Utah-94-721002-System-Manual.pdf - 第353页
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=q ÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Issue 2: November 02 Spare Parts Kits pÉÅíáçå=NN=J=pé~êÉë= Section 11 - Spares ..........................................…
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Illustrated Parts Catalogue
Ef`m=NUMF=
Wafer Handling Issue 2: November 02
NOTES:
Section 10 Page 6 of 6
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Spare Parts Kits
pÉÅíáçå=NN=J=pé~êÉë=
Section 11 - Spares............................................................................................................................................1
11.1 Standard spare parts kits.....................................................................................................................................2
11.2 Common system 100 base unit standard spares kit............................................................................................3
11.3 ICP180 additional parts kit ..................................................................................................................................3
11.4 Single wafer OIPT Loadlock spares kit................................................................................................................4
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Printed: 16-Jan-06, 15:55
Section 11 Page 1 of 4
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Spare Parts Kits Issue 2: November 02
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This section covers a commonly sold consumable parts list (100-S-PM ICP 180) for the mä~ë~ã~ä~Ä póëíÉã=NMM=
Ef`mNUMF exchanged as part of a Planned Annual Maintenance visit.
Section 11 Page 2 of 4
Printed: 16-Jan-06, 15:55