Utah-94-721002-System-Manual.pdf - 第282页

^ää=lfmq=póëíÉãë l ñÑçêÇ =fåëíê ìãÉåíë =m ä~ëã~=q ÉÅÜåçäçÖó== System Manual SYMPTOM POSSIBLE CAUSES ACTIO N (E) C1 or C2 oscillate close to match 1. Amplifier gain too high 2. C1 or C2 spindle thread dirty. See sub-secti…

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WARNING

HAZARDOUS RF VOLTAGE - CONTACT CAN CAUSE DEATH, SEVERE INJURY

OR BURNS.

ANY WORK REQUIRING THE REMOVAL OF COVERS OR PANELS MUST

ONLY BE PERFORMED BY AUTHORISED PERSONNEL WHO ARE AWARE OF

THE HAZARDS INVOLVED.

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Use the following chart to locate and identify faults. Note that the chart lists typical fault

symptoms and is not exhaustive.

SYMPTOM POSSIBLE CAUSES ACTION

(A) Drive motors do

not respond to

automatic or

manual control

Fuse FS2 blown

Fuse FS1 or FS101 tripped.

Investigate and repair fault, which caused the

fuse to blow. Then renew the fuse.

Investigate and repair the fault, which caused

the fuse to trip. (The fuses will automatically

reset once the fault is repaired.)

Note that these components are semiconductor

fuses which respond to an increase in current

above their rating (approximately 200 mA) by

increasing their internal resistance significantly.

The voltage drop across each of these

components under non-fault conditions is

approximately 0.5V

When tripped by high current, the voltage drop

is almost the full supply voltage i.e. 24V.

After power is removed, the devices require 20

seconds to cool down and reset.

(B) C1 or C2 drive to

min or max

1. C1 or C2 starting too far

from final match position

Adjust park potentiometers (Refer to sub-

section 6.4 (page 20).

2. Match position is out of

accessible range

1. Change process conditions

2. Change component fit in AMU (skilled

personnel only). Refer to sub-section 6.3 (page

19).

min or max and do

not return

manually

Capacitor has travelled past

an electrical limit

1. All vane capacitors only: Continue manual

travel in the same direction (to max if capacitor

is at max). The capacitor will turn fully until it

passes the opposite limit.

2. Readjust limit settings

(D) Plasma does not

strike even though

the reflected power

is low

Gas pressure is too low or

too high

Caution: do not run for > 2 minutes in this

condition. Change gas pressure to 20 - 200

mTorr range (RIE), or 0.5 - 1.5 Torr range

(PECVD)

OIPT Automatch Unit

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^ää=lfmq=póëíÉãë lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual

SYMPTOM POSSIBLE CAUSES ACTION

(E) C1 or C2 oscillate

close to match

1. Amplifier gain too high

2. C1 or C2 spindle thread

dirty.

See sub-section 6.1.1 (page 16).

Remove capacitor, clean and re-lubricate

capacitor’s spindle thread and bearing. Re-

align; see sub-section 6.1.2 (page 17).

(F) Drive motor shafts

rotate but capacitor

spindles do not.

Coupling between the motor

shafts and capacitor spindles

has become disengaged or

loose.

See sub-section 6.1.2 (page 17).

(G) End stops don’t

work, motor drives

through.

Park potentiometers have

broken

Check park potentiometers behind AMU

control panel and replace if necessary.

(H) Error signal pots

don’t adjust the

error signal or both

adjust one signal

only.

Links placed incorrectly Check links LK6, 7, 10 & 107 to ensure they are

in the correct position. If link is open end type,

ensure that metal insert is still present.

Hints and Tips

• Do not remove anything from the Motor Control board without removing the

power (JP2) first.

• When in ‘Auto’ mode RV1 and RV2 found on the side of the AMU casing can be used

to make fine adjustments to the match position.

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Refer to Symptom (E) in the Fault diagnosis chart (see sub-section 6.1, page 15).

When adjusting the amplifier gain, initially adjust the associated variable resistor (RV101 for

C1 or RV1 for C2; see for locations). These variable resistors provide a ‘fine’ adjustment. If

required, a coarse adjustment is available by using links LK102 and LK2 as shown in Fig 7.

Pin on

PCB

Link shown in

position A

Position A = Lowest amplifier gain

Position B = Medium amplifier gain

Position C = Highest amplifier gain

Fig 7: LK102 and LK2 settings

OIPT Automatch Unit

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Refer to Symptom (F) in the Fault diagnosis chart (sub-section 6.1, page 15).

If the coupling between the motor shafts and capacitor spindles, has become disengaged or

loose, use the following procedure to align the shafts/spindles to their correct relative

positions.

1) Tighten the shaft and spindle grub screws.

2) Loosen the two bolts securing the motor/gear assembly to the AMU casing.

3) Carefully slide the motor/gear assembly away from the fan housing to disengage the

gear wheels from the capacitor.

4) Align the gear wheels to the capacitor depending on the AMU version as follows:

a) Air spaced capacitor

AMUs

(i) At the AMU control panel, set the relevant MANUAL/AUTO

switch to MANUAL.

(ii) Set the relevant MAX/MIN switch to MAX.

(iii) Fully mesh the capacitor vanes.

b) Vacuum capacitor

AMUs for RIE/PECVD

applications

(i) At the AMU control panel, set the relevant

MANUAL/AUTO switch to MANUAL.

(ii) Set the relevant MAX/MIN switch to MAX.

(iii) Set the relevant capacitor to maximum by rotating its

shaft anti-clockwise until the shaft becomes loose and

starts to unscrew from the capacitor body, then rotate

the shaft one turn clockwise.

c) Vacuum capacitor

AMUs for the ICP 180

application

For C1, use the procedure in b) above.

For C2, use the following steps:

(i) At the AMU control panel, set the C2 MANUAL/AUTO

switch to MANUAL.

(ii) Set the C2 MAX/MIN switch to MIN.

(iii) Set C2 to minimum by rotating its shaft clockwise until

the physical end stop is reached, and then rotate the

shaft one turn anti-clockwise.

d) Vacuum capacitor

AMUs for RF ion

source applications

For C1 and C2 alignment in this AMU, use the procedure for C2

in c) above.

5) On completion of capacitor alignment in Step 4), re-engage the motor/gear assembly

to the capacitor and tighten the securing bolts.

6) Check capacitor travel.

OIPT Automatch Unit

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