Utah-94-721002-System-Manual.pdf - 第310页

mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Lower Electrode I ssue 2: November 02 RKN= pí~åÇ~êÇ=eÉ=Ä~ÅâÉÇ=äç ïÉê=ÉäÉÅíêçÇÉ=ïáíÜ=ÅÉåíê~ääó= éçëáíáçåÉÇ=PJéáå=äáÑí=~åÇ=ï…

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Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Lower Electrode
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Section 5 - Lower electrode..............................................................................................................................1
5.1 Standard He backed lower electrode with centrally positioned 3-pin lift and wafer clamp assembly
(100-5-36A) / (100-5-36A/01 - Anodised).............................................................................................................2
5.2 RIE + He vari height table (100-5-26A)................................................................................................................4
5.3 Cryo table (100-5-12A) / (100-5-12A/1 - Anodised).............................................................................................6
5.4 Helium pipe run...................................................................................................................................................8
5.5 Lower electrode option spares............................................................................................................................9
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Section 5 Page 1 of 10
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Illustrated Parts Catalogue
Ef`m=NUMF=
Lower Electrode Issue 2: November 02
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a to g
Section 5 Page 2 of 10
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Lower Electrode
Note: See sub
Section 0.5 for hydraulic components and sub Section 5.4 for the helium pipe run.
Item No. in
illustration
OIPT Part Number Description
100-5-36A STANDARD He BACKED LOWER ELECTRODE
100-5-36A/01 STANDARD He BACKED LOWER ELECTRODE - ANODISED
MA91Z21747 RIE TABLE ASSY (3 PIN LIFT)
MA91A22537 WAFER CLAMP ASSEMBLY 200 PORT
MA91C20442 HELIUM PIPE RUN ASSEMBLY
1 MD91D21723 TABLE TOP PLUG
1a MA91D21724 TABLE TOP PLUG ANODISED (ALT TO ITEM 1)
2 MD91D22533 WAFER CLAMP RING SUPPORT
3 G/SEL/O-V/218C 3.5 x 31.3 mm VITON 'O' RING BS218
4 MA91D17600 PIN WELDED ASSEMBLY
5 MD91D17604 FLANGED BUSH
6 MD91D17602 HOUSING
7 G/SUN/BSH/123 OILITE BUSH 16 x 20LG QM21-20
8 G/AIR/CYL/320 20 mm CYLINDER CDQ2B20-20D
9 G/SUN/SPG/012 COMP. SPRING LEE No. LCM-050C-5 (NOT SHOWN)
10 G/SEL/O-V/146C 2.6 x 66.3 mm VITON 'O' RING BS146
11 MD81D14110 COMPRESSION RING
12 MD81C14107 TABLE FEEDTHROUGH
13 G/SEL/O-V/829C 3.5 x 47.6 mm VITON 'O' RING BS829
14 MD81D14109 CLAMPING FLANGE
15 MD81D14111 SPACER
16 MD91D21715 PIN LIFT ROD
17 MD81C14104 WATER COOLED CLAMP
18 MA91C19809 BELLOWS WELDED ASSEMBLY
19 MD91D19679 CYLINDER SPACER
20 MD91D21408 SPRING SPACER
21 MD91D21407 SPRING SHOULDER
22 MD91D23589 CYLINDER MOUNTING BRACKET
23 G/AIR/CYL/315 AIR CYLINDER CDQ2B20-15D (SMC)
24 G/SUN/SPG/008 SPRING COMP. O/D 31.75 x 50.8 x 2.6 (NOT SHOWN)
25 MD91B19672 TABLE SUPPORT TUBE
26 MD91C19935 DARK SPACE SHIELD 200 DIA
27 MD81D14116 ISOLATOR WASHER (RIE TABLE)
28 MA91B21716 TABLE ASSEMBLY (FOR PIN LIFT TOP)
29 MD91C21713 PIN LIFT STAR
30 MD91D21714 PIN LIFT ROD
31 MD91C21712 TABLE UPPER SURFACE
31a MA91C21725 TABLE UPPER SURFACE ANODISED (ALT TO ITEM 31)
32 MD91B22531 WAFER CLAMP BOTTOM PLATE
33 MD91D22532 WAFER CLAMP SUPPORT ROD
34 MA91B22491 RETAINING RING FOR WAFER CLAMP
35a MD91B22327 2" DIA WAFER CLAMP - QUARTZ
35b MD91B22277 3" DIA WAFER CLAMP - QUARTZ
35c MD91B22328 4" DIA WAFER CLAMP - QUARTZ
35d MD91B22938 4¼" DIA WAFER CLAMP - QUARTZ
35e MD91B24693 5" DIA WAFER CLAMP - QUARTZ
35f MD91B22329 6" DIA WAFER CLAMP - QUARTZ
35g MD91B23026 8" DIA WAFER CLAMP - QUARTZ
G/AIR/VLV/502 SMC ASSY. VZ3140/5MNZ/001
G/AIR/REG/104 INLINE FLOW REG. AS1001F-04
G/AIR/CYL/807 REED SWITCH SMC No. D-A73L
EQT0014 TYPE 17 Pt RES THERMOMETER
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Section 5 Page 3 of 10