Utah-94-721002-System-Manual.pdf - 第96页

mä~ëã~ä~Ä póëíÉãNMM lñÑçêÇ =fåëíêìã Éåíë= mä~ëã~ =qÉÅÜåçäçÖó == System Manual RKT= léÉê~íçê=~ÇàìëíãÉåíë= RKTKN= j~åì~ä=~ÇàìëíãÉåí=çÑ=íÜÉ=oc=ã~íÅÜáåÖ=ìåáí= A manual adjustment panel, shown in Fig 5.8, is located behind a …

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The leak detection and MFC calibration log page is accessed from the Select Run page by

selecting either a leak detection run (

) or MFC calibration run ( ) and then clicking on

the View Run button.

Log panel

Graph panel

Leak detection run

MFC Calibration run

Leak detection trace

(Red)

MFC calibration trace

(Blue)

Time axis scale controls

Pressure axis scale controls

Fig 5.7: Typical leak detection and MFC calibration log page

This page is used to view details of up to six leak check runs and/or MFC calibration runs. Note

that Fig 5.7 shows details of a leak test (red trace) and an MFC calibration run (blue trace).

The facilities available on this page are:

Select Run

button

Displays the Select Run page.

Clear buttons

Select to remove the associated data from the log panel and graph

panel. Note that to re-display the cleared data, you must return to the

Select Run page and re-select it.

Log panel Displays details of each run in text format.

Graph panel Displays a plot of each run (pressure versus time). Each run is

represented by a coloured trace as indicated by the palette displayed

adjacent to the run data in the Log panel. The graph can be scaled in

each axis by the controls located at the bottom-left corner of the

graph.

Operating Instructions

Printed: 22-Mar-06, 10:42 Page 5-29 of 52 UC Davis 94-721001 Issue 1: March 06

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A manual adjustment panel, shown in Fig 5.8, is located behind a flap in the front of the

equipment rack. It comprises the following controls and indicators:

Auto / Manual switch: Sets the operating mode of the RF matching unit.

C1 MAX / MIN: Manual adjustment of RF matching capacitor C1. (Rotating its shaft

clockwise or counter clockwise.)

C2 MAX / MIN: Manual adjustment of RF matching capacitor C2. (Rotating its shaft

clockwise or counter clockwise.)

C1 PARK: Park position potentiometer for C1.

C2 PARK: Park position potentiometer for C2.

RF Interlock ON/OFF: Disables the RF interlock. RF generators deliver no power if the

interlock is off.

Capacitor positions for C1 and C2 are displayed as numbers from 000 (minimum) to 999

(maximum).

AUTO

MANUAL

C1 MAX

C1 MIN

C2 MAX

C2 MIN

C1 PARK

C2 PARK

OFF

Interlock

DISPLAY SELECTO

Fig 5.8: Typical AMU control panel

Note that Fig 5.8 shows an AMU control panel with control facilities for two AMUs. The left-

hand side controls are for AMU1 and the right-hand side controls are for AMU2. The LCD

displays are switched using the DISPLAY SELECTOR switch as shown in the following table.

DISPLAY SELECTOR

POSITION

LCD 1 (UPPER) LCD 2 (LOWER)

1 AMU 1 C1 POSITION AMU 1 C2 POSITION

2 RF 1 FORWARD POWER RF 1 REFLECTED POWER

3 RF 1 SETPOINT RF 1 Hi/Lo

4 RF 2 FORWARD POWER RF 2 REFLECTED POWER

5 RF 2 SETPOINT SPARE

6 AMU 2 C1 POSITION AMU 2 C2 POSITION

For full details of the Oxford Instruments Plasma Technology AMU, refer to its Operation and

Maintenance manual in Volume 3 of this manual.

Operating Instructions

UC Davis 94-721001 Issue 1: March 06 Page 5-30 of 52 Printed: 22-Mar-06, 10:42

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NOTE: Refer to Section 2 for a description of the Nitrogen vent distribution circuit.

The regulator outlet pressure should not usually require adjustment from its factory setting.

However, if adjustment is necessary, proceed as follows.

WARNING

THIS PROCEDURE INVOLVES WORKING ON THE SYSTEM WITH COVERS REMOVED

AND WITH THE ELECTRICAL POWER ON. THEREFORE IT MUST ONLY BE CARRIED OUT

BY TRAINED AND COMPETENT PERSONNEL WHO ARE AWARE OF THE RISKS

INVOLVED.

1) Remove system panels as necessary to gain access to the regulator.

Outlet connector

Outlet pressure

control knob

Outlet pressure

gauge

Fig 5.9: N

Pressure regulator/gauge

2) Adjust the regulator outlet pressure control knob to set the outlet pressure to the

maximum which will not open the check valve; normally 0.5 to 0.7 bar gauge as

indicated on the regulator gauge.

NOTE: Setting the outlet pressure too low will extend system venting times

excessively, and may compromise the purge gas flow to the turbo pump if

fitted. Setting the outlet pressure too high will open the check valve and

waste gas, but will not reduce venting times.

3) Refit all system covers.

4) Carry out a simple process to check that the vent sequence operates correctly.

Operating Instructions

Printed: 22-Mar-06, 10:42 Page 5-31 of 52 UC Davis 94-721001 Issue 1: March 06