Utah-94-721002-System-Manual.pdf - 第348页

mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Wafer Handling Issue 2: November 02 NMKN= ^ìíçã~íáÅ=äç~Ç=äçÅâ=ENMMJNMJMR`F== Section 10 Page 2 of 6 Printed: 16-Jan-06, 15…

100%1 / 362
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Wafer Handling
pÉÅíáçå=NM=J=t~ÑÉê=Ü~åÇäáåÖ=çéíáçåëI=äç~Ç=äçÅâë=~åÇ=
êçÄçíáÅë=
Section 10 - Wafer handling options, load locks and robotics......................................................................1
10.1 Loadlock (100-10-05C)..........................................................................................................................................2
10.2 Wafer handling option spares.............................................................................................................................5
Printed: 16-Jan-06, 15:55
Section 10 Page 1 of 6
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Wafer Handling Issue 2: November 02
NMKN= ^ìíçã~íáÅ=äç~Ç=äçÅâ=ENMMJNMJMR`F==
Section 10 Page 2 of 6
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Wafer Handling
=
Item OIPT Part No. Qty Description
MA00A20102 1 LOADLOCK ASSY. 46 x 236 mm VAT VALVE
1 G/SUN/CAB/942 1 HAND KNOB (M6) DIA. 30 mm
2 MD00D20785 1 LOADLOCK PROTECTIVE WINDOW
3 MD00C17683 1 VIEW PORT CLAMP PLATE
4 MD90D12788 1 WINDOW GASKET
5 MD90D12789 1 WINDOW GLASS
6 MD00A21658 1 LOADLOCK HINGED LID
7 G/SEL/O-V/279C 1 3.5 x 329.8 mm VITON 'O' RING BS279C
8 G/VAC/FIT//927 1 ROTARY FEEDTHRO. (8 mm SHAFT)
9 MD00C17699 1 DRIVE PULLEY
10 G/SUN/BEL/013 1 S/S BELT 6.35W x 0.075THK x 731LG
11 G/SUN/BRG/904 1 MINIATURE LM GUIDE TYPE HRW 14
12 MD00D20183 4 PILLAR
13 MD91C17754 1 SUPPORT PLATE
14 MD00D180027 1 LOADLOCK PCB MOUNT
15 MD00A20103 1 LOADLOCK CHAMBER 46 x 236 mm VAT VALVE
16 G/SUN/BRG/903 1 MINIATURE LM GUIDE TYPE HRW 12
17 MD00B20814 1 LOADLOCK/VALVE INTERFACE 2-RINGS
18 G/SEL/O-V/263C 1 3.5 x 196.4 mm VITON 'O' RING BS263
19 G/SEL/O-V/269C 1 3.5 x 221.85 mm VITON 'O' RING 200-269
20 MD00D17695 1 LOWER FRONT PULLEY MOUNT
21 MD00D20146 1 END EFFECTOR PLATE 2.2. Kg S/ST
22 MD00C20145 1 END EFFECTOR 2.2. Kg S/ST RATE
23 MD00D17698 3 DRIVEN PULLEY
24 MD00D17744 1 LOWER CARRIAGE BELT CLAMP
25 MD00C20253 1 UPPER RAIL SUPPORT
26 MD00D17693 1 UPPER REAR PULLY MOUNT
27 G/SUN/BEL/012 1 S/S BELT 6.35W x 0.075THK x 641LG
28 MD00D17696 3 PULLEY BEARING CLAMP
29 MD00B21657 1 LOADLOCK TOP COVER
30 MD00D17701 1 LOWER CARRIAGE END STOP
31 MD00D23696 2 HINGE BLOCK
32 MD00C23711 2 LID - HINGE PIN FIXING
33 G/SEL/O-V/260C 1 3.5 x 164.7 mm VITON 'O' RING BS260C
* MA00Z17834 1 LOADLOCK MOTOR CONTROL ASSEMBLY
* G/SUN/GER/009C 1 SERVO MOTOR 24VDC RS.718-981
* EMM0025 1 PRECISION DC M/GEARBOX 640:1
* G/VAC/GGE//005 1 ACT. PIRANI GGE APG-L-NW16
* G/VAC/GGE/004 1 ACT. INVERT MAG GGE AIM-V-NW25
G/SEL/O-V/280C 1 3.5 x 355.2 mm VITON 'O' RING BS280 - NOT SHOWN - FITS
BETWEEN ITEMS 15 AND 28
G/SEL/O-V/264C 1 3.5. x 190.1 mm VITON 'O' RING BS264 - NOT SHOWN - FITS
BETWEEN ITEMS 15 AND 17
G/SUN/BRG/050 3 4 PNT CONT'T BRG 1" 'ID x 1.375' O/D - NOT SHOWN - FITS
ON EACH ITEM 22
MD00D17674 1 10 PIN SEAL BODY - NOT SHOWN
MD00D17702 1 UPPER CARRIAGE END STOP - NOT SHOWN
MD00D17745 1 UPPER CARRIAGE BELT CLAMP - NOT SHOWN
ESZ9017 1 MICROSWITCH 331-405 - NOT SHOWN
EIQ0055C 1 OPTO SENSOR SLOTTED TRW - NOT SHOWN
MD00D18027 1 MICROSWITCH PLUNGER - NOT SHOWN
MD00D18042 1 MICROSWITCH ACTUATOR - NOT SHOWN
MD91D17505 4 LOCATION PIN - NOT SHOWN
* SEE PHOTOGRAPH ON FOLLOWING PAGE
Printed: 16-Jan-06, 15:55
Section 10 Page 3 of 6