Utah-94-721002-System-Manual.pdf - 第321页
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Issue 2: November 02 RF Supplies and Automatch ofb=SMMt=dÉåÉê~íçê=H=lmq =^jr=OMM=éáéÉ=ENMMJSJOMMsF= OIPT Part No. Descript…
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
RF Supplies and Automatch Issue 2: November 02
VACUUM AUTOMATCH ASSEMBLY EXTERNAL VIEW
(2) Trimpots
100k (2 off)
(3) RF Inlet
(4) DC motor and
gearbox assy
(5) AMU Control PCB
(7) Fan Finger Guard
(6) Fan
(1) Capacitive
feed through
(4 off)
V
ACUUM AUTOMATCH ASSEMBLY INTERNAL VIEW
(12) 1000pf
vacuum capacitor
(11) 500pf
vacuum capacitor
(8) Modified
gear
(14) PTFE tube
(17) AMU DC bias coil
(19) AMU sense PCB
(20) Ferrite cube
(21) Insulator
(18) Conductor
(inside insulator)
(9) 1000pf capacitor
drive adaptor
(10) 500pf
capacitor insulator
(13) S/S tube
(15) Cooling
connectors
(16) Cooling ring assy
Section 6 Page 2 of 8
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 RF Supplies and Automatch
ofb=SMMt=dÉåÉê~íçê=H=lmq=^jr=OMM=éáéÉ=ENMMJSJOMMsF=
OIPT Part No. Description
L/GEN/RFG/101 AE RFX600A 230V(PASSIVE PANEL) RF GENERATOR
MA00A23771 AUTOMATCH ASSEMBLY
MA00B23328 AMU CONTROL PANEL ASSY
=
SKN= ^ìíçã~íÅÜ=~ëëÉãÄäó=J=î~Å=Å~é=ÉíÅÜ=RJíìêå=Åçáä=Ej^MM^OPTTNF
Item OIPT Part No. Qty Description
1 ECC0001 4 CAPACITIVE FEED THRU 10,000 pf
2 ERU0511 2 TRIMPOT 100K (3006) SERIES
3 EPP0005 1 SOCKET G15007H RR N CHAS. (RF INLET CONNECTOR)
4 MA00D23738 2 MOTOR & GEARBOX ASSEMBLY
5 MA00Z20138 1 AMU CONTROL PCB ASSEMBLY
6 EFA0460C 3 FAN AXIAL 60 x 60 x 25.4 24 VDC
7 EFA1062 3 FAN FINGER GUARD 60/62
8 MA00D22225 2 MODIFIED GEAR
9 MD00D21224 1 1000 pf VACUUM CAPACITOR DRIVE ADAPTOR
10 MD00D21225 1 500 pf VACUUM CAPACITOR INSULATOR
11 L/CAP/VAR/106 1 500 pf VACUUM CAPACITOR
12 L/CAP/VAR/110 1 1000 pf VACUUM CAPACITOR
13 R/TUB/S/S/200C ¼" O/D x 20G 316L S/S ELPO
14 R/TUB/PTF/030 ¼" O/D x 3/16" I.D PTFE TUBE
15 G/GAS/FIT/274C 2 COOLING CONNECTORS
16 MA00D23772 1 COOLING RING ASSEMBLY
17 MA00D20107 1 AMU DC BIAS COIL
18 MD00D21243 1 CONDUCTOR
19 MA00Z18209 1 AMU SENSE PCB ASSY
20 ELZ0015C 2 FERRITE CUBE FX-3854
21 MD00D21242 1 INSULATOR
Printed: 16-Jan-06, 15:55
Section 6 Page 3 of 8
mä~ëã~ä~Ä póëíÉã=NMM
Ef`m=NUMF=
lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
RF Supplies and Automatch Issue 2: November 02
Section 6 Page 4 of 8
Printed: 16-Jan-06, 15:55
ICP180 AUTOMATCH ASSEMBLY EXTERNAL VIEW
(1) Trimpots
100k (2 off)
(3) RF inlet
(4) DC motor and
gearbox assy
(5) AMU Control PCB
(7) Fan Finger Guard
(6) Fan
(2) Capacitive
feed through
(4 off)
ICP180 AUTOMATCH ASSEMBLY INTERNAL VIEW
(8) 1000pf
vacuum capacitor
(9) 500pf
vacuum capacitor
(17) Modified
gear
(19) PTFE tube
(10) Cooling ring
assembly
(13) AMU sense PCB
(14) Ferrite cube
(16) Insulator
(15) Conductor
(inside insulator)
(18) 1000pf capacitor
drive adaptor
(11) 500pf
capacitor insulator
(12) RF outlet mount