Utah-94-721002-System-Manual.pdf - 第331页

mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Issue 2: November 02 Pumping Pipework pÉÅíáçå=U=J=mìãéáåÖ=éáéÉïçêâ= Section 8 - Pumping pipework .........................…

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Illustrated Parts Catalogue
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Vacuum Measurement Issue 2: November 02
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OIPT Part No. Qty Description
HEATED 100 mT CAPACITANCE MANOMETER + PENNING GAUGE (81-7-03/4)
G/VAC/GGE/625 1 HEATED 100mT MKS CAPACITANCE MANOMETER
628B.IT-D-E-1-B - USED ON 81-7-03/4
G/VAC/GGE/002 1 UNHEATED 100mT MKS CAPACITANCE MANOMETER
- USED ON 81-7-03/1
G/VAC/GGE/004 1 ACT INVERT MAG GGE AIM-V-NW25 (PENNING)
G/VAC/VLV/125 1 PV25PK ISOLATION VALVE
G/VAC/SEL/025 1 NW25 CENTERING RING
Section 7 Page 4 of 4
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Pumping Pipework
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Section 8 - Pumping pipework.........................................................................................................................1
8.1 General.................................................................................................................................................................2
8.2 200mm pipework + 200 VAT APC (100-8-20)......................................................................................................3
8.3 Pumping pipework option spares.......................................................................................................................6
Printed: 16-Jan-06, 15:55
Section 8 Page 1 of 6
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Pumping Pipework Issue 2: November 02
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A key to the symbols used to represent vacuum system components in the following illustrations is shown in the following
key; where no symbol exists for a component, it is either labelled or can be identified from the associated table.
Key to vacuum schematic symbols
Section 8 Page 2 of 6
Printed: 16-Jan-06, 15:55