Utah-94-721002-System-Manual.pdf - 第346页

mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Gas Handling Issue 2: November 02 VKT= d~ë=Ü~åÇäáåÖ=çéíáçå=ëé~êÉë= OIPT Part No. Qty Description 81-9-51 - Externally moun…

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mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Gas Handling
VKS= `äÉ~å=Ö~ë=äáåÉ=ïáíÜ=êçí~ãÉíÉê=EUNJVJMTF=
1
PROCESS GAS
OUT TO SYSTEM
CLEAN GAS
SHUT-OFF VALVE
(PNEUMATICALLY
OPERATED)
PROCESS GAS
SHUT-OFF VALVE
(PNEUMATICALLY
OPERATED)
CLEAN GAS IN
LINE
ROTAMETER
2
Item No. in
Illustration
Part Number Description
MA81B15081 CLEAN GAS LINE (ROTAMETER) (all welded
pipework including valves but excluding
rotameter)
G/GAS/FIT/614C 1/4 GASKET. RETAIN SS4VCR2GR (USED IN ALL VCR
FITTINGS)
1 G/GAS/ROT/800 ROTAMETER 800 CCM F65-SAHR3-A125-7SS
2 MA81D14784 INLET PIPE (ROTAMETER)
Printed: 16-Jan-06, 15:55
Section 9 Page 9 of 10
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Gas Handling Issue 2: November 02
VKT= d~ë=Ü~åÇäáåÖ=çéíáçå=ëé~êÉë=
OIPT Part No. Qty Description
81-9-51 - Externally mounted gas pod for up to six MFC lines + one rotameter or
MFC control line
MA81Z16003 1 GAS POD CHAMBER A or B PCB
G/AIR/VLV/506 1 6 WAY SMC ASSEMBLY SPASBR06
ESZ9102 1 DOOR INTERLOCK MICRO-SW SPDT
G/AIR/VLV/501 1 SINGLE SMC ASSEMBLY SPASBR01
G/GAS/FIT/614 1 ¼ RETAINING GASKET
81-9-11 1 Non-toxic gas line excluding mass flow controller
G/GAS/FIT/614 10 ¼ RETAINING GASKET
81-9-21 1 Toxic gas line with MFC bypass, excluding mass flow
controller
G/GAS/FIT/614 10 ¼ RETAINING GASKET
=
Section 9 Page 10 of 10
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Wafer Handling
pÉÅíáçå=NM=J=t~ÑÉê=Ü~åÇäáåÖ=çéíáçåëI=äç~Ç=äçÅâë=~åÇ=
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Section 10 - Wafer handling options, load locks and robotics......................................................................1
10.1 Loadlock (100-10-05C)..........................................................................................................................................2
10.2 Wafer handling option spares.............................................................................................................................5
Printed: 16-Jan-06, 15:55
Section 10 Page 1 of 6