Utah-94-721002-System-Manual.pdf - 第339页
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Issue 2: November 02 Gas Handling Item No. OIPT Part No. Qty Description 1 MA81D15070 1 MANIFOLD GAS OUT PIPE 2 MA81D14783…
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Gas Handling Issue 2: November 02
VKN= SJäáåÉ=Ö~ë=éçÇ=EUNJVJRNF=
Section 9 Page 2 of 10
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Gas Handling
Item No. OIPT Part No. Qty Description
1 MA81D15070 1 MANIFOLD GAS OUT PIPE
2 MA81D14783 1 GAS CONNECTION LINE
3 81-9-31 1 CLEAN GAS LINE (SEE SUB-SECTION 9.5)
4 MA81Z16003 1 GAS POD CHAMBER A OR B INTERFACE PCB
5 G/AIR/VLV/506 1 6 WAY SMC ASSY. SPASBR06
6 ESZ9102 1 DOOR INTERLOCK MICRO-SW SPDT
7 G/AIR/VLV/501 1 SINGLE SMC ASSY. SPASBR01
8 81-9-11 1 NON-TOXIC GAS LINE (SEE SUB-SECTION 9.3)
9 81-9-21 1 TOXIC GAS LINE (SEE SUB-SECTION 9.4)
Printed: 16-Jan-06, 15:55
Section 9 Page 3 of 10
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Gas Handling Issue 2: November 02
VKO= NOJäáåÉ=Ö~ë=éçÇ=EUNJVJSNF=
Programmable Logic
Controller
See Sub-section 0.4
PCB3
Gas Lines
9-12
PCB1
Gas Lines
1-4
PCB2
Gas Lines
5-8
Section 9 Page 4 of 10
Printed: 16-Jan-06, 15:55