Utah-94-721002-System-Manual.pdf - 第69页
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉ ÅÜåçäçÖó== mä~ëã~ä~Ä póëíÉãNMM WARNING BEFORE ATTEMPTING TO SWITCH ON (POWER UP OR OPERATE T HE SYSTEM), READ AND ENSURE THAT YOU UNDERSTAND SECT ION 1 - HEALTH AND SA FETY AT T…
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Fig 5.6: Run log page.............................................................................................................. 5-28
Fig 5.7: Typical leak detection and MFC calibration log page............................................. 5-29
Fig 5.8: Typical AMU control panel ....................................................................................... 5-30
Fig 5.9: N
2
Pressure regulator/gauge..................................................................................... 5-31
Fig 5.10: Pump control page.................................................................................................. 5-33
Fig 5.11: Pump control page vacuum mimic......................................................................... 5-34
Fig 5.12: Pump control page operator interface.................................................................. 5-34
Fig 5.13: Robot control page.................................................................................................. 5-36
Fig 5.14: Recipe page.............................................................................................................. 5-37
Fig 5.15: Production mode page............................................................................................ 5-39
Fig 5.16: Chamber 1 process control page............................................................................ 5-40
Fig 5.17: Leak detection page................................................................................................ 5-45
Fig 5.18: Mass flow calibration page..................................................................................... 5-47
Fig 5.19: Service mode page .................................................................................................. 5-48
Fig 5.20: Wafer transfer in service mode.............................................................................. 5-49
Fig 5.21: System log page....................................................................................................... 5-51
Operating Instructions
UC Davis 94-721001 Issue 1: March 06 Page 5-2 of 52 Printed: 22-Mar-06, 10:42
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM
WARNING
BEFORE ATTEMPTING TO SWITCH ON (POWER UP OR OPERATE THE SYSTEM), READ
AND ENSURE THAT YOU UNDERSTAND SECTION 1 - HEALTH AND SAFETY AT THE
BEGINNING OF THIS MANUAL.
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Induction coupled plasma sources contain quartz or alumina tubes or windows under vacuum,
which may be subject to attack by the plasma process. If these components fail whilst under
vacuum, an implosion can occur. This should not present a safety hazard, provided the
equipment is used with all covers and screens in place, but may cause damage to system
components.
Failure by implosion becomes more likely as the components age; therefore they should be
regarded as consumable items. A programme of regular inspection and renewal of these
components is necessary to minimise the risk of implosion.
WARNING
BEFORE POWERING UP THE SOURCE, ENSURE THAT ALL COVERS AND SCREENS ARE
FITTED CORRECTLY. DO NOT REMOVE THE COVERS OR SCREENS WHILST THE SOURCE
IS UNDER VACUUM.
Operating Instructions
Printed: 22-Mar-06, 10:42 Page 5-3 of 52 UC Davis 94-721001 Issue 1: March 06
mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
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This sub-section describes the initial power-up (switch on) of the system. It assumes that the
system is switched OFF at the wall-mounted safety isolation box.
WARNING
BEFORE POWERING THE SYSTEM UP, CHECK THAT:
A) THE 'ON-SITE' MAINTENANCE LOG SHOWS THAT THE SYSTEM IS IN A FIT
STATE FOR CUSTOMER OPERATION.
B) ALL DOORS ARE CLOSED AND ALL COVERS ARE IN PLACE.
C) THERE IS NO VISIBLE DAMAGE TO THE SYSTEM.
CAUTION
Always ensure that any heater/chiller units provided are switched on when the
system is powered up.
To power up the system, proceed as follows:
1) Ensure that all manually operated cooling water taps are turned ON.
2) Check that the 'Slit Valve Lockout' control is unlocked and pushed home.
3) Set all Remote/Local switches on the electronics modules to REMOTE.
4) Switch ON all the electronics modules located in the console.
5) Ensure that the compressed air supply is ON.
CAUTION
If the gas lines may contain air, do not open any gas taps. Continue with the start
up procedure, and then use the system to evacuate the lines one at a time. When
it is certain that the air has been removed and there are no leaks, open the gas
taps.
6) If you are certain that the gas lines do not contain air, turn all the manually
operated gas taps (on gas cylinders etc.) to ON.
7) Check that the Emergency Stop buttons are OUT.
8) Set the wall-mounted safety isolation box switch to ON (I).
9) Operate SYSTEM ON button (coloured green or with the ‘I’ legend), located on the
console.
10) Switch the remote PC operator terminal ON.
Operating Instructions
UC Davis 94-721001 Issue 1: March 06 Page 5-4 of 52 Printed: 22-Mar-06, 10:42