16 of 26 Printed: 18-Jan-06, 8:44
Equipment Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä=f`m=NUM=
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
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WARNING
PINCH POINT – WHEN THE CHAMBER LID IS OPENED OR CLOSED, LIMBS,
FINGERS ETC CAN BECOME TRAPPED BETWEEN THE LID AND THE PROCESS
CHAMBER BASE RESULTING IN SEVERE INJURY.
Ensure that all personnel are kept clear of the chamber lid when it is
opened or closed.
When opening or closing the chamber lid, ensure that both of your hands
are kept clear of the pinch point.
When the process chamber lid is to be kept in its raised position for
prolonged periods, ensure that it is held safely in its open position
without relying entirely on the gas support struts.
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ICP dielectric tube cleaning
WARNING
IF VENTING AND OPENING THE ICP180 FULLY AFTER USING HALOGENATED GASES
(CONTAINING CL- F- Br- OR I-), THE RESIDUAL GAS IN THE CHAMBER IS LIKELY TO
EXCEED LONG TERM EXPOSURE LIMITS FOR THE EQUIVALENT ANHYDROUS ACID
(HCl, HF, HBr, HI) IN GASEOUS FORM. RUNNING THE DEFAULT CLEANING RECIPE
AND PUMPING FOR 30 MINUTES MORE WILL REDUCE THE RESIDUAL GAS
CONSIDERABLY BUT USERS SHOULD MAKE THEIR OWN SAFETY ASSESSMENTS ON
THE NEED FOR PERSONAL PROTECTIVE EQUIPMENT IN SUCH SITUATIONS.
Processes capable of generating hydrocarbon or fluorocarbon monomers can coat the inside of the ICP
dielectric tube with polymer. An optimised cleaning process would need to be developed for each
application, but as a default process use:
Gas: Oxygen (50-100 sccm).
Pressure: 2Pa (15 mTorr).
RF power: 1000W.
Time: 1 hour.
ICP 180 Source
Printed: 18-Jan-06, 8:44 Page 17 of 26 Issue 4: January 06