Utah-94-721002-System-Manual.pdf - 第340页

mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Gas Handling Issue 2: November 02 VKO= NOJäáåÉ=Ö~ë=éçÇ=EUNJVJSNF= Progr ammable Log ic Contr oll er See Sub-s ecti on 0.4 …

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Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Gas Handling
Item No. OIPT Part No. Qty Description
1 MA81D15070 1 MANIFOLD GAS OUT PIPE
2 MA81D14783 1 GAS CONNECTION LINE
3 81-9-31 1 CLEAN GAS LINE (SEE SUB-SECTION 9.5)
4 MA81Z16003 1 GAS POD CHAMBER A OR B INTERFACE PCB
5 G/AIR/VLV/506 1 6 WAY SMC ASSY. SPASBR06
6 ESZ9102 1 DOOR INTERLOCK MICRO-SW SPDT
7 G/AIR/VLV/501 1 SINGLE SMC ASSY. SPASBR01
8 81-9-11 1 NON-TOXIC GAS LINE (SEE SUB-SECTION 9.3)
9 81-9-21 1 TOXIC GAS LINE (SEE SUB-SECTION 9.4)
Printed: 16-Jan-06, 15:55
Section 9 Page 3 of 10
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Gas Handling Issue 2: November 02
VKO= NOJäáåÉ=Ö~ë=éçÇ=EUNJVJSNF=
Programmable Logic
Controller
See Sub-section 0.4
PCB3
Gas Lines
9-12
PCB1
Gas Lines
1-4
PCB2
Gas Lines
5-8
Section 9 Page 4 of 10
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Gas Handling
=
Item OIPT Part No. Qty Description
1 MD81A22487 1 GAS POD BOX
2 MD31B18526 1 GAS POD LID
3 MA81D14783 1 GAS CONNECTION LINE
4 MA81D15070 1 MANIFOLD GAS OUT PIPE
5 G/AIR/VLV/506 2 6 WAY SMC ASSY.SPASBR10
6 G/AIR/VLV/501 2 SINGLE SMC ASSEMBLY. SPASBR01
7 MA31Z18421 3 300 PLUS GASES PCB2 ASSY
8 EXP0701 1 B&R MINICONTROLLER
EXP0730 1 B&R DIGITAL MODULE 16 I/P
EXP0725 1 B&R ANALOGUE MODULE.4
EXP0750 3 B&R ARCNET INTERF. EE32-0
10 MA81Z16005 3 PLC INTERFACE PCB
11 ESZ9102 1 DOOR INTERLOCK MICRO-SW SPDT
12 81-9-11 NON-TOXIC GAS LINE (SEE SUB-SECTION 9.3)
13 81-9-21 TOXIC GAS LINE (SEE SUB-SECTION 9.4)
14 81-9-31 1 CLEAN GAS LINE (SEE SUB-SECTION 9.5)
Note - For PLC components, see
Sub-section 0.4.
=
Printed: 16-Jan-06, 15:55
Section 9 Page 5 of 10