Utah-94-721002-System-Manual.pdf - 第357页

mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=q ÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Issue 2: November 02 Accessories pÉÅíáçå=NO=J=^ÅÅÉëëçêáÉë= Section 12 - Accessories .....................................…

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mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
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Spare Parts Kits Issue 2: November 02
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The kit in the table below applies if a Single Wafer OIPT load lock is attached and consists of the following components:
Spares kit Part Number 100-10-05CS
OIPT Part No. Qty Description
MD90D12788 1 WINDOW GASKET (Single wafer OIPT loadlock)
G/SEL/O-V/280C 1 3.5 mm x 355.2 mm VITON 'O' RING BS280 (Single wafer OIPT loadlock)
G/SEL/O-V/260C 1 3.5 mm x164.7 mm VITON 'O' RING 200-260 (Single wafer OIPT loadlock)
G/VAC/SEL/015C 1 NW16 CENT. RING ALI/VITON (Single wafer OIPT loadlock)
G/SEL/O-V/015 1 1.8 mm x13.99 mm VITON 'O' RING BS015 (Single wafer OIPT loadlock)
G/SEL/O-V/263C 1 3.5 mm x 196.4 mm VITON 'O' RING BS263 (Single wafer OIPT loadlock)
G/SEL/O-V/269C 1 3.5 mm x 221.85 mm VITON 'O' RING 200-269 (Single wafer OIPT loadlock)
G/SEL/O-V/279C 1 3.5 mm x 329.8 mm VITON 'O' RING BS279 (Single wafer OIPT loadlock)
Section 11 Page 4 of 4
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Accessories
pÉÅíáçå=NO=J=^ÅÅÉëëçêáÉë=
Section 12 - Accessories....................................................................................................................................1
12.1 Heaters/chillers.....................................................................................................................................................2
12.2 Heater/chiller option spares ................................................................................................................................2
12.3 End point detectors..............................................................................................................................................3
12.3.1 Verity EP200 end point kit (100-12-72/01) .........................................................................................3
12.3.2 Verity EP200 optional spares..............................................................................................................3
12.3.3 Sofie integrated laser end point kit (81-12-86) .................................................................................4
12.3.4 Sofie integrated laser optional spares ...............................................................................................4
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Printed: 16-Jan-06, 15:55
Section 12 Page 1 of 6
mä~ëã~ä~Ä póëíÉã=NMM== lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`mNUMF=
Accessories Issue 2: November 02
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Heater chiller various options
OIPT Part No. Description
81-12-18 CU500 HEATER CHILLER 240V 50Hz
81-12-18/1 CU500 HEATER CHILLER 208V 60Hz
81-12-19 CU500 DIGITAL HEATER/CHILLER 240V 50Hz
81-12-19/1 CU500 DIGITAL HEATER/CHILLER 208V 60Hz
81-3-18/1 CU500 HEATER CHILLER 208V 60Hz
G/WTR/SUN/520 CU500 818S DIGITAL + FILTER KIT 240V 50Hz
G/WTR/SUN/521 CU500 818S DIGITAL + FILTER KIT 208V 60Hz
G/WTR/SUN/550 CU500 HEATER/CHILLER (+ACU006)
G/WTR/SUN/551 CU500 FAN MOTOR PT. No. 500-5
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OIPT Part No. Qty Description
G/WTR/SUN/502 1 PUMP HEAD FOR CU500
G/WTR/SUN/503 1 PUMP MOTOR FOR CU500
G/WTR/SUN/007 CORROSION INHIBITOR 3 x 5 LTR PACK
G/VAC/OIL/905 1 VAC GREASE SILICONE
G/WTR/SUN/801 1 WATER FILTER UNIT MCY4463EG
Section 12 Page 2 of 6
Printed: 16-Jan-06, 15:55