Utah-94-721002-System-Manual.pdf - 第335页
mä~ëã~ä~Ä póëíÉã=NMM Ef`m=NUMF= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Issue 2: November 02 Pumping Pipework Printed: 16-Jan-06, 15:55 Section 8 Page 5 of 6
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Pumping Pipework Issue 2: November 02
Item No. in
illustration
OIPT Part Number Description
1 GVV00012C N2 VENT VALVES
2 G/VAC/SUN/032 EDWARDS VAC INTERLOCK SWITCH
3 G/VAC/VLV/125 PV25PK ISOLATION VALVE
4 M/MTR/MFM/003 MKS 100SCCM N2 FLOW METER SWAG
5 G/VAC/VLV/245 200ISO STEPGATE VALVE.64046-PE52
6 G/VAC/VLV/246 VAT APC CONTROLLER 641PM-16PM
7 G/VAC/PMP535 ALCATEL ATP900HPC TURBO ISO200
8 G/VAC/PMP/536 ALCATEL ACT100T TURBO CONTROLLER
9 G/VAC/GGE/004 ACT.INVERT.MAG.GGE.AIM-S-NW25 (PENNING UNIT)
10 G/VAC/GGE/625 100mT MKS CAPACITIVE MANOMETER 628B.1T-D-E-1-B
11 G/SEL/O-V/371 5.3 x 215.3 mm VITON 'O' RING BS 371
12 G/VAC/SEL/025C NW25 CENTRING RING ALI/VITON
12a G/VAC/CLP/025C NW25 CLAMP RING
13 G/VAC/SEL/010C NW10 CENTRING RING ALI/VITON
13a G/VAC/CLP/010C NW10 CLAMP RING
14 G/VAC/SEL/040C NW40 CENTRING RING ALI/VITON
14a G/VAC/CLP/040C NW40 CLAMP RING
15 G/VAC/SEL/080 200ISO-K CENTRING RING ALI/VITON
16 G/VAC/FIT/280 ISO 200 - 200 TEE
17 G/VAC/FIT/240C NW40 TEE
18 G/VAC/FLX/325 NW25 0.5M PIPE
19 G/VAC/FIT/004C NW25/NW16 REDUCER C105-14-447
20 G/VAC/FIT/005C NW40/NW25 REDUCER
Section 8 Page 4 of 6
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM
Ef`m=NUMF=
lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Issue 2: November 02 Pumping Pipework
Printed: 16-Jan-06, 15:55
Section 8 Page 5 of 6
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Pumping Pipework Issue 2: November 02
UKP= mìãéáå Ö=éáéÉïçêâ=çéíáçå=ëé~êÉë=
OIPT Part No. Qty Description
200 mm VAT APC VACUUM KIT
G/VAC/VLV/245 1 200 ISO STEPGATE VALVE 640046-PE52
G/VAC/VLV/246 1 VAT CONTROLLER 641PM-16PM
G/VAC/SEL/080 4 200 ISO CENTERING RING
G/VAC/SEL/025 2 NW25 CENTRING RING
G/VAC/SEL/040 2 NW40 CENTRING RING
G/VAC/SEL/010 2 NW10 CENTRING RING 08C10511395
G/VAC/SEL/068 1 DN 250 ISO-K CENTRING RING
Section 8 Page 6 of 6
Printed: 16-Jan-06, 15:55