Utah-94-721002-System-Manual.pdf - 第3页
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Issue 1: March 2006
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Modular Cluster System
Works Order No.: 94-721002
Customer: University of Utah
Volume 1: Operation and Maintenance Manual
This manual, Volume 1, is one of a series for the machine as follows:
Volume 1 Operation and Maintenance Manual
Volume 2 System Drawings
Volume 3 OEM Manuals
Notes:
1. Please regard this manual as part of the system.
2. Ensure that any amendment received is incorporated in the text.
Oxford Instruments Plasma Technology
Yatton, Bristol, BS49 4AP
Tel: +44 1934 837000
Fax: +44 1934 837001
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Title and inside front cover pages
Contents List................................................................................................................................... (iii)
Preface.............................................................................................................................................(iv)
Customer Support Facilities............................................................................................................(iv)
Quality Control Forms .....................................................................................................................(v)
Goods Return Form QCF60
Certificate of Pre-Acceptance and Certificate of Acceptance QCF 61
System Readyness Form QCF 89
1. Health and Safety.......................................................................................................1-1
2. Services (ICP 180)........................................................................................................2-1
3. Description..................................................................................................................3-1
4. Installation..................................................................................................................4-1
5. Operating Instructions...............................................................................................5-1
6. Maintenance ...............................................................................................................6-1
7. Process Guide and Glossary.......................................................................................8-1
8. Uninstallation and disposal.......................................................................................9-1
Appendix A Measurement of radio frequency and microwave emissions
Appendix B Operation and maintenance of turbomolecular pumps
Appendix C Concessions
Appendix E PC hard drive restore information
Appendix IDS Installation Data Sheets (ICP 180)
Appendix R Rotameter data
Appendix S Services Specifications for Plasmalab and Ionfab Systems
ICP 180 Inductively Coupled Plasma Source Equipment Manual
OIPT Automatch Unit Equipment Manual
Plasmalab System 100 Illustrated Parts Catalogue (ICP 180)
System Restore DVD (in HDD Restore Kit) and System Software CD
Contents
Printed: 28 March 2006 09:54 Page (iii) Issue 1: March 2006
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This manual is the OPERATION and MAINTENANCE MANUAL. It provides all the
information necessary for the operation and routine maintenance of the system. Certain
components within the system are supplied by other manufacturers. These components have
their separate manuals which are included, and should be referred to for detailed operation,
maintenance and repair information.
WARNING
SERVICE BY
QUALIFIED STAFF
ONLY
Refer to manual
Where this label is displayed (black text on a yellow
background), read the relevant manual before
proceeding to operate or maintain the labelled
equipment.
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Oxford Instruments Plasma Technology has global Customer Support Facilities to provide a co-
ordinated response to customer’s queries. All queries are recorded on our Support Database
and dealt with as quickly as possible. If we are not able to answer the query immediately, we
will contact you as soon as possible.
Before contacting a Customer Support Facility, please ensure that you have referred to the
appropriate section of your system manual, OEM manuals and electrical drawings.
Please direct all queries through your nearest support facility (see below) and have the
following details available.
System Type, e.g. mä~ëã~ä~ÄpóëíÉãNMM=etc.
Works Order No. – This can be found on the front cover of your system manual.
Contact Information – Your name, Company and how we can contact you.
Details of your query – nature of the problem, part numbers of spares required, etc.
You can contact us via any of the following:
China
Beijing
Tel: +86 106518 8160
Email:
pt.support@oichina.cn
Shanghai
Tel: +8621 6360 8530
Email:
pt.support@oichaina.cn
Germany
Tel: +49 6122 937 161
Email:
info@oxford.de
Japan
Tel: +81 3 5245 3591
Email:
oikkpt@oxinst.co.jp
Singapore
Tel: +65 6337 6848
Email: pt.support@oxford-instruments.com.sg
Taiwan
Tel: +886 3 5788696
Email:
pt.support@oxford-instruments.com.tw
UK
Customer Support Hotline: +44(0) 1934 837070
(0800 – 2000 UK local time)
Fax: +44(0) 1934 837071
Email:
pt.support@oxinst.co.uk
USA
Concord, MA
Tel: +1 978 9933 ext. 444
Toll Free: +1 800 447 4717 ext. 444
Fax: +1 978 369 8287
Email:
support.pt@ma.oxinst.com
Preface
Printed: 28 March 2006 09:54 Page (iv) Issue 1: March 2006