Utah-94-721002-System-Manual.pdf - 第303页

mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã ~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Issue 2: November 02 System Common Components MKU= eÉ~íá åÖ=ÅáêÅìáíë Heate r c ontroller s ( EXZ0 200) on r ea r p ane l …

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mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
System Common Components Issue 2: November 02
MKT= t~íÉê=ÅççäáåÖ=ÅáêÅìáíë=
ICP R.F. GENERATOR
TURBO
LOWER ELECTRODE
ELECTRODE AMU
(OPTIONAL COOLING)
Service
panel
Flow Switch
G/WTR/FLW/002
Thermocouple
G/GAS/ROT/800
Valve supplied and fitted
with Maglev turbo only
Note – Water tubing is green
Water OUT
Water OUT
Water IN
Water IN
Water IN
Water IN
3/8G
Water OUT
ICP COIL
3/8G
1/4G
1/4G
1/4G
1/4G
1/4G
1/4G
Water OUT
ICP + ICP AMU
Section 0 Page 10 of 12
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 System Common Components
MKU= eÉ~íáåÖ=ÅáêÅìáíë
Heater controllers (EXZ0200)
on rear panel (see note below)
4 firerods (G/SUN/HET/010)
one in each corner of upper chamber
Thermocouple
(EQT0002)
attached to
upper chamber
Thermocouple
(EQT0002)
under pump
down heater mat
Pump down heater mat for 200 mm pipe - 450W
(MD91A17964)
Pump down heater mat for 160 mm pipe -
(MD00C23106)
Note:
Temperature controller (EXZ0200) fitted before September 2002. Since September 2002
type EXZ0093SP - Watlow Series 93 temperature controller fitted.
Printed: 16-Jan-06, 15:55
Section 0 Page 11 of 12
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
System Common Components Issue 2: November 02
MKV= póëíÉã=Åçããçå=ÅçãéçåÉåíë=çéíáçå=ëé~êÉë=
OIPT Part No. Qty Description
100-S-CMP 1 Common 100 PM spares - See Sub-section 11.2
100-S-RIE 1 RIE 100 PM spares - See Sub-section 11.3
UNIVERSAL BASE CONSOLE WITH MODULE CONTROLLER (100-0-RIE)
MA00Z22000 1 APC STEPPER MOTOR DRIVE ASSY
MA91Z21084 1 100 SYS PCB ASSY
POWER BOX ASSY - TOTAL (MA91Z18519)
EGB2000 1 CONTACTOR DIODE MODULE KM
EGB3022 1 CONTACTOR 20A 24VDC MIN.KM
EGT0058 1 O/L RELAY ZE6 4-6A MIN. KM
EFM1606 1 K.M. SLOW MCB TRIPLE POLE 6A
EFB2010 3 INS BOOT 20 mm FUSE
EFF2120 3 FUSE 20 mm HBC ANTI-SURGE 2A
EFM1420 1 K.M. SLOW MCB SINGLE POLE 20A
ESM0201 1 EMERGENCY STOP BUTTON
ESZ8112 1 CONTACT BLOCK
EXP2415 1 MULTI O/P PSU 24V/4A +/- 15V/2.5A - Replaces EXP0012
and EXP0502
PLC UNIT
EXP0700 1 B&R MINICONTROLLER 4 SLOT
EXO0725 1 B&R ANALOGUE MODULE.4
EXP0730 1 B&R DIGITAL MODULE 16 I/P
EXP0750 1 B&R ARCNET INTERF. EE32-0
EXP0272 1 PC ARCNET INTERFACE CARD (EXP0270 obsolete)
EXP0751 1 B&R MINICONTROLLER - Basic system consists; 4 off
Analogue cards EXP0725, 2 off Digital cards EXP0730, 1
off Arcnet memory card EXP0750 and 1 off mini
controller base EXP0700.
BASIC VACUUM KIT
GVV0503 1 PTR PAUL SERIES 50 N/C
G/VAC/SEL/025 1 NW25 CENTERING RING
Section 0 Page 12 of 12
Printed: 16-Jan-06, 15:55