Utah-94-721002-System-Manual.pdf - 第300页
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= System Common Components Issue 2: November 02 MKR= måÉìã~íáÅ=Åçåíêçä=ÅçãéçåÉåíë=EÅçåíáåìÉÇF G/AIR/REG/104 G/AIR/REG/104 G/…
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 System Common Components
MKR= måÉìã~íáÅ=Åçåíêçä=ÅçãéçåÉåíë=
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To wafer clamp and
lift circuits
(see page 0.8)
Service
panel
Air IN
Air OUT
R
R
P
A
A
A
A
A
A
6-way SMC assy. SPABR06
G/AIR/VLV/506
Chamber roughing
valve
G/VAC/VLV/125
Turbo backing/purge
valve
G/VAC/VLV/125
Chamber vent valve
GVV0012C
He backing valve
(optional) GVV012C
Turbo gate
valve
G/VAC/VLV/271
(if fitted)
R
P
A
Air reservoir
G/AIR/SUN/002
Restrictor
G/AIR/REG/104
Restrictor
G/AIR/REG/104
G/AIR/VLV/501
G/AIR/VLV/551
Load lock
vent valve
GVV0012C
A
R
P
Foreline vent load lock turbo circuit
R
P
A
Air reservoir
G/AIR/SUN/002
Restrictor
G/AIR/REG/104
Restrictor
G/AIR/REG/104
G/AIR/VLV/501
G/AIR/VLV/551
Chamber
vent valve
GVV0012C
A
R
P
Foreline vent chamber turbo circuit
Energy lock out
valve
G/AIR/VLV/559
Rotary gate
valve
(if fitted)
C.M. gauge isolation
valve GVV0012C
Turbo backing valve
GVV0012C
Note - Air tubing is blue
Printed: 16-Jan-06, 15:55
Section 0 Page 7 of 12
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
System Common Components Issue 2: November 02
MKR= måÉìã~íáÅ=Åçåíêçä=ÅçãéçåÉåíë=EÅçåíáåìÉÇF
G/AIR/REG/104
G/AIR/REG/104
G/AIR/REG/104
G/AIR/REG/104
G/AIR/REG/104
G/AIR/REG/104
G/AIR/REG/104
Wafer lift
cylinder
G/AIR/CYL/315
Wafer clamp
cylinder
G/AIR/CYL/320
Wafer clamp
cylinder
G/AIR/CYL/320
Wafer clamp
valve
G/AIR/VLV/502
Wafer lift valve
G/AIR/VLV/502
WAFER CLAMP CIRCUIT
WAFER LIFT CIRCUIT
Only fitted if
required to cure
cylinder judder
P
A
B
EA
EB
A
B
EA
P
EB
A
IR IN
A
IR OUT
Note - Air tubing is blue
Section 0 Page 8 of 12
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 System Common Components
MKS= káíêçÖÉå=é ìêÖÉ=äáåÉ=
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Note - Nitrogen tubing is yellow.
Restrictor
G/AIR/REG/106
Turbo
pump
Solenoid switch & T piece
(supplied with Maglev
Turbo only)
Mass flow meter
M/MTR/MFM/003
Gauge
G/AIR/REG/570
Regulator
G/AIR/REG/560
Set to 0.5/0.7 bar
N
2 IN
Turbo
purge
valve
GVV0012C
Air OUT
Chamber
Restrictor
G/AIR/REG/106
Chamber
vent valve
GVV0012C
Foreline
Restrictor
G/AIR/REG/106
Foreline
vent valve
GVV0012C
Check valve
GVV0605
Restrictor
G/AIR/REG/106
Loadlock
vent valve
GVV0012C
(
when fitted
)
Loadlock
Maglev turbo pipe run
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Printed: 16-Jan-06, 15:55
Section 0 Page 9 of 12