Utah-94-721002-System-Manual.pdf - 第40页
mä~ëã~ä~Ä póëíÉã=NMM l ñÑçêÇ =fåëíê ìãÉåíë =m ä~ëã~=qÉÅ ÜåçäçÖó== System Manual Fig 3.1: Typical control system The system may be run from the PC terminal in manual mode, that is using direct 'real time' contro…
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The frame is constructed from steel with removable access panels. Casters and adjustable feet
fitted to the bottom of the frame enable it to be easily manoeuvred, then levelled and locked
into position.
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The power box assembly is mounted on the outside of the frame. This distributes mains
power to the +24V and ±15V power supply unit, the frame mounted electrical units and the
remote auxiliary units. For circuit details of the unit, refer to the relevant drawing in Volume
2 of this manual.
A 24V EMO (Emergency Off) circuit connects all the EMO buttons mounted externally on the
machine. If any of these EMO buttons are pressed in, all the power outputs from the power
supply boxes are disabled.
NOTE: Freestanding auxiliary units such as water recirculators, Residual Gas Analysers, and
the system control PC, are
not powered via the base unit power box. These require
dedicated electrical service points. These accessories remain live when the system
EMO is pressed.
If it is required that all accessories are powered off when the EMO is pressed, the user must
supply a power distribution unit with outlets for the accessories, and contact the factory for
electrical access to the machine EMO circuit.
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The system is controlled from a remote IBM compatible PC computer terminal using Oxford
Instruments Plasma Technology's 'PC 2000' software via a Programmable Logic Controller
(PLC) housed in the console cabinet. See Fig 3.1.
Description
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Fig 3.1: Typical control system
The system may be run from the PC terminal in manual mode, that is using direct 'real time'
control over the process, or in automatic mode where the system performs the entire process
according to previously entered recipes. The extensive Oxford Instruments Plasma Technology
process library supports all mä~ëã~ä~Ä
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póëíÉã=NMM=configurations. A full description of the 'PC
2000' control instructions is provided in Section 5.
For details of the control wiring, see the relevant drawings in Volume 2 of this manual.
Description
UC Davis 94-721001 Issue 1: March 06 Page 3-4 of 22 Printed: 22-Mar-06, 7:29
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä póëíÉã=NMM
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There are two types of interlocks used on the=mä~ëã~ä~Ä
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póëíÉã=NMMI hardware and software.
In all areas, the hardware interlock will override any software interlock. The hardware
interlocks, and their effect on the system components in the case of an interlock becoming
open circuit are as follows:
The electrical interlocks are divided into two circuits controlling the power to the system.
1) The mains power connection is made to a system Power Distribution Unit. The Power
Distribution Unit will disable all of its power outputs under the following conditions:
a) If the Emergency Off button is pressed.
b) If there is an interruption of the power input to the system.
c) If the Power Distribution Unit external facility interlock sensor link becomes
open circuit.
NOTE:
The Power Distribution Unit external facility interlock sensor
link enables the interlocks of external sensors, e.g. gas
detectors, exhaust scrubbers, etc., to be monitored by the Power
Distribution Unit. External interlock contacts connected to this
link should be Normally Closed, i.e. faulting to an Open Circuit.
2) The system internal 24V supply, comprises a process line, a chamber lid line and a
water flow switch (where fitted):
The 24V process line, which controls the process gases and plasma power supply
units, will be disabled if the Vacuum Safety Switch is open circuit, i.e. Chamber
Pressure > 600 mbar.
The 24V chamber lid line will be disabled if the chamber lid is OPEN, leaving the
system controller operational, but disabling all system components.
Description
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