Utah-94-721002-System-Manual.pdf - 第338页
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Gas Handling Issue 2: November 02 VKN= SJäáåÉ=Ö~ë=éçÇ=EUNJVJRNF= Section 9 Page 2 of 10 Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Gas Handling
pÉÅíáçå=V=J=d~ë=Ü~åÇäáåÖ=
Section 9 - Gas handling...................................................................................................................................1
9.1 6-line gas pod (81-9-51).......................................................................................................................................2
9.2 12-line gas pod (81-9-61).....................................................................................................................................4
9.3 Non-toxic gas line (81-9-11).................................................................................................................................6
9.4 Toxic gas line (81-9-21) ........................................................................................................................................7
9.5 Clean gas line with MFC (81-9-31).......................................................................................................................8
9.6 Clean gas line with rotameter (81-9-07).............................................................................................................9
9.7 Gas handling option spares...............................................................................................................................10
Printed: 16-Jan-06, 15:55
Section 9 Page 1 of 10
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Gas Handling Issue 2: November 02
VKN= SJäáåÉ=Ö~ë=éçÇ=EUNJVJRNF=
Section 9 Page 2 of 10
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Gas Handling
Item No. OIPT Part No. Qty Description
1 MA81D15070 1 MANIFOLD GAS OUT PIPE
2 MA81D14783 1 GAS CONNECTION LINE
3 81-9-31 1 CLEAN GAS LINE (SEE SUB-SECTION 9.5)
4 MA81Z16003 1 GAS POD CHAMBER A OR B INTERFACE PCB
5 G/AIR/VLV/506 1 6 WAY SMC ASSY. SPASBR06
6 ESZ9102 1 DOOR INTERLOCK MICRO-SW SPDT
7 G/AIR/VLV/501 1 SINGLE SMC ASSY. SPASBR01
8 81-9-11 1 NON-TOXIC GAS LINE (SEE SUB-SECTION 9.3)
9 81-9-21 1 TOXIC GAS LINE (SEE SUB-SECTION 9.4)
Printed: 16-Jan-06, 15:55
Section 9 Page 3 of 10