Utah-94-721002-System-Manual.pdf - 第315页

mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Issue 2: November 02 Lower Electrode Item No. in illustration OIPT Part Number Description 100-5-12A CRYO TABLE 100-5-12A/…

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mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Lower Electrode Issue 2: November 02
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a to g
Section 5 Page 6 of 10
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Lower Electrode
Item No. in
illustration
OIPT Part Number Description
100-5-12A CRYO TABLE
100-5-12A/1 CRYO TABLE - ANODISED
MA91Z20975 TABLE ASSY (-150/+140C)
MA91A20949 ELECTRODE LOWER ASSY (-150/+140C)
ANODISED
MA91A22537 WAFER CLAMP ASSEMBLY 200 PORT
MA91C20442 HELIUM PIPE RUN ASSEMBLY
1 MD91D22533 WAFER CLAMP RING SUPPORT
2 G/SEL/O-V/218C 3.5 x 31.3 mm VITON 'O' RING BS218
3 MA91D17600 PIN WELDED ASSEMBLY
4 MD91D17604 FLANGED BUSH
5 MD91D17602 HOUSING
6 G/SUN/SPG/012 COMP. SPRING LEE No. LCM-050C-5 (NOT SHOWN)
7 G/SUN/BSH/123 OILITE BUSH 16 x 20LG QM21-20
8 G/AIR/CYL/320 20 mm CYLINDER CDQ2B20-20D
9 G/SEL/O-V/146C 2.6 x 66.3 mm VITON 'O' RING BS146
10 MD81C14107 TABLE FEEDTHROUGH
11 MD81D14110 COMPRESSION RING
12 G/SEL/O-V/829C 3.5 x 47.6 mm VITON 'O' RING BS829
13 MD81D14109 CLAMPING FLANGE
14 MD81D14111 SPACER
15 MD91D19828 PUSH ROD
16 MD81C14104 WATER COOLED CLAMP
17 MA91C19809 BELLOWS WELDED ASSEMBLY
18 MD91D19679 CYLINDER SPACER
19 MD91D21408 SPRING SPACER
20 MD91D21407 SPRING SHOULDER
21 G/AIR/CYL/315 AIR CYLINDER CDQ2B20-15D (SMC)
22 MD91D23589 CYLINDER MOUNTING BRACKET
22a G/SUN/SPG/008 SPRING COMP. O/D 31.75 x 50.8 x 2.6 (NOT SHOWN)
23 MD91B20935 DSS SUPPORT TUBE
23a MD91B20946 DSS SUPPORT TUBE ANODISED (ALT. TO ITEM 23)
24 MD91B20939 DARK SPACE SHIELD
24a MD91B20945 DARK SPACE SHIELD ANODISED (ALT. TO ITEM 24)
25 MD91D20934 LOCATING RING
26 MA91A20947 ELECTRODE LOWER ASSEMBLY WELDED
26a MA91B20944 ELECTRODE LOWER ANODISED (ALT. TO ITEM 26)
27 MD91C21713 PIN LIFT STAR (UNDER)
28 MD91D21714 PIN LIFT ROD (UNDER)
29 MD91B22531 WAFER CLAMP BOTTOM PLATE
30 MD91D22532 WAFER CLAMP SUPPORT ROD
31 MA91B22491 RETAINING RING FOR WAFER CLAMP
32a MD91B22327 2" DIA WAFER CLAMP - QUARTZ
32b MD91B22277 3" DIA WAFER CLAMP - QUARTZ
32c MD91B22328 4" DIA WAFER CLAMP - QUARTZ
32d MD91B22938 4¼" DIA WAFER CLAMP - QUARTZ
32e MD91B24693 5" DIA WAFER CLAMP - QUARTZ
32f MD91B22329 6" DIA WAFER CLAMP - QUARTZ
32g MD91B23026 8" DIA WAFER CLAMP - QUARTZ
G/AIR/VLV/502 SMC ASSY. VZ3140/5MNZ/001
G/AIR/REG/104 INLINE FLOW REG. AS1001F-04
G/AIR/CYL/807 REED SWITCH SMC No. D-A73L
EQT0014 TYPE 17 Pt RES THERMOMETER
Note: See sub
Section 0.5 for hydraulic components and sub Section 5.4 for the helium pipe run.
Printed: 16-Jan-06, 15:55
Section 5 Page 7 of 10
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Lower Electrode Issue 2: November 02
RKQ= eÉäáìã=éáéÉ=êìå=
Section 5 Page 8 of 10
Printed: 16-Jan-06, 15:55