Utah-94-721002-System-Manual.pdf - 第72页
mä~ëã~ä~Ä póëíÉãNMM lñÑçêÇ =fåëíêìã Éåíë= mä~ëã~ =qÉÅÜåçäçÖó == System Manual Clicking on the No button in the Cluster System Abort dialogue will limit the abort to the actions already done, i.e. stop all automatic recip…
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM
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The situations, which necessitate system shut down, are given in sub-sections 5.3.1 to 5.3.4.
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In an emergency, e.g. risk of physical injury, fire, etc., shut the system down by pressing an
Emergency Off (EMO) button. This will disable all power outputs from the power box
(except for low voltage supplies). When any faults have been cleared and the system is safe to
operate, restart the system using the procedure given in sub-section 5.3.6.
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When all processing operations are completed and the system is to be shut down for
maintenance and repair, use the shut down procedure given in sub-section 5.3.5. On
completion of maintenance and/or repair, restart the system using the System power up
procedure, given in sub-section 5.2.
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A mains power failure will halt all system functions. When power is restored, restart the
system using the procedure given in sub-section 5.3.6.
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To halt processing and wafer transfers, click on the STOP ALL AUTO PROCESSES button
which is displayed at the top of the page on all screens. Clicking on this button will halt the
current process and any further wafer transfers. (Any wafer transfers currently in progress will
continue.) Also, a Cluster System Abort dialogue is displayed asking you if you wish to shut
down the total system. Clicking on Yes will:
a) Switch the RF/microwave/magnet power generators OFF.
b) Switch the pumps OFF.
c) Close the APC and normally-closed vacuum valves.
d) Switch the process gases OFF.
As a result of clicking on Yes, the system should be restarted using the procedure given in
sub-section 5.3.6.
Operating Instructions
Printed: 22-Mar-06, 10:42 Page 5-5 of 52 UC Davis 94-721001 Issue 1: March 06
mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
Clicking on the No button in the Cluster System Abort dialogue will limit the abort to the
actions already done, i.e. stop all automatic recipes. Further processing operations (automatic
or manual) can then be carried out after ensuring that the system controller is aware of the
current wafer locations.
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CAUTION
If your system is fitted with a turbomolecular pump ensure that you read and
understand Appendix B before shutting the system down.
This procedure assumes that the process run is finished and that the system is to be shut down
for maintenance or repair.
1) Ensure that the system has been vented, and all pumps are switched off.
2) Exit from the PC 2000 software by clicking on the System button, then on the Exit
option.
3) Exit from Windows.
4) Turn the PC controller OFF.
5) At the Main Console, press the OFF button (coloured red or with a ‘0’ legend).
6) Switch off and lock off the wall-mounted safety isolation box.
7) Turn all manual gas taps on the Main Console, gas pod and compressed gas cylinders
OFF.
8) At the Main Console, set the SLIT VALVE LOCKOUT valve to its OFF position (pull
the red control knob fully outwards). Fit the adjacent padlock to the slit valve
lockout valve’s spindle then lock it to prevent any compressed air operated valve
movement.
9) Turn off the compressed air supply.
10) Ensure that all heated components have cooled to ambient temperature, then turn
off the cooling water.
WARNING
PART OF THE SYSTEM IS ELECTRICALLY ENERGISED IF THE CUSTOMER’S SUPPLY IS
TURNED ON. UNLIT INDICATOR LAMPS DO NOT MEAN THAT IT IS SAFE TO WORK ON
THE SYSTEM.
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A power failure, or emergency stop will halt all system functions. A software abort, (by
clicking on the STOP ALL AUTO PROCESSES button, then clicking on Yes in the Cluster
System Abort dialogue), also halts the machine quickly.
Operating Instructions
UC Davis 94-721001 Issue 1: March 06 Page 5-6 of 52 Printed: 22-Mar-06, 10:42
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM
When power is restored, and it is safe to turn on or restart the system, use the following
procedure:
1) Turn off the machine at the system power off switch.
2) Turn on the machine at the system power on switch. (If a robot arm is fitted, it
should move slowly to its home position.)
3) Turn off the machine at the system power off switch again (see following Note A).
4) Turn on the machine at the system power on switch. (If cassette load lock(s) are
fitted, their elevators will move to find the end positions.)
5) A user with access to the Service Mode can then use the facilities to add wafers to
the mimic page so that the system controller knows where any wafers are.
NOTES:
A) The double on and off routine (in Steps 3 and 4) is essential only for a
system with a Hine robot arm and vacuum cassettes. If the arm has
stopped inside the cassette and both are initialised together, then both
the arm and the cassette contents will be damaged. Therefore the Hine
arm will go to its home position when power is applied, but the
cassettes will initialise ONLY if the Hine arm is already at home position
when power is applied.
B) System and data log files may have been corrupted. Refer to sub-
section 5.9 (page 5-52) for details.
Operating Instructions
Printed: 22-Mar-06, 10:42 Page 5-7 of 52 UC Davis 94-721001 Issue 1: March 06