Utah-94-721002-System-Manual.pdf - 第267页

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Oxford Instruments Plasma Technolgy

North End, Yatton,

Bristol, BS49 4AP

Tel: +44(0)1934 837000

Fax: +44(0)1934 837001

Email:

plasma.technology@oxinst.co.uk

Web: www.oxford-

instruments.com/plmchp5.htm

USA

Oxford Instruments Inc.

130A Baker Avenue Extension

Concord, MA 01742

Tel: +1 978 369 9933

Toll Free +1 800-447-4717

Fax: +1 978 369 8287

Email:

info@ma.oxinst.com

Germany

Oxford Instruments GmbH

Otto-von-Guericke Ring 10,

D-65205 Wiesbaden

Tel: +49(0)6122 937161

Fax: +49(0)6122 937175

Email:

plasma@oxford.de

Japan

Oxford Instruments K.K.

2-11-6 Tomioka

Koto-ku, Tokyo 135-0047

Tel: +81-3-5245-3261

Fax: +81-3-5245-4466

Email:

oikkpt@oxinst.co.jp

Web: www.oxford-instruments.jp

People’s Republic of China (Beijing)

Oxford Instruments China

Room 714, Office Tower 3,

Henderson Center,

No. 18 Jianguomennei Ave,

Dongcheng District,

Beijing 100005

Tel: +86 106518 8160/1/2

Fax: +86 106518 8155

Email:

ptsales@oichina.cn

Web: www.oxford-instruments.com.cn

People’s Republic of China

(Shanghai)

Oxford Instruments China

Room 14-F, No.1 Plaza

800 Nanjing East Road

Shanghai 200001

Tel: +86 216360 8530

Fax: +86 216360 8535

Email:

ptsales@oichina.cn

Web: www.oxford-instruments.com.cn

Singapore

Oxford Instruments Pte. Ltd

371 Beach Road,

#02-07 Keypoint

Singapore 199597

Tel: +65 6337 6848

Fax: +65 6337 6286

Email:

oipt.sales@oxford-

instruments.com.sg

Taiwan

Oxford Instruments Overseas

Marketing Ltd.

1F, No 23 Jing-Shang 19

Street,

Hsinchu, Taiwan

Tel: +65 6337 6848

Fax: +65 6337 6286

Email:

oipt.sales@oxford-

instruments.com.sg

ICP 180 Source

Issue 4: January 06 Page 26 of 26 Printed: 18-Jan-06, 8:44

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RF Automatic Matching Unit

Issue 6: February 2005 Page 1 of 20

^ää=lfmq=póëíÉãë lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual

Contents

Health and Safety........................................................................................................3

2. Description...................................................................................................................3

2.1 Introduction........................................................................................................................3

2.2 Major components .............................................................................................................4

2.2.1 Automatch control panel...........................................................................................4

2.3 Matching component layouts............................................................................................5

2.4 Sense and control PCB........................................................................................................7

3. Test and setting up......................................................................................................8

3.1 Overview.............................................................................................................................8

3.2 Procedure............................................................................................................................9

4. Operator adjustment ................................................................................................13

4.1 DC bias / Peak-to-peak switch setting.............................................................................13

5. Operation...................................................................................................................13

6. Troubleshooting........................................................................................................15

6.1 Fault diagnosis chart ........................................................................................................15

6.1.1 Amplifier gain adjustment.......................................................................................16

6.1.2 Drive motor shaft to capacitor spindle alignment.................................................17

6.2 Link Settings......................................................................................................................18

6.3 Changing the RF components .........................................................................................19

6.4 Adjustment of capacitor park positions..........................................................................20

7. OIPT locations worldwide.........................................................................................20

Fig 1: The Oxford Instruments Plasma Technology automatch unit.........................................3

Fig 2: Typical AMU control panel ................................................................................................4

Fig 3: Matching component layouts............................................................................................6

Fig 4: Sense and control PCB layout............................................................................................7

Fig 5: Capacitor shafts rotation direction .................................................................................10

Fig 6: Component locations .......................................................................................................11

Fig 7: LK102 and LK2 settings....................................................................................................16

OIPT Automatch Unit

Issue 6: February 05 Page 2 of 20 Printed: 5-Jan-06, 8:03