Utah-94-721002-System-Manual.pdf - 第88页
mä~ëã~ä~Ä póëíÉãNMM lñÑçêÇ =fåëíêìã Éåíë= mä~ëã~ =qÉÅÜåçäçÖó == System Manual To create a recipe step, based on an existing recipe step, use the following procedure: 1) Select a recipe step from the Step Library list, i.…
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Fig 5.3: Recipe screen
This page is used to assemble and store in memory all the set points and instructions which
make up a Recipe for an Automatic Mode run. These recipes consist of a sequence of process
Steps. ‘Drag and Drop’ facilities are provided to copy library steps into a recipe.
NOTE: For a description of the facilities on this page, refer to sub-section 5.8.3, page 5-37.
The Recipe option (accessed from the PROCESS button) displays the recipe page for the
process chamber. This page allows you to create / edit recipes and the recipe steps that they
contain.
NOTE: Before creating / editing recipes, make sure that you understand the operation of
key components of the system to ensure that recipes proceed as expected.
A recipe is created by adding steps from the Step Library to the Recipe Step Name fields. The
recipe is then allocated a Data Log Interval and saved.
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Recipe steps are stored in the Step Library list. The list can contain any number of steps,
depending on available hard disk space. When the displayed list is full, it becomes scrollable
to allow you to view all of the list contents.
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To create a new recipe step, use the following procedure:
1) In the Step Library panel, select the NEW button. The Step Edit page is displayed.
2) Enter the step parameters as required, then click on OK. The step is automatically
saved.
Operating Instructions
Printed: 22-Mar-06, 10:42 Page 5-21 of 52 UC Davis 94-721001 Issue 1: March 06
mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
To create a recipe step, based on an existing recipe step, use the following procedure:
1) Select a recipe step from the Step Library list, i.e. click on it to highlight it.
2) Select the COPY button. Enter a new step name.
3) Edit the step parameters as required, then click on OK. The new recipe step is
automatically saved.
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To edit an existing recipe, use the following procedure:
1) Select a recipe step from the Step Library list, i.e. click on it to highlight it.
2) In the Step Library panel, click on the Edit button.
3) Edit the step’s process parameters as required, then click on OK. The step is
automatically saved.
NOTE: Changing an existing recipe step will not alter saved recipes, which use the
old version of that step.
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To delete a recipe step, use the following procedure:
1) Select the recipe step from the Step Library list, i.e. click on it to highlight it.
2) Select the DELETE button; the selected recipe step is deleted.
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Recipes are ‘built’ using existing recipe steps, and edited as required.
Within a recipe, steps can be manipulated using the Step Commands pop-up menu
(accessed by clicking on the Recipe Steps field).
Fig 5.4: Step Commands pop-up menu
The Step Commands pop-up menu provides the following options:
Edit Step
Enables the selected (highlighted) step to be edited.
Operating Instructions
UC Davis 94-721001 Issue 1: March 06 Page 5-22 of 52 Printed: 22-Mar-06, 10:42
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM
Repeat Step
Repeats all subsequent steps until a Loop Step is reached. This group of
steps can be repeated any number of times. (When you select this option,
you are prompted to enter the number of times the group of steps is to be
repeated.)
Loop Step
Terminates a Repeat Step group.
Insert Step
Creates a 'gap' above the selected step to allow another step to be dragged
into the list.
Delete Step
Deletes the selected step from the list.
Cancel Closes the Step Commands pop-up menu.
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To build a recipe, use the following procedure:
1) In the Recipe panel, select the NEW button.
2) Click on a recipe step in the Step Library list, hold the left mouse button down then
drag the mouse pointer to the Step Name field next to the asterisk (*) then release
the mouse button. The step name is displayed in the Step Name field.
3) Repeat 2) as required to add further steps to the recipe. Note that once you have
filled the Step Name field, the recipe step list becomes scrollable, enabling you to
add a maximum total of 1000 steps.
4) To remove a step from the list, click on it to highlight it then select the Delete step
button from the Step Commands pop-up menu. Any further steps will move up the
list by one place.
5) To add a step before an existing step, click on the existing step then select the Insert
step button from Step Commands pop-up menu. The selected step and all those
following it will move down the list by one place. You can then drag another step
from the Step Library list into the now vacant field.
6) When all steps have been added, enter a time into the Data Log Interval field,
then enter a name for the recipe in the Recipe Name field. Finally, select the SAVE
button.
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To edit a recipe, use the following procedure:
1) Select the LOAD button, then select the recipe to be edited.
2) In the Step Commands pop-up menu, click on the Edit Step button, then edit the
process parameters as required. Note that editing a recipe step will not affect the
associated step, i.e. a step having the same filename, in the Library of Available
Steps.
3) To remove a step from the list, click on it to highlight it then select the DELETE STEP
button from the Step Commands pop-up menu. Any further steps will move up the
list by one place.
4) To add a step before an existing step, click on the existing step then select the
INSERT STEP button. The selected step and all those following it will move down
the list by one place. You can then drag another step from the Step Library list into
the now vacant field.
Operating Instructions
Printed: 22-Mar-06, 10:42 Page 5-23 of 52 UC Davis 94-721001 Issue 1: March 06