Utah-94-721002-System-Manual.pdf - 第67页

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉ ÅÜåçäçÖó== mä~ëã~ä~Ä póëíÉãNMM RK= léÉê~íáåÖ=áåëíêìÅíáçåë== 5. Operating instructions ...........................................................................................…

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NOTES:

Installation and Commissioning

Issue 4: March 05 Page 4-8 of 8 Printed: 16 March 2006 11:59

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM

RK= léÉê~íáåÖ=áåëíêìÅíáçåë==

Operating instructions ............................................................................................5-1

5.1 Failure of quartz and alumina components under vacuum.........................................5-3

5.2 System power-up.............................................................................................................5-4

5.3 System shut down and restart........................................................................................5-5

5.3.1 Emergency shut down.............................................................................................5-5

5.3.2 Routine shut down..................................................................................................5-5

5.3.3 Mains Power failure ................................................................................................5-5

5.3.4 Software abort.........................................................................................................5-5

5.3.5 System shut-down procedure.................................................................................5-6

5.3.6 System restart following an emergency stop, power failure, or software abort5-6

5.3.7 System response to loss of services.........................................................................5-8

5.4 Operator control ...........................................................................................................5-10

5.4.1 Turning screen savers and power saver options off............................................5-10

5.4.2 Logging on.............................................................................................................5-11

5.4.2.1 Editing users details ....................................................................................5-11

5.4.3 System alerts ..........................................................................................................5-14

5.4.4 Pumping down.......................................................................................................5-15

5.4.5 Automatic process run ..........................................................................................5-16

5.4.6 Single button automatic process run...................................................................5-17

5.4.7 Production mode...................................................................................................5-18

5.4.8 Manual process run ...............................................................................................5-19

5.4.9 Venting the system................................................................................................5-20

5.5 Creating and editing recipes ........................................................................................5-21

5.5.1 Working with recipe steps....................................................................................5-21

5.5.2 Working with recipes ............................................................................................5-22

5.6 Process Datalog .............................................................................................................5-24

5.6.1 Select Log page......................................................................................................5-24

5.6.1.1 Saving a log file as text for use in Microsoft Excel™................................5-25

5.6.2 Run log page..........................................................................................................5-28

5.6.3 Leak detection and MFC calibration log page ....................................................5-29

5.7 Operator adjustments...................................................................................................5-30

5.7.1 Manual adjustment of the RF matching unit......................................................5-30

5.7.2 Adjusting the nitrogen regulator outlet pressure ..............................................5-31

5.7.3 Rotary/dry pump N

purge flow rate adjustment ...............................................5-32

5.8 PC 2000 screens..............................................................................................................5-33

5.8.1 Pump control page................................................................................................5-33

5.8.2 Robot control page ...............................................................................................5-36

5.8.3 Recipe page............................................................................................................5-37

5.8.4 Production mode page..........................................................................................5-39

5.8.5 Chamber 1 process control page..........................................................................5-40

5.8.6 Leak detection page..............................................................................................5-45

5.8.7 Mass flow calibration page...................................................................................5-47

5.8.8 Service mode..........................................................................................................5-48

5.8.8.1 Transferring wafers in service mode..........................................................5-49

5.8.8.2 Exiting from service mode..........................................................................5-50

5.8.9 System log page.....................................................................................................5-51

5.9 Log files..........................................................................................................................5-52

Fig 5.1: Menu bar.....................................................................................................................5-10

Fig 5.2: Typical system alert ....................................................................................................5-14

Fig 5.3: Recipe screen ..............................................................................................................5-21

Fig 5.4: Step Commands pop-up menu..................................................................................5-22

Fig 5.5: Select Log page...........................................................................................................5-24

Operating Instructions

Printed: 22-Mar-06, 10:42 Page 5-1 of 52 UC Davis 94-721001 Issue 1: March 06

mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual

Fig 5.6: Run log page.............................................................................................................. 5-28

Fig 5.7: Typical leak detection and MFC calibration log page............................................. 5-29

Fig 5.8: Typical AMU control panel ....................................................................................... 5-30

Fig 5.9: N

Pressure regulator/gauge..................................................................................... 5-31

Fig 5.10: Pump control page.................................................................................................. 5-33

Fig 5.11: Pump control page vacuum mimic......................................................................... 5-34

Fig 5.12: Pump control page operator interface.................................................................. 5-34

Fig 5.13: Robot control page.................................................................................................. 5-36

Fig 5.14: Recipe page.............................................................................................................. 5-37

Fig 5.15: Production mode page............................................................................................ 5-39

Fig 5.16: Chamber 1 process control page............................................................................ 5-40

Fig 5.17: Leak detection page................................................................................................ 5-45

Fig 5.18: Mass flow calibration page..................................................................................... 5-47

Fig 5.19: Service mode page .................................................................................................. 5-48

Fig 5.20: Wafer transfer in service mode.............................................................................. 5-49

Fig 5.21: System log page....................................................................................................... 5-51

Operating Instructions

UC Davis 94-721001 Issue 1: March 06 Page 5-2 of 52 Printed: 22-Mar-06, 10:42