Utah-94-721002-System-Manual.pdf - 第344页
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Gas Handling Issue 2: November 02 VKR= `äÉ~å=Ö~ë=äáåÉ=ïáíÜ=jc`=EUNJVJPNF= CLEAN GAS INL E T VAL VE (PN EUMA TICAL L Y CONT…
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Gas Handling
VKQ= qçñáÅ=Ö~ë=äáåÉ=EUNJVJONF=
GAS CONNECTION LINE
(STAINLESS STEEL)
GROMMET
INLET VALVE
(PNEUMATICALLY
CONTROLLED
SHUT-OFF)
OUTLET VALVE
(PNEUMATICALLY
CONTROLLED
SHUT-OFF)
2 µm FILTER
BYPASS VALVE
(MANUALLY
OPERATED
SHUT-OFF)
MASS
FLOW
CONTROLLER
GAS OUT
MANIFOLD
BYPASS
LINE
1
2
Item No. in
Illustration
Part Number Description
MA81B15064 AUTO TOXIC GAS LINE SNGL TYPE 'C' (all welded
pipework including filter and valves but excluding
MFC and MFC cable)
G/GAS/FIT/614C 1/4 GASKET. RETAIN SS4VCR2GR (USED IN ALL VCR
FITTINGS)
1 * MASS FLOW CONTROLLER
2 MA00Z21746 MKS MASS FLOW CABLE ASSY
* Mass Flow Controllers are not supplied with the gas line, they vary in type according to each
customer's requirement. Please quote the part number on the unit if spares are required.
Printed: 16-Jan-06, 15:55
Section 9 Page 7 of 10
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Gas Handling Issue 2: November 02
VKR= `äÉ~å=Ö~ë=äáåÉ=ïáíÜ=jc`=EUNJVJPNF=
CLEAN GAS
INLET VALVE
(PNEUMATICALLY
CONTROLLED
SHUT-OFF)
PROCESS GAS
OUTLET VALVE
(PNEUMATICALLY
CONTROLLED
SHUT-OFF)
1
2
Item No. in
Illustration
Part Number Description
MA81C15916 CLEAN GAS LINE (MFC CONTROLLED) (all welded
pipework including valves but excluding MFC and
MFC cable)
G/GAS/FIT/614C 1/4 GASKET. RETAIN SS4VCR2GR (USED IN ALL VCR
FITTINGS)
1 * MASS FLOW CONTROLLER
2 MA00Z21746 MKS MASS FLOW CABLE ASSY
* Mass Flow Controllers are not supplied with the gas line, they vary in type according to each
customer's requirement. Please quote the part number on the unit if spares are required.
Section 9 Page 8 of 10
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Gas Handling
VKS= `äÉ~å=Ö~ë=äáåÉ=ïáíÜ=êçí~ãÉíÉê=EUNJVJMTF=
1
PROCESS GAS
OUT TO SYSTEM
CLEAN GAS
SHUT-OFF VALVE
(PNEUMATICALLY
OPERATED)
PROCESS GAS
SHUT-OFF VALVE
(PNEUMATICALLY
OPERATED)
CLEAN GAS IN
LINE
ROTAMETER
2
Item No. in
Illustration
Part Number Description
MA81B15081 CLEAN GAS LINE (ROTAMETER) (all welded
pipework including valves but excluding
rotameter)
G/GAS/FIT/614C 1/4 GASKET. RETAIN SS4VCR2GR (USED IN ALL VCR
FITTINGS)
1 G/GAS/ROT/800 ROTAMETER 800 CCM F65-SAHR3-A125-7SS
2 MA81D14784 INLET PIPE (ROTAMETER)
Printed: 16-Jan-06, 15:55
Section 9 Page 9 of 10