Utah-94-721002-System-Manual.pdf - 第8页
QCF 61 Issue 7 Sheet 2/2 Oxford Instruments Plasma Technology North End, Yatton Bristol, BS49 4AP England. Telephone : +44 (0) 1934 8370 00 Fax: +44 (0) 1934 837001 E mail: plasma.technology@oxinst.co.uk `boqfcf`^qb=lc=^…
QCF 61 Issue 7
Oxford Instruments Plasma Technology
Sheet 1/2
North End, Yatton
Bristol, BS49 4AP
England.
Telephone : +44 (0) 1934 837000
Fax: +44 (0) 1934 837001
E mail: plasma.technology@oxinst.co.uk
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This form is to be completed in accordance with the guidelines stated in QCF 61a.
Witnessed by: Oxford Instruments Plasma Technology representative
Signature: Date: / / 0
Accepted by: Representative of the end user.
Signature: Date: / / 0
Brief description of the system:
The above equipment has been examined / tested in my presence, at Oxford Plasma Technology.
The following list defines items that need to be actioned prior to final acceptance being given.
Customer
Project number:
Equipment serial number/s:
OIPT circulation:
Service Manager
Design Manager
QCF 61 Issue 7
Sheet 2/2
Oxford Instruments Plasma Technology
North End, Yatton
Bristol, BS49 4AP
England.
Telephone : +44 (0) 1934 837000
Fax: +44 (0) 1934 837001
E mail: plasma.technology@oxinst.co.uk
`boqfcf`^qb=lc=^``bmq^k`b=
Please ask our representative for a copy of our Customer feedback form, in order that you may record your
opinions of the service given by Oxford Plasma Technology Ltd.
Brief description of the system:
Pre-acceptance form completed at OIPT ? Yes / No
Customer:
Project number:
Equipment serial number/s:
Witnessed by: Oxford Instuments Plasma Technology representative
Signature: Date: / / 0
Accepted by: Representative of the end user.
Signature: Date: / / 0
The equipment supplied has been examined and tested as an assembled system in my
presence, and has given satisfactory results where shown. (Tick as appropriate)
Operational Process
I am satisfied with the results that this system has produced and I accept that the technical
specifications have been achieved.
Comments:-
OIPT circulation:
Service Manager
Design Manager
Page 1 of 4
SYSTEM READINESS FORM
This form is provided in order for us to record the level of work that you have conducted, to support the installation of your new Oxford
Instruments system. The system should be installed, within the parameters listed below and the form returned to your supporting Oxford
Instruments office. Returning this form signifies that you have completed the installation of the system, in accordance with the Services
and Specifications data sheet and that the installation conforms with all of the requirements listed within. Should you not have a copy of
the afore-mentioned “Services & Specifications” data sheet, you should contact your supporting Oxford Instruments office immediately
and obtain a copy.
Should this form be received, an engineer dispatched to start commissioning and any of the facilities requirements not be
met, Oxford Instruments reserves the right to terminate that commissioning visit and charge the customer for a return
visit, once the facilities have been fully completed.
Company Name :
Company Contact
Name:
System Serial
Number :
System Type:
Please tick appropriate box YES NO Detail
1. Has the system been sited ? Attach site plan if available.
2. Has the system been installed in a clean room ?
3. Are there any special requirements for gaining access into the clean
room ? ie. clearance, training, citizenship etc.. If so please list below.
4. Have pumps been sited and the cables between each pump and
system power box been connected?
5. Has the gas pod been sited, connected to the system and connected
in to the appropriate gas delivery and exhaust extraction systems, in
accordance with local safety regulations?
6. If the system has a heater chiller, has this been sited, connected to
the lower electrode cooling circuit and filled with Hexid A40?
QCF 89 Issue 6