Utah-94-721002-System-Manual.pdf - 第31页

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä= póëíÉã=NMM OK= pÉêîáÅÉë=Ef`m=NUM=C=~ìíçã~íáÅ=äç~Ç=äçÅâF= 2. Services (ICP 180 & automa tic load lo ck) .................................................…

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mä~ëã~ä~Ä and fçåÑ~Ä lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Health and Safety
…Continued
On (Supply) IEC 417, No.5007
Off (Supply) IEC 417, No.5008
Earth (ground) IEC 417, No.5017
Protective earth (ground) IEC 417, No.5019
Three phase alternating Current IEC 617-2 No. 020206
3N
Three phase alternating Current with Neutral wire.
W
ARNING
HAZARDOUS
VOLTAGE
Disconnect electrical
supply before
removing cover
Warns of any voltage between 208V and 240V underneath the cover.
When used on its own, this label warns of any voltage between 208V
and 240V.
The labels below indicate the presence of high voltages within the labelled
equipment. There is a danger of electric shock or burns from touching
components within the labelled equipment.
DANGER
HAZARDOUS
VOLTAGE
415 Volts
50/60 hz
3 Phase
DANGER
HAZARDOUS
VOLTAGE
380 Volts
50/60 hz
3 Phase
DANGER
HAZARDOUS
VOLTAGE
208 Volts
50/60 hz
3 Phase
DANGER
HAZARDOUS
VOLTAGE
240 Volts
50/60 hz
DANGER
HAZARDOUS
VOLTAGE
220 Volts
50/60 hz
DANGER
HAZARDOUS
VOLTAGE
115 Volts
50/60 hz
Health and Safety
Issue 11: August 2004 Page 1-18 of 18 Printed:29 May 2005, 06:31
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä=póëíÉã=NMM
OK= pÉêîáÅÉë=Ef`m=NUM=C=~ìíçã~íáÅ=äç~Ç=äçÅâF=
2.
Services (ICP 180 & automatic load lock) ...................................................................................2-1
2.1 General....................................................................................................................................................2-2
2.2 Services requirements ............................................................................................................................2-3
2.3 Distribution and use of Nitrogen vent and turbo purge gas..............................................................2-3
2.4 Services diagrams ...................................................................................................................................2-4
Fig 2.1: System 100 (ICP 180/380) services flow diagram..................................................................................2-5
Fig 2.2: System 100 pneumatic circuit diagram.................................................................................................2-6
Services (ICP 180 and Automatic Load Lock)
Printed 25 May 2005 10:12 Page 2-1 of 6 Issue 2: February 02
mä~ëã~ä~Ä=póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
OKN= dÉåÉê~ä=
The services requirements for the mä~ëã~ä~Ä=póëíÉã=NMM=are given in two appendices to this
manual:
Appendix S Services Specifications for mä~ëã~ä~Ä=and fçåÑ~Ä Systems. This document
gives generic information and mandatory requirements for all services.
Appendix I mä~ëã~ä~Ä=póëíÉã=NMM Installation Data Sheets. This document gives the
information necessary to prepare the environment for the mä~ëã~ä~Ä=
póëíÉã=NMMK= Services information includes electrical power consumption
and cooling water flow rates. References are made to the relevant
mandatory services requirements, listed in ‘Services Specifications for
mä~ëã~ä~Ä=and fçåÑ~Ä Systems’ (see Appendix S).
Services diagrams of the mä~ëã~ä~Ä=póëíÉã=NMM=(ICP 180 + automatic load lock) are given in
the following drawings:
SP91C24171 System 100 (ICP 180) Services flow diagram
SP91B24018 System 100 Pneumatic circuit
These drawings are located in Volume 2 of this manual. Illustrations of these drawings are
also given in sub-section 2.4, page 2-4.
Services (ICP 180 and Automatic Load Lock)
Issue 2: February 02 Page 2-2 of 6 Printed 25 May 2005 10:12