Utah-94-721002-System-Manual.pdf - 第275页
System Manual lñÑçêÇ=fåëí êìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== ^ää=lfmq=póëíÉãë PKO= mêçÅÉÇìêÉ= WARNING HAZARDOUS RF VOLT AGE - CONTACT CAN CAUSE DE ATH, SEVERE INJ URY OR BURNS. ENSURE THAT THE RF SUPPLY IS SWITC HED OFF WHILE C…
^ää=lfmq=póëíÉãë lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
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WARNING
HAZARDOUS RF VOLTAGE - CONTACT CAN CAUSE DEATH, SEVERE INJURY
OR BURNS.
ANY WORK REQUIRING THE REMOVAL OF COVERS OR PANELS MUST
ONLY BE PERFORMED BY AUTHORISED PERSONNEL WHO ARE AWARE OF
THE HAZARDS INVOLVED.
NOTE: Detailed test instructions are contained in Oxford Instruments Plasma Technology
Work Instruction No. 39. The following is a summary for the benefit of skilled service
engineers. It should
not be necessary for operators to perform these setting up
operations.
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Set mechanical movement range
Confirm end-stop points
Find manual match
Set park positions
Set RV1 and RV2
Confirm auto-match for low power
operation
Confirm auto-match for high power
operation
Connect AMU to system
Set gain levels
Steps 1 to 5
Steps 1-8:
RF POWER
SUPPLY OFF
Step 6
Step 7
Step 8
Steps 9 to 12
Step 13
Step 14
Step 15
OIPT Automatch Unit
Issue 6: February 05 Page 8 of 20 Printed: 5-Jan-06, 8:03
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== ^ää=lfmq=póëíÉãë
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WARNING
HAZARDOUS RF VOLTAGE - CONTACT CAN CAUSE DEATH, SEVERE INJURY
OR BURNS.
ENSURE THAT THE RF SUPPLY IS SWITCHED OFF WHILE CARRYING OUT
STEPS 1 TO 8.
1) Connect the AMU to the system. Make a good earth bond between the vacuum
chamber and the AMU chassis.
2) Connect the output strap to the plasma electrode with at least a 25 mm wide copper
strap, with at least 10 mm clearance between the live strap and any earthed part.
3) Confirm the polarity and voltage of the dc power source before connecting to the
Sense and Control PCB:
JP7 pin 1 +24 Vdc
JP7 pin 2 0 V
4) Ensure the ventilation fans are all pulling air
out of the automatch case and check
the system cooling is turned on. For sense board cooling, check one fan is pulling air
out and one is pulling air in to the sense board section.
5) Confirm the operation of each motor using the manual drive. An increase in
capacitor position should make the vanes overlap more. In the case of a vacuum
capacitor, an increase in position should turn the capacitor shaft anti-clockwise,
when looking at it from the motor end (see Fig 5). Check with a capacitance meter in
case of doubt.
If the motors do not turn in the correct direction check the plug in connector on the
board, refer to OIPT Work Instruction No. 39.
6a) Calibrate the motors and their respective positions as follows:
For gear driven capacitors: Loosen screws retaining the motors to the AMU box,
but don’t remove completely and ensure the gears don’t mesh.
For direct drive capacitors: Unscrew the motor plate attached to the side of the
AMU box and pull the coupling apart.
Then,
For Air Vane Capacitor AMU:
Keeping gears separated, overlap the vanes fully. Then, making sure that the gears
don’t mesh, drive both motors to maximum (999), using the AMU control panel.
For Vacuum Capacitor AMU (AMU board REV05 and earlier):
Set the capacitor positions and drive motors to their required position according to
the system type as shown in the following table:
OIPT Automatch Unit
Printed: 5-Jan-06, 8:03 Page 9 of 20 Issue 6: February 05
^ää=lfmq=póëíÉãë lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
System
Type
Set C1
to
Then
move
in
Drive
C1
Motor
to
Set C2
to
Then
Move
in
Drive
C2
Motor
to
RIE/DP
Maximum
1 turn
Maximum
(999)
Maximum
1 turn
Maximum
(999)
ICP180
Maximum
1 turn
Maximum
(999)
Minimum
1 turn
Minimum
(000)
Ion Beam
Minimum
1 turn
Minimum
(000)
Minimum
1 turn
Minimum
(000)
ICP 380
Maximum
1 turn
Maximum
(999)
Maximum
7 Turns
Maximum
(999)
Padding
capacitor
mounting
position
Fig 5: Capacitor shafts rotation direction
To find the minimum position, turn the capacitor
shaft in the direction of the arrow, shown in Fig
5.
To find the maximum position, turn the
capacitor shaft opposite to the direction of the
arrow in Fig 5.
At the minimum position, the shaft becomes
stiff; at the maximum position, the shaft
becomes loose. Do not try to turn the shaft
past these points. If when turning the
capacitor to the maximum position, the shaft
becomes loose, turn the shaft back in until it just
begins to bite, this is the maximum position.
For Vacuum Capacitor AMU (AMU board with capacitor range mod.):
(Applies to all system types) Rotate the vacuum capacitor shaft clockwise as you
look at it from the motor end (see Fig 5) until the shaft just becomes stiff, and then
turn in half a turn. Making sure the motors don’t mesh, drive both motors to
minimum (000).
6b) For gear driven capacitors: Re-mesh the gears and tighten motor retaining
screws, ensuring that the motor and capacitor positions don’t move.
For direct drive capacitors: Loosen the coupling clamp screw on the capacitor
side, turn the coupling on the capacitor side until it lines up wit that on the motor
side ensuring neither the capacitor nor the motor change position at any time. Clip
the coupling together and tighten the clamp screw. Then re-attach the motor plate.
7) Confirm the ‘end of range’ stop functions using the manual drive switches located
on the AMU panel:
Drive C1 positive to the stop position; LED 101 lights; stop point in the range 950-999
OIPT Automatch Unit
Issue 6: February 05 Page 10 of 20 Printed: 5-Jan-06, 8:03