Utah-94-721002-System-Manual.pdf - 第326页

mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= RF Supplies and Automatch Issue 2: November 02 SKR= oc=ëìééä áÉë=~åÇ=~ìíçã~íÅÜ=çéíáçå=ëé~êÉë= Used on sales options: 81-6-…

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mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 RF Supplies and Automatch
SKQ= oc=ÖÉåÉê~íçêë=
AE RFX600A 230V (passive panel)
RF Generator (L/GEN/RFG/101)
A
E RFG30001 208V 3ph (black box)
RF Generator (L/GEN/RFG/104)
=
Printed: 16-Jan-06, 15:55
Section 6 Page 7 of 8
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
RF Supplies and Automatch Issue 2: November 02
SKR= oc=ëìééäáÉë=~åÇ=~ìíçã~íÅÜ=çéíáçå=ëé~êÉë=
Used on sales options: 81-6-15/1, 81-6-20/2, 81-6-61, 81-6-71, 81-6-80/3, 81-6-80/4, 100-6-30, 100-6-35.
OIPT Part No. Qty Description
MA00A23771 1 OPT VAC CAP AUTOMATCH UNIT
MA00Z20138 1 AMU CONTROL PCB ASSY
MA00Z18209 1 AMU SENSE PCB ASSY
L/CAP/VAR/110 1 1000pf VACUUM CAPACITOR
L/CAP/VAR/106 1 500pf VACUUM CAPACITOR
MA00D20107 1 OPT AMU DC BIAS COIL
G/SUN/GER/008 1 DC MOTOR GEARBOX 1250:1
G/SUN/GER/009 1 SERVO MOTOR 24 VDC RS.440-559
ERV0411 1 SERVO POTENTIOMETER 10K OHMS
ECC0001 1 CAPACITOR F/T 10,000 pf
ECC0290 2 CAPACITOR PADDING CER 20% 1 KV
MA00B23328 1 OPT AMU CONTROL PANEL ASSY
RIE 600W GEN + OPT AMU 200 PIPE (10-6-200V)
L/GEN/RFG/101 1 AE RFX600A 230V (PASSIVE PANEL) RF GENERATOR
SKS= oc=ëìééäáÉë=~åÇ=~ìíçã~íÅÜ=Eî~Å=Å~éF=f`mNUM=çéíáçå=ëé~êÉë=
Used on 180 mm ICP systems from mid-end 2000
OIPT Part No. Qty Description
MA00A23828 1 AUTOMATCH ASSY. (VAC CAP) ICP180
MA00Z20138 1 AMU CONTROL PCB ASSY.
MA00Z18209 1 AMU SENSE PCB ASSY
L/CAP/VAR/110 1 VACUUM CAPACITOR 1000pf
L/CAP/VAR/106 1 VACUUM CAPACITOR 500pf
MA00D23738 2 MOTOR & GEARBOX ASSY. – Consists of
G/SUN/GER/009/012/013
L/GEN/RFG/103 1 ICP GENERATOR - AE RFG 3001 208V 3 ph (BLACK BOX)
Section 6 Page 8 of 8
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Vacuum Measurement
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Section 7 - Vacuum Measurement ...................................................................................................................1
HEATED/UNHEATED 100 mT CAPACITIVE MANOMETER AND PENNING GAUGE (81-7-03/4)/(81-7-03/1) .....................2
7.1 100mT capacitive manometer and penning gauge............................................................................................2
7.2 Vacuum measurement option spares..................................................................................................................4
Printed: 16-Jan-06, 15:55
Section 7 Page 1 of 4