Utah-94-721002-System-Manual.pdf - 第62页

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WARNING

LIFTING HEAVY OBJECTS INCORRECTLY CAN CAUSE SEVERE INJURY

When handling heavy system components such as the system unit or

vacuum pumps, ensure that the appropriate lifting equipment,

operated by fully trained personnel, is used.

When heavy rack-mounted components are handled, ensure that the

weight is safely distributed between sufficient personnel.

WARNING

TOPPLING (TIPOVER) HAZARD - SOME SYSTEM COMPONENTS, E.G.

ROBOTIC HANDLERS AND AUTOMATIC LOAD LOCKS / TRANSFER

CHAMBERS (ESPECIALLY IF FITTED WITH CASSETTE LOAD LOCKS) CAN

TOPPLE CAUSING SEVERE INJURY.

When transporting or manoeuvring the system frames, robotic

handlers etc., ensure that they remain vertical at all times and use the

appropriate lifting / handling equipment.

Ensure that any support frames, supplied with the system, are

correctly fitted whenever the system is transported / manoeuvred or

dismantled for service / maintenance.

It is entirely the user’s responsibility to ensure that all components are

supported safely before and during any transporting, manoeuvring or

maintenance operations. Support frames provided by Oxford

Instruments Plasma Technology are not necessarily adequate for any

such operations. The absence of a support frame must not be taken as

an indication that no further precautions need to be made before such

operations are undertaken.

1) Transport the system frames to the clean room, then position them in the required

location. Level the system frames (ensuring that the wafer transfer path is aligned

from frame to frame) using the adjustable feet, then lock the feet.

OIPT recommends that at least 600mm service access space is allowed

between any obstacle (e.g. walls, partitions, etc.) and serviceable items,

e.g. the power distribution unit.

2) Transport the system PC to the clean room and position it in the required location.

3) Transport the gas pod to the grey area and mount it in the required position.

IMPORTANT OIPT gas pods typically weigh >40kg. If you intend fixing

your gas pod to a wall, ensure the wall and gas pod fixings

are sturdy enough to bear at least four times the weight of

the gas pod. Periodically, e.g. annually, check the gas pod

and its fixings are secure.

Installation and Commissioning

Printed: 16 March 2006 11:59 Page 4-3 of 8 Issue 4: March 05

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4) Transport the rotary vane pump to the grey area and mount it in the required

position in accordance with the pump manufacturer’s instructions. Refer to the

manufacturer’s literature in Volume 3 of this manual.

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(A) BEFORE CONNECTING ANY OF THE SERVICES, ENSURE THAT

THEY ARE TURNED OFF. E.G. COMPRESSED AIR AND GAS

SUPPLY VALVES SET TO THEIR OFF POSITIONS AND ELECTRICAL

SUPPLIES SWITCHED OFF AND LOCKED OUT.

(B) DO NOT RESTRICT ACCESS TO THE EMERGENCY OFF SWITCH

(EMO CONTROL) BY LOCATING CABLES AND OTHER

OBSTACLES IN FRONT OF THE SYSTEM.

IMPORTANT

NOTES

WALK. OIPT RECOMMENDS THAT CABLES ARE LOCATED IN

CABLE TRUNKING / TRENCHES.

1) Connect the extraction collars on the process chamber(s) (e.g. ICP process chambers)

and the gas pod to the appropriate extraction systems.

2) Connect the rotary vane pump exhaust line.

3) Connect the Nitrogen purge lines to the system services panel(s) and the rotary vane

pump.

4) Connect the compressed air supply to the system services panel(s) and to the gas

pod.

5) Connect the gas supplies to the gas pod (all gas supply valves closed).

6) Connect the gas outlet line, control cable and earth cable (see Fig 4.1) from the gas

pod to the system console.

7) Connect the cooling circuits to the system console.

8) At the system PC, connect the monitor, keyboard and mouse, then connect the

control cable(s) from the PC to the system console.

9) Connect the electrical supply from the safety isolation box to the system console. If it

is necessary to connect the 3-phase electrical supply cable to the power box, refer to

sub-section 4.2.3.1.

10) Connect the electrical supply to the PC.

11) Ensure that all covers and panels are fitted and attach notices to the system

indicating that the system is not ready for service.

Installation is now complete and the system is ready for commissioning by OIPT.

Note that customers who have arranged to commission the system themselves can

ignore the remainder of this Section.

12) Complete and sign the ‘System Readiness’ form QCF 89 (shipped with the system),

then fax it to OIPT who will arrange for the system to be commissioned.

Installation and Commissioning

Issue 4: March 05 Page 4-4 of 8 Printed: 16 March 2006 11:59

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If it is necessary to connect the 3-phase supply cable to the power box, use the following

steps.

1) Ensure that the supply cable is not connected to the safety isolation box.

2) Remove the power box cover.

3) Inside the power box, remove the clear plastic safety cover from the power box

(secured to the right-hand side of the power box by four screws).

4) Connect the 3-phase supply cable wires as shown in Fig 4.1.

5) Re-fit the clear plastic safety cover and then the power box cover.

L1 L2 L3 Neutral Protective

Earth (at

side of

panel)

Connection

Terminal for

Earth cable to

Gas Pod

3-phase connections

Clear plastic

safety cover

Fig 4.1: 3-phase supply cable connections at the power box

Installation and Commissioning

Printed: 16 March 2006 11:59 Page 4-5 of 8 Issue 4: March 05