Utah-94-721002-System-Manual.pdf - 第283页

System Manual lñÑçêÇ=fåëí êìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== ^ää=lfmq=póëíÉãë SKNKO= aêáîÉ=ãçíçê=ëÜ~Ñí=íç=Å~é~Åáíçê=ëéáåÇäÉ=~äáÖåãÉåí= Refer to Symptom (F) in the Fault diagno sis chart (s ub-section 6.1, page 15). If the coupl…

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SYMPTOM POSSIBLE CAUSES ACTION

(E) C1 or C2 oscillate

close to match

1. Amplifier gain too high

2. C1 or C2 spindle thread

dirty.

See sub-section 6.1.1 (page 16).

Remove capacitor, clean and re-lubricate

capacitor’s spindle thread and bearing. Re-

align; see sub-section 6.1.2 (page 17).

(F) Drive motor shafts

rotate but capacitor

spindles do not.

Coupling between the motor

shafts and capacitor spindles

has become disengaged or

loose.

See sub-section 6.1.2 (page 17).

(G) End stops don’t

work, motor drives

through.

Park potentiometers have

broken

Check park potentiometers behind AMU

control panel and replace if necessary.

(H) Error signal pots

don’t adjust the

error signal or both

adjust one signal

only.

Links placed incorrectly Check links LK6, 7, 10 & 107 to ensure they are

in the correct position. If link is open end type,

ensure that metal insert is still present.

Hints and Tips

• Do not remove anything from the Motor Control board without removing the

power (JP2) first.

• When in ‘Auto’ mode RV1 and RV2 found on the side of the AMU casing can be used

to make fine adjustments to the match position.

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Refer to Symptom (E) in the Fault diagnosis chart (see sub-section 6.1, page 15).

When adjusting the amplifier gain, initially adjust the associated variable resistor (RV101 for

C1 or RV1 for C2; see for locations). These variable resistors provide a ‘fine’ adjustment. If

required, a coarse adjustment is available by using links LK102 and LK2 as shown in Fig 7.

Pin on

PCB

Link shown in

position A

Position A = Lowest amplifier gain

Position B = Medium amplifier gain

Position C = Highest amplifier gain

Fig 7: LK102 and LK2 settings

OIPT Automatch Unit

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System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== ^ää=lfmq=póëíÉãë

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Refer to Symptom (F) in the Fault diagnosis chart (sub-section 6.1, page 15).

If the coupling between the motor shafts and capacitor spindles, has become disengaged or

loose, use the following procedure to align the shafts/spindles to their correct relative

positions.

1) Tighten the shaft and spindle grub screws.

2) Loosen the two bolts securing the motor/gear assembly to the AMU casing.

3) Carefully slide the motor/gear assembly away from the fan housing to disengage the

gear wheels from the capacitor.

4) Align the gear wheels to the capacitor depending on the AMU version as follows:

a) Air spaced capacitor

AMUs

(i) At the AMU control panel, set the relevant MANUAL/AUTO

switch to MANUAL.

(ii) Set the relevant MAX/MIN switch to MAX.

(iii) Fully mesh the capacitor vanes.

b) Vacuum capacitor

AMUs for RIE/PECVD

applications

(i) At the AMU control panel, set the relevant

MANUAL/AUTO switch to MANUAL.

(ii) Set the relevant MAX/MIN switch to MAX.

(iii) Set the relevant capacitor to maximum by rotating its

shaft anti-clockwise until the shaft becomes loose and

starts to unscrew from the capacitor body, then rotate

the shaft one turn clockwise.

c) Vacuum capacitor

AMUs for the ICP 180

application

For C1, use the procedure in b) above.

For C2, use the following steps:

(i) At the AMU control panel, set the C2 MANUAL/AUTO

switch to MANUAL.

(ii) Set the C2 MAX/MIN switch to MIN.

(iii) Set C2 to minimum by rotating its shaft clockwise until

the physical end stop is reached, and then rotate the

shaft one turn anti-clockwise.

d) Vacuum capacitor

AMUs for RF ion

source applications

For C1 and C2 alignment in this AMU, use the procedure for C2

in c) above.

5) On completion of capacitor alignment in Step 4), re-engage the motor/gear assembly

to the capacitor and tighten the securing bolts.

6) Check capacitor travel.

OIPT Automatch Unit

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Incorrect link settings can cause the AMU to malfunction. The factory default settings are

given in the following table:

Link

Air

spaced

Capacitor

Low Power

Vacuum

Capacitor

High Power

Vacuum

Capacitor

Notes

LK1

A A A Setting A enables park position.

Setting B disables park.

LK2

B A B Coarse gain setting for C2 (‘A’ – low, ‘B’ –

medium, ‘c’ - high)

LK3

A A A Setting ‘B’ simulates RF on signal (for

testing only).

LK4

B A A Incremental Gain Signal. LK4 in position

‘A’ enables extra gain when in position

control. This is used when driving a

vacuum capacitor.

LK5

A A A Panel/PLC Controller. Position B for AMU

controlled by PLC

LK6

A A B Changes the biasing on the input

amplifier for C2 motor

LK7

B B A Changes the biasing on the input

amplifier for C2 motor

LK101

A A A Setting ‘A’ enables park position.

Setting ‘B’ disables park.

LK102

B A B Coarse gain setting for C1 (‘A’ – low, ‘B’ –

medium, ‘C’ - high)

LK104

B A A Incremental Gain Signal. LK104 in position

‘A’ enables extra gain when in position

control. This is used when driving a

vacuum capacitor.

LK105

A A A Panel/PLC Controller. Position ‘B’ for AMU

controlled by PLC

LK106

A A B Changes the biasing on the input

amplifier for C1 motor

LK107

A A B Changes the biasing on the input

amplifier for C1 motor

OIPT Automatch Unit

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