Utah-94-721002-System-Manual.pdf - 第28页
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1.3.12.9 Never smoke or eat in the 'clean room' or where gases are stored. In addition to the
fire risks and particulate contamination presented by smoking, some chemicals when
burnt generate carcinogenic or toxic compounds.
Health and Safety
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During manufacture, warning and advisory labels are attached to the system to indicate
potential hazards and components, which should not be operated or maintained without first
reading the relevant manual. Typical labels and their meanings are as follows:
DANGER
RF ENERGY
Disconnect
electrical supply
before servicing
Danger of physical injury from RF radiation or from touching
components within the labelled equipment.
PINCH POINT
Keep hands away
from chamber lid
when closing.
WARNING
Danger of trapping limbs, fingers etc. in the labelled equipment.
WARNING
STRONG
MAGNETIC FIELD
Avoid contact with
this area.
Danger of physical injury from the Strong Magnetic Field generated by
the labelled equipment.
WARNING
HOT SURFACE
Do not touch
Caution, hot surface IEC 417, No. 5041
DANGER
LOW TEMPERATURE
Wear thermal
protective gloves
Danger of physical injury, from the labelled equipment.
WARNING
SERVICE BY
QUALIFIED STAFF
ONLY
Refer to manual
Read the relevant manual before proceeding to operate or maintain the
labelled equipment.
WARNING
RF & UV RADIATION.
DO NOT USE THIS PORT
FOR VIEWING WITH THE
NAKED EYE
WITHOUT MESH
SHIELD IN PLACE
Danger of physical injury from RF and UV radiation from the labelled
components.
WARNING
LASER BEAM
Disconnect
electrical supply
before servicing
Danger of physical injury from Laser Beam generated by the labelled
components.
Health and Safety
Issue 11: August 2004 Page 1-16 of 18 Printed:29 May 2005, 06:31
Health and Safety lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= mä~ëã~ä~Ä and fçåÑ~Ä
System vent gas: Nitrogen
Max inlet pressure : 5 Bar
WARNING
Warns of gas type and maximum pressure, connected to the system.
Gas type: Air (compressed)
Max inlet pressure : 9 Bar
WARNING
Warns of gas type and maximum pressure, connected to the system.
System process gas :
Max inlet pressure : 5 Bar
WARNING
Warns of gas type and maximum pressure, connected to the system.
Fluid type: Water (cooling)
Max inlet pressure : 4.2 Bar
WARNING
Warns of fluid type and maximum pressure, connected to the system
Caution, refer to accompanying documents. ISO 3864, No. B.3.1
Continued…
Health and Safety
Printed:29 May 2005, 06:31 Page 1-17 of 18 Issue 11: August 2004