Utah-94-721002-System-Manual.pdf - 第71页
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉ ÅÜåçäçÖó== mä~ëã~ä~Ä póëíÉãNMM RKP= póëíÉã=ëÜìí=Ççïå=~åÇ = êÉëí~êí= The situations, which necessitate system shut down, are given in sub-section s 5.3.1 to 5.3.4. RKPKN= bãÉêÖÉå…
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This sub-section describes the initial power-up (switch on) of the system. It assumes that the
system is switched OFF at the wall-mounted safety isolation box.
WARNING
BEFORE POWERING THE SYSTEM UP, CHECK THAT:
A) THE 'ON-SITE' MAINTENANCE LOG SHOWS THAT THE SYSTEM IS IN A FIT
STATE FOR CUSTOMER OPERATION.
B) ALL DOORS ARE CLOSED AND ALL COVERS ARE IN PLACE.
C) THERE IS NO VISIBLE DAMAGE TO THE SYSTEM.
CAUTION
Always ensure that any heater/chiller units provided are switched on when the
system is powered up.
To power up the system, proceed as follows:
1) Ensure that all manually operated cooling water taps are turned ON.
2) Check that the 'Slit Valve Lockout' control is unlocked and pushed home.
3) Set all Remote/Local switches on the electronics modules to REMOTE.
4) Switch ON all the electronics modules located in the console.
5) Ensure that the compressed air supply is ON.
CAUTION
If the gas lines may contain air, do not open any gas taps. Continue with the start
up procedure, and then use the system to evacuate the lines one at a time. When
it is certain that the air has been removed and there are no leaks, open the gas
taps.
6) If you are certain that the gas lines do not contain air, turn all the manually
operated gas taps (on gas cylinders etc.) to ON.
7) Check that the Emergency Stop buttons are OUT.
8) Set the wall-mounted safety isolation box switch to ON (I).
9) Operate SYSTEM ON button (coloured green or with the ‘I’ legend), located on the
console.
10) Switch the remote PC operator terminal ON.
Operating Instructions
UC Davis 94-721001 Issue 1: March 06 Page 5-4 of 52 Printed: 22-Mar-06, 10:42
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The situations, which necessitate system shut down, are given in sub-sections 5.3.1 to 5.3.4.
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In an emergency, e.g. risk of physical injury, fire, etc., shut the system down by pressing an
Emergency Off (EMO) button. This will disable all power outputs from the power box
(except for low voltage supplies). When any faults have been cleared and the system is safe to
operate, restart the system using the procedure given in sub-section 5.3.6.
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When all processing operations are completed and the system is to be shut down for
maintenance and repair, use the shut down procedure given in sub-section 5.3.5. On
completion of maintenance and/or repair, restart the system using the System power up
procedure, given in sub-section 5.2.
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A mains power failure will halt all system functions. When power is restored, restart the
system using the procedure given in sub-section 5.3.6.
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To halt processing and wafer transfers, click on the STOP ALL AUTO PROCESSES button
which is displayed at the top of the page on all screens. Clicking on this button will halt the
current process and any further wafer transfers. (Any wafer transfers currently in progress will
continue.) Also, a Cluster System Abort dialogue is displayed asking you if you wish to shut
down the total system. Clicking on Yes will:
a) Switch the RF/microwave/magnet power generators OFF.
b) Switch the pumps OFF.
c) Close the APC and normally-closed vacuum valves.
d) Switch the process gases OFF.
As a result of clicking on Yes, the system should be restarted using the procedure given in
sub-section 5.3.6.
Operating Instructions
Printed: 22-Mar-06, 10:42 Page 5-5 of 52 UC Davis 94-721001 Issue 1: March 06
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Clicking on the No button in the Cluster System Abort dialogue will limit the abort to the
actions already done, i.e. stop all automatic recipes. Further processing operations (automatic
or manual) can then be carried out after ensuring that the system controller is aware of the
current wafer locations.
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CAUTION
If your system is fitted with a turbomolecular pump ensure that you read and
understand Appendix B before shutting the system down.
This procedure assumes that the process run is finished and that the system is to be shut down
for maintenance or repair.
1) Ensure that the system has been vented, and all pumps are switched off.
2) Exit from the PC 2000 software by clicking on the System button, then on the Exit
option.
3) Exit from Windows.
4) Turn the PC controller OFF.
5) At the Main Console, press the OFF button (coloured red or with a ‘0’ legend).
6) Switch off and lock off the wall-mounted safety isolation box.
7) Turn all manual gas taps on the Main Console, gas pod and compressed gas cylinders
OFF.
8) At the Main Console, set the SLIT VALVE LOCKOUT valve to its OFF position (pull
the red control knob fully outwards). Fit the adjacent padlock to the slit valve
lockout valve’s spindle then lock it to prevent any compressed air operated valve
movement.
9) Turn off the compressed air supply.
10) Ensure that all heated components have cooled to ambient temperature, then turn
off the cooling water.
WARNING
PART OF THE SYSTEM IS ELECTRICALLY ENERGISED IF THE CUSTOMER’S SUPPLY IS
TURNED ON. UNLIT INDICATOR LAMPS DO NOT MEAN THAT IT IS SAFE TO WORK ON
THE SYSTEM.
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A power failure, or emergency stop will halt all system functions. A software abort, (by
clicking on the STOP ALL AUTO PROCESSES button, then clicking on Yes in the Cluster
System Abort dialogue), also halts the machine quickly.
Operating Instructions
UC Davis 94-721001 Issue 1: March 06 Page 5-6 of 52 Printed: 22-Mar-06, 10:42