Utah-94-721002-System-Manual.pdf - 第306页
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Process Chambers Issue 2: November 02 PKN= f`mNUM=ÅÜ~ãÄÉê=âáí= OMMic=éáéÉ=ENMMJPJQN`F= Section 3 Page 2 of 4 Printed: 16-J…
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Illustrated Parts Catalogue
Ef`mNUMF=
Issue 2: November 02 Process Chambers
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Section 3 - Process chambers .............................................................................................................................................1
3.1 ICP180 chamber kit 200LF pipe (100-3-41C)........................................................................................................2
3.2 Common process chamber option spares...........................................................................................................4
3.3 ICP180 source option spares................................................................................................................................4
Printed: 16-Jan-06, 15:55
Section 3 Page 1 of 4
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Process Chambers Issue 2: November 02
PKN= f`mNUM=ÅÜ~ãÄÉê=âáí=OMMic=éáéÉ=ENMMJPJQN`F=
Section 3 Page 2 of 4
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`mNUMF=
Issue 2: November 02 Process Chambers
Item No. OIPT Part No. Qty Description
MA00Z22821 ICP180 (ALUMINA TUBE) HINGED ASSEMBLY
1 MD81C15834 1 NW25KF FLANGE (INTERFEROMETRY)
2 G/SEL/O-K/117 1 2.62 x 20.3 mm K'REZ 'O' RING BS117
3 G/SEL/O-K/219 1 3.53 x 32.9 mm K'REZ 'O' RING BS219
4 MD81D15869 1 GASKET
5 G/SEL/O-K/235 1 3.53 x 79.0 mm K'REZ 'O' RING BS235
6 MD81D15847 1 RING
7 MA00B21488 1 FLOATING TOP WELD MC ASSY-ICP
8 G/SEL/O-K/264 2 3.53 x 190.1 mm K'REZ 'O' RING BS264
9 G/VAC/SEL/015C 1 NW16 CENTRING RING ALI/VITON
10 G/VAC/FIT/323C 1 16KF BLANK FLANGE
11 MD00D18558 1 VALVE BLOCK
12 MD00B23127 1 CERAMIC TUBE WATER COOLING RING
13 MD00D21388 1 SUPPORT PILLAR
14 MD00B18547 1 RF SHIELD
15 MD00B18549 1 COIL (4) ICP SOURCE
16 G/GAS/FIT/284C 1 ¼ UNION
17 MD00A23821 1 BACK PLATE HINGED
18 G/GAS/FIT/274C 2 ¼ BULKHEAD UNION
19 G/GAS/FIT/276C 2 3/8 BULKHEAD UNION
20 G/SUN/BSH/116 4 8 x 12 x 12 mm OILITE BUSH CM16
21 MD91D17198 2 HINGE PIN
22 G/SUN/SPG/923 2 GAS SPG 6-60-220-MB-MB-RV400N
23 MD00D18551 3 SPACER BLOCK
24 MD00D18552 3 SPACER BLOCK HALF
25* MD81D16140 1 WINDOW FLANGE
26* G/FIX/S32/625 4 M6 x 25 mm S/S CAPHEAD SCREW
27* MD81D14211 1 UV/RF FILTER
28* M/4175D/01 1 WINDOW GASKET
29* M/0651D/01 1 WINDOW GLASS (6 mm PYREX)
30* MA00D14711 1 NW40 CENTRING RING MOD
31 MD91D20353 1 CHAMBER 200LF STANDARD
32 G/SEL/O-V/263C 1 3.5 x 196.4 mm VITON 'O' RING BS263 (PART OF ITEM 33
AND MOUNTED ON ITEM 33)
33 G/VAC/VLV/930 1 MONVAT VLV 46 x 236 02010-BA24
34 G/VAC/SEL/040C 1 NW40 CENT. RING ALI/VITON
35 G/VAC/FIT/327C 1 40KF BLANK FLANGE
36 G/VAC/CLP/311C 4 CLAWS DN25 1SO-KF.BP220366-T
37 G/SEL/O-V/384C 1 5.3 x 380.37 mm VITON 'O' RING 200-384
38 G/SUN/CAB/850 2 OVER CENTRE DRAW LATCH
39 MD00A22716 1 LID (HINGED ICP180)
40 MA00A23828 1 AUTOMATCH ASSY. (VAC CAP) ICP180
41 MD00C18541 1 QUARTZ TUBE (ICP SOURCE)
41a MD00C18542 1 ALUMINA TUBE (ICP SOURCE) – ALTERNATE TO ITEM 41
42 MD00A21385 1 TOP PLATE (ICP)
43 MD00A23852 1 ICP180 SIDE COVER
* 25 to 30 MA91Z17161 CHAMBER VIEWPORT KIT
Printed: 16-Jan-06, 15:55
Section 3 Page 3 of 4