Utah-94-721002-System-Manual.pdf - 第257页
Equipment Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä= f`m=NUM= WARNING BEFORE PROCEEDING WITH A NY MAINTENANCE WOR K, READ SECTION 1 - HEALTH AND SA FETY . SKP= oçìíáåÉ=ã~áåíÉå~åÅÉ= WARNING PINCH POINT – WHE…
mä~ëã~ä~Ä=f`m=NUM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== Equipment Manual=
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
=
SKOKN= fåëéÉÅíáçå=~åÇ=êÉåÉï~ä=
WARNING
DISCARDED COMPONENTS MAY BE CONTAMINATED WITH RESIDUES FROM THE
PLASMA PROCESS AND MAY BE ACIDIC OR TOXIC. DISPOSE WITH REGARD TO
LOCAL PRACTICES.
IMPORTANT: The following inspection intervals should be reduced if the source is operated
for prolonged periods at high powers, especially for quartz components
operating in fluorine-containing plasmas.
Quartz components
The internal surfaces of these components should be inspected at intervals of three months or less.
Components showing significant signs of wear should be discarded and replaced by a new component.
See ‘Tube wall thickness’ below.
Alumina components
The internal surfaces of these components should be inspected at intervals of six months or less.
Components showing significant signs of wear should be discarded and replaced by a new component.
See ‘Tube wall thickness’ below.
Tube wall thickness
The nominal minimum wall thickness of a new tube is 6 mm. During an inspection, if the wall thickness is
reduced to 4 mm or less at any point then the tube must be replaced by a new component. To change the
tube, refer to sub-section 6.4. page 19.
ICP 180 Source
Issue 4: January 06 Page 16 of 26 Printed: 18-Jan-06, 8:44
Equipment Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä=f`m=NUM=
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
SKP= oçìíáåÉ=ã~áåíÉå~åÅÉ=
WARNING
PINCH POINT – WHEN THE CHAMBER LID IS OPENED OR CLOSED, LIMBS,
FINGERS ETC CAN BECOME TRAPPED BETWEEN THE LID AND THE PROCESS
CHAMBER BASE RESULTING IN SEVERE INJURY.
Ensure that all personnel are kept clear of the chamber lid when it is
opened or closed.
When opening or closing the chamber lid, ensure that both of your hands
are kept clear of the pinch point.
When the process chamber lid is to be kept in its raised position for
prolonged periods, ensure that it is held safely in its open position
without relying entirely on the gas support struts.
SKPKN= ^ë=êÉèìáêÉÇ=
ICP dielectric tube cleaning
WARNING
IF VENTING AND OPENING THE ICP180 FULLY AFTER USING HALOGENATED GASES
(CONTAINING CL- F- Br- OR I-), THE RESIDUAL GAS IN THE CHAMBER IS LIKELY TO
EXCEED LONG TERM EXPOSURE LIMITS FOR THE EQUIVALENT ANHYDROUS ACID
(HCl, HF, HBr, HI) IN GASEOUS FORM. RUNNING THE DEFAULT CLEANING RECIPE
AND PUMPING FOR 30 MINUTES MORE WILL REDUCE THE RESIDUAL GAS
CONSIDERABLY BUT USERS SHOULD MAKE THEIR OWN SAFETY ASSESSMENTS ON
THE NEED FOR PERSONAL PROTECTIVE EQUIPMENT IN SUCH SITUATIONS.
Processes capable of generating hydrocarbon or fluorocarbon monomers can coat the inside of the ICP
dielectric tube with polymer. An optimised cleaning process would need to be developed for each
application, but as a default process use:
Gas: Oxygen (50-100 sccm).
Pressure: 2Pa (15 mTorr).
RF power: 1000W.
Time: 1 hour.
ICP 180 Source
Printed: 18-Jan-06, 8:44 Page 17 of 26 Issue 4: January 06
mä~ëã~ä~Ä=f`m=NUM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== Equipment Manual=
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
=
SKPKO= tÉÉâäó=
Vacuum Check
Weekly, or as dictated by process constraints, perform a system vacuum check, recording:
a) The base pressure after a standard pumping time.
b) The rate of pressure rise in an isolated system.
Experience suggests that the O-ring seals at each end of the ICP dielectric tube are the most likely source
of leaks in a new or freshly reassembled ICP180, but once sealed the source remains leak tight unless an
O-ring seal fails. The design minimises exposure of the seals to the plasma, but tolerances in the tube
construction (especially of quartz tubes) may mean the tube is not automatically
concentric with the O-
ring seals. This will reduce O-ring seal life, and require more care in assembly to obtain a good vacuum
seal.
SKPKP= PJjçåíÜäó=
Water cooling circuit
1) Turn off the RF supply, then vent the ICP180 source.
2) Open the RF enclosure and automatch, then inspect the fluid cooling path carefully for signs
of leaks, blockage, corrosion, overheating or melting of plastic pipes.
3) Repair or replace any defective sections.
4) Pay attention to the layout of the cooling pipes: the design provides for minimum clearances
between a water-cooled RF live component and the first point a plastic pipe rests against a
grounded surface.
5) Ensure that the cooling flow rate is at least 2 litres/minute in the
3
/
8
inch circuit and at least
1 litre/minute in the ¼ inch circuit.
6) Check the function of any water flow switches in the cooling path.
RF enclosure exhaust flow
1) Turn off the RF supply, then vent the ICP180 source.
2) Open the RF enclosure.
3) Remove any accumulations of dust or particles from the exhaust port and air inlet holes.
4) Wipe down the outside of the ICP dielectric tube and the RF coil to remove any material
which may eventually lead to an RF arc.
RF emissions
1) Check that the RF emissions are within specification. See Appendix A in the mä~ëã~ä~Ä
=
póëíÉã=
NMM= manual for details.
ICP 180 Source
Issue 4: January 06 Page 18 of 26 Printed: 18-Jan-06, 8:44