Utah-94-721002-System-Manual.pdf - 第352页
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Wafer Handling Issue 2: November 02 NOTES: Section 10 Page 6 of 6 Printed: 16-Jan-06, 15:55
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Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Wafer Handling
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OIPT Part No. Qty Description
COMMON SPARES, SINGLE WAFER AUTOMATIC INSERTION LOAD LOCK FOR USE
WITH ISOLATED PROCESS CHAMBER, INCLUDING SUPPORT FRAME AND ACTIVE
PIRANI GAUGE (100-10-5xxx)
G/SUN/BEL/012 1 S/S BELT 6.35W x 0.075THK x 641LG
ESZ9107 1 MICRO SWITCH 331-405
G/VAC/FIT/927 1 ROTARY FEEDTHROUGH (8 mm SHAFT)
G/SUN/GER/009 1 SERVO MOTOR 24 VDC
EMM0025 1 PRECISION DC M/GEAR
MA00Z17834 1 LOADLOCK MOTOR CONTROLLER PCB
G/SUN/BEL/013 1 S/S BELT 6.35W x 0.075THK x 731LG
EIQ055 1 OPTO SENSOR SLOTTED
G/VAC/GGE/005 1 ACTIVE PIRANI GAUGE APG
G/SUN/BRG/050 1 4 PNT CONT'T BRG 1" I/D x 1.375" O/D
AS ABOVE WITH LARGE MESC VALVE (100-10-05C)
G//SUN/BRG/903 1 MINIATURE LM GUIDE BEARING TYPE HRW12
G//SUN/BRG/904 1 MINIATURE LM GUIDE BEARING TYPE HRW14
G/SEL/O-V/269 1 3.5 x 221.85 mm VITON 'O' RING 200-269
PM KIT LOADLOCK HANDLER - STANDARD QUARTZ CLAMP TOOLING (100-10-05CS)
MD91B22328SP 1 4" DIA WAFER CLAMP QUARTZ
MD91B22277SP 1 3" DIA WAFER CLAMP QUARTZ
MD91B22327SP 1 2" DIA WAFER CLAMP QUARTZ
MD91B24693SP 1 5" DIA WAFER CLAMP QUARTZ
MD91B22329SP 1 6" DIA WAFER CLAMP QUARTZ
MD91B23036SP 1 8" DIA WAFER CLAMP QUARTZ
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Printed: 16-Jan-06, 15:55
Section 10 Page 5 of 6
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Wafer Handling Issue 2: November 02
NOTES:
Section 10 Page 6 of 6
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Spare Parts Kits
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Section 11 - Spares............................................................................................................................................1
11.1 Standard spare parts kits.....................................................................................................................................2
11.2 Common system 100 base unit standard spares kit............................................................................................3
11.3 ICP180 additional parts kit ..................................................................................................................................3
11.4 Single wafer OIPT Loadlock spares kit................................................................................................................4
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Printed: 16-Jan-06, 15:55
Section 11 Page 1 of 4