Utah-94-721002-System-Manual.pdf - 第354页
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Spare Parts Kits I ssue 2: November 02 NNKN= pí~åÇ~êÇ=ëé~êÉ=é~êíë=âáíë= This section covers a commonly sold consum able pa…
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Illustrated Parts Catalogue
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Issue 2: November 02 Spare Parts Kits
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Section 11 - Spares............................................................................................................................................1
11.1 Standard spare parts kits.....................................................................................................................................2
11.2 Common system 100 base unit standard spares kit............................................................................................3
11.3 ICP180 additional parts kit ..................................................................................................................................3
11.4 Single wafer OIPT Loadlock spares kit................................................................................................................4
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Section 11 Page 1 of 4
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Spare Parts Kits Issue 2: November 02
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This section covers a commonly sold consumable parts list (100-S-PM ICP 180) for the mä~ë~ã~ä~Ä póëíÉã=NMM=
Ef`mNUMF exchanged as part of a Planned Annual Maintenance visit.
Section 11 Page 2 of 4
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Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Spare Parts Kits
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A kit containing recommended parts for a System 100 base module including window components, table
components, general fixings etc.
Spares kit Part Number 100-S-CMP
OIPT Part No. Qty Description
G/SEL/O-V/384 1 5.3 mm x 380.37 mm VITON 'O' RING 200-384 (Top electrode lid - chamber seal)
G/SEL/O-V/211 1 3.5 mm x 20.2 mm VITON 'O' RING BS211
G/SEL/O-V/829 1 3.5 mm x 47.6 mm VITON 'O' RING BS829 (Table feedthrough 'O' ring)
G/SEL/O-V/146 1 2.6 mm x 66.3 mm VITON 'O' RING BS146 (Table feedthrough 'O' ring)
G/SEL/O-V/362 2 5.34 mm x 158.12 mm VITON 'O' RING BS362 (A - Pump down pipe to baseplate)
(B - Table to baseplate)
G/VAC/SEL/040C 1 NW40 CENTERING RING ALI/VITON
G/GAS/FIT/614C 1 ¼ RETAINING GASKET (GIM vcr gasket)
M/0651D/01 1 WINDOW GLASS (6 MM PYREX)
M/4175D/01 1 WINDOW GASKET
MA00D14711 1 NW40 CENTERING RING MOD (Viewport seal)
MD81D14211 1 UV/RF FILTER (Viewport filter)
MD81D14110 1 COMPRESSION RING (Table FT seal)
MD81C14107 1 TABLE FEEDTHROUGH (Table FT)
G/FIX/S32/630 4 M6 x 30 mm S/S CAPHEAD SCREW (Fixing 100 RIE)
G/FIX/S32/616 4 M6 x 16 mm S/S CAPHEAD SCREW (Fixing 100 RIE)
G/FIX/S54/516 4 M5 x 16 mm S/S CSK HEAD SCREW (Fixing 100 RIE)
G/FIX/S21/930 4 M10 x 30 mm HEX HD S/S SCREW (Fixing 100 PECVD)
G/FIX/S32/630 4 M6 x 30 mm S/S CAPHEAD SCREW (Fixing 100 PECVD)
G/FIX/S32/640 4 M6 x 40 mm S/S CAPHEAD SCREW (Fixing 100 PECVD)
G/FIX/S21/520 4 M5 x 20 mm HEX HD S/S SCREW (Fixing 100 PECVD)
G/FIX/S31/508 2 M5 x 8 mm CAPHEAD SKT SCREW (Fixing 100 PECVD)
G/FIX/S35/535 4 M5 x 35 mm S/S CAPHEAD SCREW(Fixing 100 PECVD)
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The list below contains additional spares that are limited to ICP180 machines:
Spares kit Part Number 100-S-180C - Ceramic
OIPT Part No. Qty Description
G/SEL/O-K/219 1 3.53 mm x 32.9 mm KALREZ 'O' RING BS219 (Gas inlet manifold)
G/SEL/O-K/235 1 3.53 mm x 79.0 mm KALREZ 'O' RING BS235 (Gas inlet manifold)
G/SEL/O-K/117 1 2.62 mm x 20.3 mm KALREZ 'O' RING BS117 (Gas inlet manifold)
G/SEL/O-K/264 2 3.53 mm x190.1 mm KALREZ 'O' RING BS264 (Main ICP tube seal)
G/VAC/FIT/039SP 1 VIEWPORT NW25 GLASS VP-NW-25 (Viewport)
G/VAC/SEL/025CSP 1 NW25 CENTERING RING (Viewport)
G/VAC/SEL/015 1 NW16 CENTERING RING ALUMINIUM (Top plate)
MD81D15847 1 PTFE RING (Gas inlet manifold)
MD00C18542SP 1 ALUMINA TUBE – ICP SOURCE (Main ICP Process tube)
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